KR970053336A - Belt Driven Semiconductor Manufacturing Equipment - Google Patents

Belt Driven Semiconductor Manufacturing Equipment Download PDF

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Publication number
KR970053336A
KR970053336A KR1019950067544A KR19950067544A KR970053336A KR 970053336 A KR970053336 A KR 970053336A KR 1019950067544 A KR1019950067544 A KR 1019950067544A KR 19950067544 A KR19950067544 A KR 19950067544A KR 970053336 A KR970053336 A KR 970053336A
Authority
KR
South Korea
Prior art keywords
belt
semiconductor manufacturing
motor
type semiconductor
manufacturing apparatus
Prior art date
Application number
KR1019950067544A
Other languages
Korean (ko)
Other versions
KR100203403B1 (en
Inventor
채희선
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950067544A priority Critical patent/KR100203403B1/en
Priority to TW086210283U priority patent/TW354191U/en
Priority to JP32564696A priority patent/JP3558474B2/en
Publication of KR970053336A publication Critical patent/KR970053336A/en
Application granted granted Critical
Publication of KR100203403B1 publication Critical patent/KR100203403B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Abstract

본 발명은 벨트에 의해 구동되는 부하를 가지는 벨트 전동 방식의 반도체 제조 장치에 관한 것으로, 공정의 수행 도중에 벨트에 의한 동력 전달에 이상이 발생되었을 때 이를 가능한 빨리 작업자가 인지하여 조치를 위할 수 있도록 하기 위한 것으로, 본 발명의 장치는 부하의 피동 풀리(21)에 근접하여 설치되고 목적물로부터의 거리에 대응하는 전기 신호를 발생하는 근접 센서(40)와, 이 거리 근접 센서(The present invention relates to a belt transmission-type semiconductor manufacturing apparatus having a load driven by a belt, when an abnormality occurs in the power transmission by the belt during the execution of the process to enable the operator to recognize and take action as soon as possible The apparatus of the present invention is provided with a proximity sensor 40 which is installed in close proximity to the driven pulley 21 of the load and generates an electrical signal corresponding to the distance from the object, and the distance proximity sensor (

40)의 출력 전압을 증폭하는 전압 증폭부(50)와이 전압 증폭부(50)의 아날로그 출력 신호를 디지탈 신호로 변환하는 A/D 변환부(60)와, 벨트를 이용한 동력 전달의 이상 유무를 판정하고 그에 따른 제어를 수행하는 마이크로 프로세서(70)와, 이 마이크로 프로세서(81)에 의해 각각 제어되어 동력 전달 상태를 각각 표시하고 경보하는 표시부(81) 및 경보부(82)와, 모터(10)로 공급되는 전류량을 측정하는 전류계The voltage amplification unit 50 for amplifying the output voltage of 40, the A / D conversion unit 60 for converting the analog output signal of the voltage amplification unit 50 into a digital signal, and abnormality of power transmission using the belt A microprocessor 70 for determining and performing control according to the present invention, a display unit 81 and an alarm unit 82 which are respectively controlled by the microprocessor 81 to display and alarm a power transmission state, and a motor 10; Ammeter to measure the amount of current supplied to the

(83)를 가진다. 이로써, 반도체 장치 제조 공정의 수행도중에 벨트가 풀리들로부터 벗겨졌을 때, 벨트의 이완으로 인해 그것이 헛돌거나 동력 전달이 단속될 때, 벨트가 끊어졌을 때, 혹은 모터의 회전이 중지되었을 때, 이를 즉시 작업자가 인지할 수 있도록 하여 가장 바람직한 조치를 가능한 빨리 취할 수 있도록 함으로써, 벨트의 동력 전달 이상으로 인한 작업상의 손실을 최소화할 수 있다.Has 83. Thus, when the belt is removed from the pulleys during the execution of the semiconductor device manufacturing process, when the belt loosens or the power transmission is interrupted due to the belt's loosening, when the belt is broken, or when the rotation of the motor is stopped, By ensuring that the most desirable action is taken as soon as possible, it is possible to minimize operational losses due to abnormal power transmission of the belt.

Description

벨트 전동 방식 반도체 제조 장치Belt Driven Semiconductor Manufacturing Equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 따른 벨트 전동 방식 반도체 제조 장치.2 is a belt transmission type semiconductor manufacturing apparatus according to the present invention.

Claims (7)

벨트에 이해 모터로부터 부하로 동력을 전달하는 벨트 전동 방식 반도체 제조 장치에 있어서, 제조 공정의 수행 도중에 상기 벨트가 벗겨졌을 때 이를 표시하고 경보하는 수단을 구비하는 것을 특징으로 하는 벨트 전동방식 반도체 제조 장치.A belt transmission type semiconductor manufacturing apparatus for transmitting power from a motor to a load, the belt transmission type semiconductor manufacturing apparatus comprising a means for displaying and alarming when the belt is peeled off during the execution of a manufacturing process. . 제1항에 있어서, 상기 벨트의 이완으로 인해 그것이 헛돌거나 상기 부하로의 동력 전달이 단속될 때 이를 표시하고 경보하는 수단을 부가적으로 구비하는 것을 특징으로 하는 벨트 전동방식 반도체 제조 장치.The belt transmission type semiconductor manufacturing apparatus according to claim 1, further comprising means for indicating and alarming when the belt is loose due to relaxation of the belt or when power transmission to the load is interrupted. 제2항에 있어서,앗기 벨트가 끊어졌을 때 이를 표시하고 경보하는 수단을 부가적으로 구비하는 것을 특징으로 하는 벨트 전동방식 반도체 제조 장치.The belt transmission type semiconductor manufacturing apparatus according to claim 2, further comprising means for displaying and alarming when the take-down belt is broken. 제3항에 있어서, 상기 모터로의 전류 공급의 중단 혹은 상기 모터로 공급되는 전류량의 부족으로 인해 상기 모터의 회전이 중지되었을 때 이를 표시하고 경보하는 수단을 부가적으로 구비하는 것을 특징으로 하는 벨트 전동방식 반도체 제조 장치.4. The belt according to claim 3, further comprising means for indicating and alarming when the rotation of the motor is stopped due to the interruption of the current supply to the motor or the lack of the amount of current supplied to the motor. Electric semiconductor manufacturing device. 모터로부터 벨트를 통하여 피동 풀리로 전달되는 동력에 의해 구동되는 부하를 가지는 벨트 전동 방식 반도체 제조 장치에 있어서, 상기 피동 풀리에 근접하여 설치되고 상기 피동 풀리 또는 상기 벨트로부터의 거리에 대응하는 전기 신호를 발생하는 거리 검출 수단과, 상기 거리 검출 수단의 출력 전압을 증폭하는 전압 증폭 수단과, 상기 전압 증폭 수단의 아날로그 출력 신호를 디지탈 신호로 변환하는 A/D 변환 수단과, 표시 수단과 및 경보 수단과, 상기 벨트를 이용한 동력 전달의 이상 유무를 판정하고 그에 따라 상기 표시 수단 및 상기 경보 수단을 제어하는 제어 수단을 구비하는 것을 특징으로 하는 벨트 전동방식 반도체 제조 장치.A belt transmission type semiconductor manufacturing apparatus having a load driven by a power transmitted from a motor to a driven pulley through a belt, comprising: an electric signal provided in proximity to the driven pulley and corresponding to a distance from the driven pulley or the belt; Generating distance detection means, voltage amplifying means for amplifying the output voltage of the distance detecting means, A / D conversion means for converting the analog output signal of the voltage amplifying means into a digital signal, display means, and alarm means; And control means for determining whether there is an abnormality in power transmission using the belt and controlling the display means and the alarm means accordingly. 제5항에 있어서, 상기 모터로 공급되는 전류량을 측정하는 수단을 부가적으로 구비하는 것을 특징으로 하는 벨트 전동방식 반도체 제조 장치.The belt transmission type semiconductor manufacturing apparatus according to claim 5, further comprising means for measuring an amount of current supplied to the motor. 제5항 또는 제6항에 있어서, 상기 거리 검출 수단은 거리 근접 센서인 것을 특징으로 하는 벨트 전동방식 반도체 제조 장치.The belt transmission type semiconductor manufacturing apparatus according to claim 5 or 6, wherein the distance detecting means is a distance proximity sensor. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950067544A 1995-12-29 1995-12-29 Belt transmission drive type semiconductor device fabrication apparatus KR100203403B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1019950067544A KR100203403B1 (en) 1995-12-29 1995-12-29 Belt transmission drive type semiconductor device fabrication apparatus
TW086210283U TW354191U (en) 1995-12-29 1996-11-11 A belt transmission drive type semiconductor device fabrication apparatus
JP32564696A JP3558474B2 (en) 1995-12-29 1996-12-05 Belt transmission associated with semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950067544A KR100203403B1 (en) 1995-12-29 1995-12-29 Belt transmission drive type semiconductor device fabrication apparatus

Publications (2)

Publication Number Publication Date
KR970053336A true KR970053336A (en) 1997-07-31
KR100203403B1 KR100203403B1 (en) 1999-06-15

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Application Number Title Priority Date Filing Date
KR1019950067544A KR100203403B1 (en) 1995-12-29 1995-12-29 Belt transmission drive type semiconductor device fabrication apparatus

Country Status (3)

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JP (1) JP3558474B2 (en)
KR (1) KR100203403B1 (en)
TW (1) TW354191U (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10850622B2 (en) 2017-10-16 2020-12-01 Kubota Corporation Electric travelling vehicle and grass mower
JP6948913B2 (en) * 2017-10-26 2021-10-13 株式会社クボタ Mower
KR102600415B1 (en) * 2022-10-12 2023-11-08 성균관대학교산학협력단 Driving belt inspection device and mehtods of wafer transfer module

Also Published As

Publication number Publication date
JP3558474B2 (en) 2004-08-25
JPH09196131A (en) 1997-07-29
TW354191U (en) 1999-03-01
KR100203403B1 (en) 1999-06-15

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