KR970069098A - Water removal device of exhaust gas purification device - Google Patents

Water removal device of exhaust gas purification device

Info

Publication number
KR970069098A
KR970069098A KR1019960012335A KR19960012335A KR970069098A KR 970069098 A KR970069098 A KR 970069098A KR 1019960012335 A KR1019960012335 A KR 1019960012335A KR 19960012335 A KR19960012335 A KR 19960012335A KR 970069098 A KR970069098 A KR 970069098A
Authority
KR
South Korea
Prior art keywords
housing
exhaust gas
tube
cooling
storage tank
Prior art date
Application number
KR1019960012335A
Other languages
Korean (ko)
Other versions
KR0180351B1 (en
Inventor
원영식
Original Assignee
원영식
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 원영식 filed Critical 원영식
Priority to KR1019960012335A priority Critical patent/KR0180351B1/en
Publication of KR970069098A publication Critical patent/KR970069098A/en
Application granted granted Critical
Publication of KR0180351B1 publication Critical patent/KR0180351B1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/265—Drying gases or vapours by refrigeration (condensation)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/266—Drying gases or vapours by filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Drying Of Gases (AREA)
  • Treating Waste Gases (AREA)

Abstract

본 발명은 배출가스 정화장치의 수분제거장치에 관한 것으로, 통상 반도체 제조공장 등의 공정에 발생되는 가스는 정화시켜 배출해야 하는데, 이때 상기 공정에서 정화된 배출가스는 상술된 바와 같이 물 등이 분사되어 수분이 다량 함유되어 있고 상기 정화장치의 배출부는 주로 함석관으로 제작된 메인덕트에 연결되어 있는바, 상기 수분이 다량함유된 정화된 배출가스가 메인덕트에 방출되면 상기 메인덕트는 수분으로 인한 부식이 촉진되는 문제점이 발생된다.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus for removing moisture in an exhaust gas purifying apparatus. In general, a gas generated in a semiconductor manufacturing plant is purified and discharged. And the outlet of the purifier is connected to a main duct mainly made of a hammer pipe. When the purified exhaust gas containing a large amount of moisture is discharged into the main duct, Corrosion is promoted.

이에 본 발명은 예시도면 제1도 내지 제3도에서와 같이 하우징(10)의 내측 하부에 열전소자(28)에 의해 냉각되는 냉각관(12) 및 냉각판(36)을 다단으로 설치하고 내측 상부에는 필터(16)를 다단으로 설치하여 상기 문제점을 해소한 것이다.1 to 3, the present invention is characterized in that a cooling tube 12 and a cooling plate 36, which are cooled by a thermoelectric element 28, are provided in the inner lower portion of the housing 10 in multiple stages, And the filter 16 is provided in a multi-stage structure on the upper portion to solve the above-described problem.

Description

배출가스 정화장치의 수분제거 장치Water removal device of exhaust gas purification device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

Claims (4)

하우징(10)하부 냉각판(36)이 설치된 냉각관(12)및 방열관(14)이 다단계로 설치되며, 상기 하우징(10)의 상부 내측에는 필터(16)가 다단계로 설치된 것을 특징으로 하는 배출가스 정화장치의 수분제거장치.A cooling tube 12 and a heat radiating tube 14 provided with a lower cooling plate 36 of a housing 10 are installed in a multistage manner and a filter 16 is provided in multiple stages inside an upper portion of the housing 10 A device for removing water from an exhaust gas purifier. 제1항에 있어서, 하우징(10)은 그 내측에 내관(18)이 설치되는 한편, 상기 하우징(10)의 상단 및 하부는 상기 내관(18)의 내경에 비해 그 내경이 좁으며 상기 하우징(10)의 하단은 흡입관(20)이 연결되고, 상기 하우징(10)의 하부에는 저장탱크(22)가 설치된 것을 특징으로 하는 배출가스 정화장치의 수분제거장치.The housing (10) according to claim 1, wherein the housing (10) is provided with an inner tube (18) inside thereof and the upper and lower portions of the housing (10) are narrower in inner diameter than the inner diameter of the inner tube 10 is connected to a suction pipe 20 and a storage tank 22 is installed at a lower portion of the housing 10. 제2항에 있어서, 저장탱크(22)의 상단은 상기 하우징(10)및 내관(18)의 하단과 밀착되도록 이중으로 되어 있으며, 상기 저장탱크(22)하부에는 개구부(24)가 형성되어 있고, 상기 저장탱크(22)의 하단에 배수파이프(26)가 형성된 것을 특징으로 하는 배출가스 정화장치의 수분제거 장치.The storage tank (22) according to claim 2, wherein an upper end of the storage tank (22) is double formed so as to be in close contact with a lower end of the housing (10) and the inner pipe (18) , And a drain pipe (26) is formed at the lower end of the storage tank (22). 제1항에 있어서, 냉각관(12)은 상기 하우징(10)의 일측에 관통되어 그 내측에 설치되고 상기 냉각관(12)의 일단과 방열관(14)의 일단 사이에 열전소자(26)를 설치하되, 상기 열전소자(28)의 냉각부(30)는 냉각관(12)과 밀착되고 가열부(32)는 상기 방열관(14)의 일단과 밀착되는 한편, 상기 방열관(14)측에는 냉각팬(34)이 설치된 것을 하는 배출가스 정화장치의 수분제거장치.The refrigerator according to claim 1, wherein the cooling tube (12) penetrates one side of the housing (10) and is installed inside the housing (10), and thermoelectric elements (26) are provided between one end of the cooling tube (12) Wherein the cooling part 30 of the thermoelectric element 28 is in close contact with the cooling tube 12 and the heating part 32 is in close contact with one end of the heat dissipation tube 14, And a cooling fan (34) is provided on the side of the exhaust gas purifying device. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960012335A 1996-04-23 1996-04-23 Moisture removing apparatus of exhaust gas purifier KR0180351B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960012335A KR0180351B1 (en) 1996-04-23 1996-04-23 Moisture removing apparatus of exhaust gas purifier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960012335A KR0180351B1 (en) 1996-04-23 1996-04-23 Moisture removing apparatus of exhaust gas purifier

Publications (2)

Publication Number Publication Date
KR970069098A true KR970069098A (en) 1997-11-07
KR0180351B1 KR0180351B1 (en) 1999-03-20

Family

ID=19456400

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960012335A KR0180351B1 (en) 1996-04-23 1996-04-23 Moisture removing apparatus of exhaust gas purifier

Country Status (1)

Country Link
KR (1) KR0180351B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100829592B1 (en) * 2006-04-26 2008-05-14 최달철 A device for purifying exhaust gas using an vapor elimination apparatus
KR102582209B1 (en) * 2021-08-31 2023-09-25 건국대학교 산학협력단 High-efficiency radiator device for a desolvator

Also Published As

Publication number Publication date
KR0180351B1 (en) 1999-03-20

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