KR970072285A - Wafer and lot identification number automatic reading system - Google Patents
Wafer and lot identification number automatic reading system Download PDFInfo
- Publication number
- KR970072285A KR970072285A KR1019960012516A KR19960012516A KR970072285A KR 970072285 A KR970072285 A KR 970072285A KR 1019960012516 A KR1019960012516 A KR 1019960012516A KR 19960012516 A KR19960012516 A KR 19960012516A KR 970072285 A KR970072285 A KR 970072285A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- identification number
- wafer processing
- lot
- reading system
- Prior art date
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- General Factory Administration (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
반도체 제작에 있어서 웨이퍼 및 로트(LOT) 식별번호를 자동으로 판독할 수 있는 판독 시스템이 개시된다. 본 발명은 플랫 존에 식별번호가 저장된 웨이퍼, 상기 웨이퍼를 적재하며, x, y, z방향으로 이동 가능한 웨이퍼스테이지, 상기 웨이퍼의 플랫 존에 지정되어 있는 웨이퍼 및 로트 식별번호를 판독하기 위한 웨이퍼/로트 ID 판독기, 및 상기 판독기에서 판독된 식별번호를 저장하기 위한 메모리 수단을 구비하여 작업 단순화 및 작업 효율을 극대화시킬 수 있으며, 웨이퍼의 스크래치와 같은 오류를 방지할 수 있다.Disclosed is a reading system capable of automatically reading wafer and lot (LOT) identification numbers in semiconductor fabrication. The present invention relates to a wafer processing apparatus, a wafer processing method, a wafer processing method, a wafer processing method, and a wafer processing method, A lot ID reader, and memory means for storing the identification number read out from the reader, thereby maximizing work and maximizing work efficiency, and preventing errors such as scratches of wafers.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제1도는 본 발명에 의한 웨스퍼/로트 식별번호 자동 판독시스템을 설명하기 위한 도면이다.FIG. 1 is a view for explaining a system for automatically identifying a wester / lot identification number according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960012516A KR970072285A (en) | 1996-04-24 | 1996-04-24 | Wafer and lot identification number automatic reading system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960012516A KR970072285A (en) | 1996-04-24 | 1996-04-24 | Wafer and lot identification number automatic reading system |
Publications (1)
Publication Number | Publication Date |
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KR970072285A true KR970072285A (en) | 1997-11-07 |
Family
ID=66217172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960012516A KR970072285A (en) | 1996-04-24 | 1996-04-24 | Wafer and lot identification number automatic reading system |
Country Status (1)
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KR (1) | KR970072285A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100724612B1 (en) * | 2000-07-26 | 2007-06-04 | 삼성전자주식회사 | Agv and wafer carrying method thereof |
-
1996
- 1996-04-24 KR KR1019960012516A patent/KR970072285A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100724612B1 (en) * | 2000-07-26 | 2007-06-04 | 삼성전자주식회사 | Agv and wafer carrying method thereof |
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