KR970063531A - Chemical solution sampling device - Google Patents

Chemical solution sampling device Download PDF

Info

Publication number
KR970063531A
KR970063531A KR1019960003399A KR19960003399A KR970063531A KR 970063531 A KR970063531 A KR 970063531A KR 1019960003399 A KR1019960003399 A KR 1019960003399A KR 19960003399 A KR19960003399 A KR 19960003399A KR 970063531 A KR970063531 A KR 970063531A
Authority
KR
South Korea
Prior art keywords
container
chemical solution
chemical liquid
sampling device
chemical
Prior art date
Application number
KR1019960003399A
Other languages
Korean (ko)
Other versions
KR100203402B1 (en
Inventor
고용균
길준잉
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960003399A priority Critical patent/KR100203402B1/en
Publication of KR970063531A publication Critical patent/KR970063531A/en
Application granted granted Critical
Publication of KR100203402B1 publication Critical patent/KR100203402B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N1/14—Suction devices, e.g. pumps; Ejector devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N1/14—Suction devices, e.g. pumps; Ejector devices
    • G01N2001/1418—Depression, aspiration

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

본 발명은 반도체소자의 제조공정중 화학용액을 사용하는 공정을 행하는 공정조를 구비한 장비에서 공정에 사용중인 화학용액의 상태를 분석하기 위한 샘플을 채취하는 화학용액의 샘플링장치에 관한 것으로, 공정조에 있는 약액을 일정량 수용할 수있는 용기와, 용기와 공정조를 연결하는 약액이송관과, 용기를 공정조의 기압보단 낮은 상태로 만들어 주는 진공라인 및 진공펌프를 포함하여, 샘플링 작업시 장비의 공간이나 외부 조건에 영향을 받지 않고, 분석을 필요로한 약액의 오염을 방지하므로서 장비의 신뢰성을 높여 주도록 한 것이다.The present invention relates to a chemical solution sampling apparatus for collecting a sample for analyzing the state of a chemical solution used in a process in equipment equipped with a process tank for performing a process using a chemical solution during a process of manufacturing a semiconductor device, A container capable of holding a certain amount of the chemical liquid in the tank, a chemical liquid transfer line connecting the container and the process tank, and a vacuum line and a vacuum pump for lowering the container to a lower pressure than the process tank, And to improve the reliability of the equipment by preventing the contamination of the chemical liquid which needs analysis without being affected by external conditions.

Description

화학용액 샘플링장치Chemical solution sampling device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2도는 본 발명의 제1실시예에 따른 약액 샘플링장치의 구성도.FIG. 2 is a configuration diagram of a chemical liquid sampling apparatus according to a first embodiment of the present invention; FIG.

Claims (6)

약학용액이 채워진 공정조(100)를 포함하는 반도체소자 제조용 습식공정장비에 있어서, 소정크기를 갖는 용기(20)와 및: 상기 공정조(100)의 약액을 상기 용액으로 관을 통하여 옮겨주는 약액 이송수단을 포함하는 것을 특징으로 하는 약학용액 샘플링장치.A wet process apparatus for manufacturing semiconductor devices comprising a process tank (100) filled with a pharmaceutical solution, comprising: a container (20) having a predetermined size; and a chemical liquid transferring means for transferring the chemical liquid in the process tank (100) Characterized in that it comprises a transfer means. 제1항에 있어서, 상기 용기(20)는 외부와 기밀을 유지되도록 하고, 상기 이송수단은 상기 공정조(100)의 일측이 약액에 잠기도록 설치되고 타측이 상기 용기의 내측바닥부에 위치하도록 설치된 약액이송관(10)과, 상기 약액이 상기 약액이송관을 통하여 용기로 흡입하는 흡입부재를 포함하는 것을 특징으로 하는 화학용액 샘플링장치.2. The process container according to claim 1, wherein the container (20) is kept hermetically sealed to the outside, and the transporting means is disposed so that one side of the process tank (100) A chemical liquid transfer tube (10) installed therein, and a suction member (10) through which the chemical liquid is sucked into the container through the chemical liquid transfer pipe. 제3항에 있어서, 상기 약액이송관(10)과 용기 사이에는 연결부위(10a)와 밸브(10b)를 구비한 것을 특징으로 하는 화학용액 샘플링장치.4. The chemical solution sampling device according to claim 3, wherein a connection portion (10a) and a valve (10b) are provided between the chemical liquid transfer pipe (10) and the container. 제3항에 있어서, 상기 흡입부재는 진공펌프(31)와 이 진공펌프와 연결된 상기 용기(20)의 상부에 연결된 진공라인(32)으로 구성되어 용기(20)를 진공시켜 약액을 흡입하는 것을 특징으로 하는 화학용액 샘플링장치.The vacuum cleaner according to claim 3, wherein the suction member comprises a vacuum pump (31) and a vacuum line (32) connected to the upper portion of the container (20) connected to the vacuum pump Characterized by a chemical solution sampling device. 제5항에 있어서, 상기 진공라인(32)에는 라인연결부위(32a)와 밸브(32b)가 설치되는 것을 특징으로 하는 화학용액 샘플링장치.6. The chemical solution sampling device according to claim 5, wherein the vacuum line (32) is provided with a line connection portion (32a) and a valve (32b). 약액이 채워진 공정조(100)를 포함하는 반도체소자 제조용 습식공정장비에 있어서, 소정크기를 갖는 실린저(40)와, 상기 실린저(40)의 개구부에 연결되어 상기 공정조(100)의 약액이 잠기도록 설치된 약액이송관(10)을 포함하는 것을 특징으로 하는 화학용액 샘플링장치.1. A wet process equipment for manufacturing a semiconductor device comprising a process bath (100) filled with a chemical solution, characterized by comprising: a syringe (40) having a predetermined size; Characterized in that the chemical solution sampling device (10) is installed so as to be locked. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960003399A 1996-02-13 1996-02-13 Sampling apparatus of chemical solution KR100203402B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960003399A KR100203402B1 (en) 1996-02-13 1996-02-13 Sampling apparatus of chemical solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960003399A KR100203402B1 (en) 1996-02-13 1996-02-13 Sampling apparatus of chemical solution

Publications (2)

Publication Number Publication Date
KR970063531A true KR970063531A (en) 1997-09-12
KR100203402B1 KR100203402B1 (en) 1999-06-15

Family

ID=19451137

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960003399A KR100203402B1 (en) 1996-02-13 1996-02-13 Sampling apparatus of chemical solution

Country Status (1)

Country Link
KR (1) KR100203402B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101851350B1 (en) 2015-03-24 2018-04-23 동우 화인켐 주식회사 Liquid sampling apparatus
KR102282674B1 (en) 2019-09-02 2021-07-30 호산테크 주식회사 Automatic sampling device and thereof method
KR102354032B1 (en) 2020-03-16 2022-01-21 호산테크 주식회사 Automatic sampling device
KR20240126988A (en) 2023-02-15 2024-08-22 정규민 Autosampler

Also Published As

Publication number Publication date
KR100203402B1 (en) 1999-06-15

Similar Documents

Publication Publication Date Title
CA1296598C (en) Cleaning apparatus for needles used in drawing a liquid
ES2002966A6 (en) A device for use in the handling of body fluids.
JPS601563A (en) Discharger
CA2397688A1 (en) Liquid specimen collection system
SE8001913L (en) DEVICE FOR TRANSFER OF DOSED QUANTITIES OF REAGENT LIQUID TO TESTS BY AN ANALYZER
CN112858659A (en) Sampling needle cleaning system, sample analyzer and immune luminescence analyzer
KR970063531A (en) Chemical solution sampling device
CN212228487U (en) Water sample sampling device for hydraulic engineering
JP3192392B2 (en) Nozzle mechanism
CN214844053U (en) Dissolution sampling device for large-area surface
CN214859600U (en) Novel thoracocentesis liquid-drawing auxiliary device
CN212513668U (en) Sample extractor for pharmaceutical experiment
US4196743A (en) Fluid transfer system
CN210427479U (en) Detect tail gas and prevent suck-back processing apparatus
CN211652105U (en) Sampling device
JP2609506B2 (en) Serum collection device
KR102406481B1 (en) Safety vessel set for reagent
CN212111277U (en) Liquid chromatogram mobile phase holds device
CN213516495U (en) Reliable type chemical reagent auxiliary agent sampling device
CN218288826U (en) Novel sealed liquid pumping device
CN217042652U (en) Bottleneck knockout with cleaning function
CN218726670U (en) Urine sugar detection device
JPH10119973A (en) Chemical container having sampling port
CN217738804U (en) Full-automatic extraction device for chemical pollutant detection
CN213677264U (en) Liquid split charging device for biological inspection

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20070228

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee