KR970071034A

KR970071034A - Vertical displacement measuring device of X-Y stage

Info

Publication number: KR970071034A
Application number: KR1019960011454A
Authority: KR
Inventors: 조정호
Original assignee: 이대원; 삼성항공산업 주식회사
Priority date: 1996-04-16
Filing date: 1996-04-16
Publication date: 1997-11-07
Also published as: TW351753B; CN1168968A; KR0165222B1; JPH1038516A

Abstract

X-Y스테이지의 수직방향 변위 측정장치가 개시되어 있다.A vertical displacement measuring device for an X-Y stage is disclosed.

이 개시된 장치는 광원;과 이 광원에서 출사된 광을 선택적으로 회절통과시키 수 있도록 투명영역과 불투명영역이 주기적으로 형성된 제1스케일글레스와, 상기 제1스케일글래스를 통과한 광을 선택적으로 회절반사시킬 수 있도록 반사영역과 흡수영역이 주기적으로 형성되고 X-Y스테이지의 수직방향으로 이동 가능하게 설치된 제2스케일글래스;와 X-Y스테이지의 수직방향 변위를 감지하고, 감지된 변위에 대응하는 폭으로 제2스케일글래스가 움직이도록 제2스케일글래스의 일단에 고정 설치된 변위감지센서;와, 제2스케일글래스에서 반사되어 제1스케일글래스를 통과한 광을 수광할 수 있도록 된 수광부;와, 이 수광부에서 수광된 신호로부터 X-Y스테이지의 제2스케일글래스의 변위를 측정하고, 스테이지의 수직방향 변위를 제어하는 회로부;로 이루어진 것을 특징으로 한다.The apparatus includes a light source, a first scale grating in which a transparent region and an opaque region are periodically formed so as to selectively diffract the light emitted from the light source, and a second scale grating that selectively diffracts the light passing through the first scale glass A second scale glass provided so as to be able to move in the vertical direction of the XY stage so as to periodically form a reflection region and an absorption region so as to be able to detect a vertical displacement of the XY stage, A displacement sensor mounted on one end of the second scale glass so as to move the glass, a light receiving unit adapted to receive the light reflected by the second scale glass and passed through the first scale glass, And a circuit unit for measuring the displacement of the second scale glass of the XY stage and controlling the vertical displacement of the stage .

Description

Vertical displacement measuring device of X-Y stage

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 본 발명에 따른 X-Y스테이지의 수직방향 변위 측정장치의 실시예를 나타낸 개략적인 구성도, 제2도는 제1도의 제1스케일글래스와 제2스케일글래스를 나타낸 개략적인 구성도, 제3도는 제1도의 수광부와 회로부를 나타낸 개략적인 구성도.FIG. 1 is a schematic diagram showing an embodiment of a vertical displacement measuring apparatus for an XY stage according to the present invention, FIG. 2 is a schematic diagram showing a first scale glass and a second scale glass of FIG. 1, Fig. 1 is a schematic diagram showing a light receiving portion and a circuit portion in Fig. 1; Fig.

Claims

A first scale scale in which a transparent region and an opaque region are periodically formed so that light emitted from the light source can be selectively diffracted and passed through the first scale glass; A second scale glass provided so that a reflection region and an absorption region are periodically formed so as to be able to reflect light and can be moved in the vertical direction of the XY stage and a second scale glass which detects a vertical displacement of the XY stage, A circuit for measuring the displacement of the second scale glass of the XY stage from the signal received by the light receiving unit and controlling the vertical displacement of the stage, Wherein the XY stage is provided with a vertical displacement measuring device.

2. The XY stage according to claim 1, further comprising a first focusing lens capable of connecting divergent light emitted from the light source on an optical path between the light source and the first scale glass, Device.

2. The XY stage according to claim 1, further comprising a second focusing lens capable of converging the first scale glass on an optical path between the first scale glass and the light receiving unit, Device.

The display device according to claim 1, wherein the first and second scaling glasses are formed to have the same width, and only the predetermined diffracted light among the diffracted light in the first and second scale glasses is directed to the light receiving unit And an XY-stage vertical displacement measuring device.

2. The XY stage according to claim 1, wherein the light-receiving unit comprises four optical sensors (P1, P2, P3, P4) for receiving light and converting the light into a current signal corresponding to the received light amount. Displacement measuring device.

The optical sensor according to claim 5, wherein the photosensors (P1, P2, P3, P4) are positioned on four quadrants about a cross-shaped boundary line, and the photosensors adjacent to each other have a phase difference of 90 degrees Vertical displacement measuring device of XY stage.

2. The image sensor according to claim 1, wherein the circuit unit comprises: four current-voltage converters connected respectively to output terminals of the photosensors (P1, P2, P3 and P4) for converting the detected current signals into voltage signals; A first differential amplifier and a second differential amplifier for receiving and amplifying two voltage signals having a 180 degree phase difference among the voltage signals converted by the voltage converter; A calculator for calculating a displacement amount by comparing the counted value of the waveform shaping / counting unit with the lattice period of the first and second scale glasses, And a comparator for comparing the displacement amount and the actual displacement amount to detect the error value and transmitting the error value to the motor control unit for driving the XY stage so as to correct the error. Vertical displacement measuring apparatus of the Stage.

※ Note: It is disclosed by the contents of the first application.