KR970072285A - Wafer and lot identification number automatic reading system - Google Patents

Wafer and lot identification number automatic reading system Download PDF

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Publication number
KR970072285A
KR970072285A KR1019960012516A KR19960012516A KR970072285A KR 970072285 A KR970072285 A KR 970072285A KR 1019960012516 A KR1019960012516 A KR 1019960012516A KR 19960012516 A KR19960012516 A KR 19960012516A KR 970072285 A KR970072285 A KR 970072285A
Authority
KR
South Korea
Prior art keywords
wafer
identification number
wafer processing
lot
reading system
Prior art date
Application number
KR1019960012516A
Other languages
Korean (ko)
Inventor
최승호
전태승
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960012516A priority Critical patent/KR970072285A/en
Publication of KR970072285A publication Critical patent/KR970072285A/en

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  • General Factory Administration (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

반도체 제작에 있어서 웨이퍼 및 로트(LOT) 식별번호를 자동으로 판독할 수 있는 판독 시스템이 개시된다. 본 발명은 플랫 존에 식별번호가 저장된 웨이퍼, 상기 웨이퍼를 적재하며, x, y, z방향으로 이동 가능한 웨이퍼스테이지, 상기 웨이퍼의 플랫 존에 지정되어 있는 웨이퍼 및 로트 식별번호를 판독하기 위한 웨이퍼/로트 ID 판독기, 및 상기 판독기에서 판독된 식별번호를 저장하기 위한 메모리 수단을 구비하여 작업 단순화 및 작업 효율을 극대화시킬 수 있으며, 웨이퍼의 스크래치와 같은 오류를 방지할 수 있다.Disclosed is a reading system capable of automatically reading wafer and lot (LOT) identification numbers in semiconductor fabrication. The present invention relates to a wafer processing apparatus, a wafer processing method, a wafer processing method, a wafer processing method, and a wafer processing method, A lot ID reader, and memory means for storing the identification number read out from the reader, thereby maximizing work and maximizing work efficiency, and preventing errors such as scratches of wafers.

Description

웨이퍼 및 로트 식별번호 자동 판독 시스템Wafer and lot identification number automatic reading system

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 본 발명에 의한 웨스퍼/로트 식별번호 자동 판독시스템을 설명하기 위한 도면이다.FIG. 1 is a view for explaining a system for automatically identifying a wester / lot identification number according to the present invention.

Claims (1)

플랫 존에 식별번호가 지정된 웨이퍼; 상기 웨이퍼를 적재하며 x, y, z 방향으로 이동 가능한 웨이퍼 스테이지; 상기 웨이퍼의 플랫 존에 지정되어 있는 웨이퍼 및 로드 식별번호를 판독하기 위한 웨이퍼/로트 ID 판독기; 및 상기 판독기에서 판독된 식별번호를 저장하기 위한 메모리 수단을 구비함을 특징으로 하는 웨이퍼/로트 ID 자동 판독 시스템.A wafer having an identification number assigned to a flat zone; A wafer stage for loading the wafer and being movable in x, y and z directions; A wafer / lot ID reader for reading a wafer and a load identification number assigned to the flat zone of the wafer; And memory means for storing the identification number read out from the reader. ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960012516A 1996-04-24 1996-04-24 Wafer and lot identification number automatic reading system KR970072285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960012516A KR970072285A (en) 1996-04-24 1996-04-24 Wafer and lot identification number automatic reading system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960012516A KR970072285A (en) 1996-04-24 1996-04-24 Wafer and lot identification number automatic reading system

Publications (1)

Publication Number Publication Date
KR970072285A true KR970072285A (en) 1997-11-07

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ID=66217172

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960012516A KR970072285A (en) 1996-04-24 1996-04-24 Wafer and lot identification number automatic reading system

Country Status (1)

Country Link
KR (1) KR970072285A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100724612B1 (en) * 2000-07-26 2007-06-04 삼성전자주식회사 Agv and wafer carrying method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100724612B1 (en) * 2000-07-26 2007-06-04 삼성전자주식회사 Agv and wafer carrying method thereof

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