KR980003323A - The baffle (BAFFLE) of the continuous refrigerant circulation type diffusion pump (DIFFUSION PUMP) - Google Patents

The baffle (BAFFLE) of the continuous refrigerant circulation type diffusion pump (DIFFUSION PUMP) Download PDF

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Publication number
KR980003323A
KR980003323A KR1019960024711A KR19960024711A KR980003323A KR 980003323 A KR980003323 A KR 980003323A KR 1019960024711 A KR1019960024711 A KR 1019960024711A KR 19960024711 A KR19960024711 A KR 19960024711A KR 980003323 A KR980003323 A KR 980003323A
Authority
KR
South Korea
Prior art keywords
baffle
refrigerant
cooling plate
diffusion pump
cooling
Prior art date
Application number
KR1019960024711A
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Korean (ko)
Other versions
KR100225323B1 (en
Inventor
박상규
고동균
Original Assignee
정기형
사단법인 한국가속기 및 플라즈마연구협회
박상규
주식회사 한빛진공산업기술개발
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 정기형, 사단법인 한국가속기 및 플라즈마연구협회, 박상규, 주식회사 한빛진공산업기술개발 filed Critical 정기형
Priority to KR1019960024711A priority Critical patent/KR100225323B1/en
Publication of KR980003323A publication Critical patent/KR980003323A/en
Application granted granted Critical
Publication of KR100225323B1 publication Critical patent/KR100225323B1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/06—Arrangement of vapour traps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use

Abstract

본 발명은 연속적 냉매순환식 확산펌프의 배플에 관한 것으로, 특히 일반적으로 사용되지 않는 액체질소트랩을 제거하여 확산펌프의 부피를 크게 줄였을 뿐만 아니라, 연속 순환식냉매를 이용한 냉각기능을 가진 배플을 사용함으로서 진공시스템의 오염을 방지하고 고순도의 진공을 구현할 수 있도록 한 것으로서, 확산펌프의 오일 증기가 역류하는 것을 방지하기 위한 배플과, 상기 배플의 내측에 형성되어 오일증기를 냉각시키는 냉각판과, 상기 냉각판의 외측을 둘러싸며 형성되는 냉매관과, 상기 냉매관으로 냉매를 공급하는 냉매 공급부를 구비한 것이다.The present invention relates to a baffle of a continuous refrigerant circulation type diffusion pump, in particular a baffle with a cooling function using a continuous circulation type refrigerant, A baffle for preventing reverse flow of the oil vapor in the diffusion pump; a cooling plate formed inside the baffle for cooling the oil vapor; and a cooling plate disposed inside the baffle for cooling the oil vapor, A refrigerant pipe formed around the outside of the cooling plate, and a refrigerant supply unit for supplying the refrigerant to the refrigerant pipe.

Description

연속적 냉매순환식 확산펌프(DIFFUSION PUMP)의 배플(BAFFLE)The baffle (BAFFLE) of the continuous refrigerant circulation type diffusion pump (DIFFUSION PUMP)

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제4도는 본 발명 확산펌프의 구성 단면도.4 is a structural cross-sectional view of the diffusion pump of the present invention.

제5도는 발명 배플의 단면도.5 is a cross-sectional view of an inventive baffle.

제6도는 본 발명 배플에 적용되는 냉매관의 구성도.6 is a schematic view of a refrigerant pipe applied to the baffle of the present invention.

제7도는 본 발명 냉각판의 일 실시예도.7 shows an embodiment of the cooling plate of the present invention.

제8도는 본 발명 냉각판의 다른 실시예도.8 shows another embodiment of the cooling plate of the present invention.

제9도는 본 발명 냉매공급부의 내부 상태도.FIG. 9 is an internal view of the refrigerant supply unit of the present invention. FIG.

Claims (7)

확산펌프의 오일증기가 역류하는 것을 방지하기 위한 배플과, 상기 배플의 내측에 형성되어 오일증기를 냉각시키는 냉각판과, 상기 냉각판의 외측을 둘러싸며 형성되는 냉매관과, 상기 냉매관으로 냉매를 공급하는 냉매 공급부를 구비한 것을 특징으로 하는 연속적 냉매순환식 확산펌프의 배플.A baffle for preventing reverse flow of the oil vapor in the diffusion pump; a cooling plate formed inside the baffle for cooling the oil vapor; a refrigerant tube surrounding the outside of the cooling plate; The baffle of the continuous-refrigerant circulating type diffusion pump. 제1항에 있어서, 상기 냉매관은 냉각판 주위를 여러번 둘러싸는 다단의 구조로 형성된 것을 특징으로 하는 연속적 냉매순환식 확산펌프의 배플.The baffle of claim 1, wherein the refrigerant tube is formed in a multi-stage structure surrounding the cooling plate several times. 제1항에 있어서, 상기 냉매공급으로부터 공급되는 냉매는 프레온가스인 것을 특징으로 하는 연속적 냉매순환식 확산펌프의 배플.The baffle of claim 1, wherein the refrigerant supplied from the refrigerant supply is a Freon gas. 제1항에 있어서, 상기 냉매공급부로부터 공급되는 냉매는 엘피(LP)가스, 액체질수소가스, 씨에프씨(CFC) 혹은 에이치에프씨(HFC)를 이용하는 것을 특징으로 하는 연속적 냉매순환식 확신펌프의 배플.The baffle (1) according to claim 1, characterized in that the refrigerant supplied from the refrigerant supply unit uses LP gas, liquid hydrogen gas, CFC (CFC) or HFC . 제1항에 있어서, 상기 냉각판은 냉매의 온도가 배플내로 쉽게 퍼질 수 있도록 벌집형상으로 형성한 것을 특징으로 하는 연속적 냉매순환식 확산펌프의 배플.The baffle of claim 1, wherein the cooling plate is formed in a honeycomb shape so that the temperature of the refrigerant can easily spread into the baffle. 제1항에 있어서, 상기 냉각판 및 냉매관은 열전도도를 높이도록 구리재질로 구비한 것을 특징으로 하는 연속적 냉매순환식 확산펌프의 배플.The baffle of claim 1, wherein the cooling plate and the refrigerant pipe are made of copper to increase thermal conductivity. 제1항에 있어서, 상기 냉각판의 하단부는 상승하는 오일증기가 충돌하여 직접 냉각판을 통과하지 않도록 일정각도로 경사지게 구비한 것을 특징으로 하는 연속적 냉매순환식 확산 펌프의 배플.The baffle of claim 1, wherein the lower end of the cooling plate is inclined at a predetermined angle so that the rising oil vapor does not directly pass through the cooling plate. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960024711A 1996-06-27 1996-06-27 Baffle of continuous refrigerant circulating type diffusion pump KR100225323B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960024711A KR100225323B1 (en) 1996-06-27 1996-06-27 Baffle of continuous refrigerant circulating type diffusion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960024711A KR100225323B1 (en) 1996-06-27 1996-06-27 Baffle of continuous refrigerant circulating type diffusion pump

Publications (2)

Publication Number Publication Date
KR980003323A true KR980003323A (en) 1998-03-30
KR100225323B1 KR100225323B1 (en) 1999-10-15

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Application Number Title Priority Date Filing Date
KR1019960024711A KR100225323B1 (en) 1996-06-27 1996-06-27 Baffle of continuous refrigerant circulating type diffusion pump

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101336788B1 (en) * 2012-07-27 2013-12-04 한국에너지기술연구원 A cooling system of the organic rankine cycle
KR101805055B1 (en) * 2017-03-07 2017-12-05 파카코리아 주식회사 Oil demister of heat exchanger type

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