KR970060431A - Deterioration prevention device of pressure sensor for semiconductor manufacturing - Google Patents
Deterioration prevention device of pressure sensor for semiconductor manufacturing Download PDFInfo
- Publication number
- KR970060431A KR970060431A KR1019960001890A KR19960001890A KR970060431A KR 970060431 A KR970060431 A KR 970060431A KR 1019960001890 A KR1019960001890 A KR 1019960001890A KR 19960001890 A KR19960001890 A KR 19960001890A KR 970060431 A KR970060431 A KR 970060431A
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- pressure sensor
- sensor
- diaphragm
- pressure regulating
- Prior art date
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Abstract
본 발명은 반도체 제조용 압력 조절 센서의 열화 방지 장치에 관한 것으로서, 반응관 내의 반응 가스를 진공 펌프로 배기시키는 배기관에 격막의 상하 작용으로 압력을 조절하는 압력 조절 센서를 설치하되, 상기 배기관과 압력 조절 센서 사이에는 배출 반응 가스에 수반되는 분진이 격막에 직접 접촉될 수 없도록 가스를 공급하여 가스 커튼을 형성시키는 가스 공급 수단이 부설되는 것을 특징으로 하여, 상기 압력 조절 센서의 감지 능력이 저하되는 것을 막을 수 있으므로 공정 설비의 안정화를 기할 수 있어 반도체 제품의 품질 불량을 감소시킬 뿐만 아니라 센서의 교체 주기를 연장할 수 있어 부품 비용도 절감하는 효과가 있다.The present invention relates to an apparatus for preventing deterioration of a pressure regulating sensor for manufacturing a semiconductor, and more particularly, to an exhaust pipe for evacuating a reaction gas in a reaction tube by a vacuum pump, a pressure regulating sensor for regulating the pressure of the diaphragm, And gas supply means for supplying a gas to the gas sensor so as to prevent dust accompanying the discharge reaction gas from directly contacting the diaphragm is provided between the sensors to prevent the sensing ability of the pressure regulating sensor from being degraded. It is possible to stabilize the process equipments, thereby not only reducing the quality defects of the semiconductor products but also extending the replacement cycle of the sensors, thereby reducing the parts cost.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제2도는 본 발명에 따른 압력 감지 센서의 열화 방지 장치의 구성 및 작동 상태를 나타낸 개략도.FIG. 2 is a schematic view showing a configuration and operation state of an apparatus for preventing deterioration of a pressure sensing sensor according to the present invention; FIG.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960001890A KR970060431A (en) | 1996-01-29 | 1996-01-29 | Deterioration prevention device of pressure sensor for semiconductor manufacturing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960001890A KR970060431A (en) | 1996-01-29 | 1996-01-29 | Deterioration prevention device of pressure sensor for semiconductor manufacturing |
Publications (1)
Publication Number | Publication Date |
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KR970060431A true KR970060431A (en) | 1997-08-12 |
Family
ID=66219086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960001890A KR970060431A (en) | 1996-01-29 | 1996-01-29 | Deterioration prevention device of pressure sensor for semiconductor manufacturing |
Country Status (1)
Country | Link |
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KR (1) | KR970060431A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030053283A (en) * | 2001-12-22 | 2003-06-28 | 동부전자 주식회사 | Deposition system of oxidation layer of a semiconductor device |
-
1996
- 1996-01-29 KR KR1019960001890A patent/KR970060431A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030053283A (en) * | 2001-12-22 | 2003-06-28 | 동부전자 주식회사 | Deposition system of oxidation layer of a semiconductor device |
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E601 | Decision to refuse application |