JPH09196131A - Electric-driven belt type semi-conductor manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To recognize an accident as rapidly as possible by a worker, and to take an action when an abnormality is generated in transmitting the power by a belt while a work is achieved. SOLUTION: The driving force of a motor 10 is transmitted to a fan 20 through a driven pulley 11, a belt 30, and the driven pulley 21, the analog output voltage of a distance proximity sensor of electrostatic capacity type generated corresponding to the distance from an object is amplified by a voltage amplification part 50, the analog output signal of the voltage amplification part 50 is converted into the digital signal by an A/D conversion part 60, and then, outputted to a microprocessor 70 to judge absence/presence of an abnormality of the power transmission making use of the belt 30. A display part 81 is controlled by the microprocessor 70 according to the result of judgment, the condition of the power transmission is displayed on the display part 81, and alarmed by an alarm part 82 by controlling the alarm part 82.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric belt type semiconductor manufacturing apparatus, and more particularly to a belt.
The present invention relates to an electric belt type semiconductor manufacturing apparatus having a load driven by t).

[0002]

2. Description of the Related Art All processes in a semiconductor manufacturing apparatus are usually performed in a clean room, and air is kept in a well-controlled humidity and temperature. Therefore, the filtered air is circulated without interruption to prevent the particles from adhering to the semiconductor device. In order to obtain clean air in this way, for example, in Japanese Utility Model Laid-Open No. 62-95712.
In the publication, when the semiconductor wafer on the mounting table is conveyed to the processing chamber and the semiconductor wafer is subjected to predetermined processing, a hood is arranged above the mounting table, and a blower fan is arranged above the hood. An air purifying filter is interposed between the hood and the blower fan to remove dust from the air generated by the blower fan with the air purifying filter, and then clean air is passed through the hood to the semiconductor wafer on the mounting table. The technical idea of blowing air is disclosed.

Further, in Japanese Patent Laid-Open No. 4-287923, a static eliminator is used to remove dust of air blown from a fan provided outside at an air supply port on an upper surface of an etching chamber with a filter. This air is ionized and blown into the etching chamber, and the gas and liquid located at the lower part of this etching chamber are discharged to the outside of the etching chamber, so that dust and etching generated in the etching chamber are generated. It is disclosed that the amount of adhered liquid or washing liquid to the semiconductor substrate should be reduced due to stagnation of mist.

As described above, the air purifying device is used in some form in the semiconductor manufacturing device. As an example of this air purifying device, for example, Japanese Utility Model Laid-Open No. 6-3426 discloses a semiconductor manufacturing device. Discloses an air purifying device that optimizes the internal and external pressures regardless of the state of the external pressure.

That is, the pressure difference between the inside and the outside of the semiconductor manufacturing apparatus varies depending on the user's equipment.
If the driving condition of the air cleaning device and the atmosphere in which the semiconductor manufacturing device is installed are not consistent,
The problem was that the air pressure inside the semiconductor manufacturing equipment and the air pressure inside the clean room could not be balanced, and the phenomenon of entrainment of external air was induced to adversely affect the air cleaning function.

Therefore, the controller compares the signal obtained by measuring the differential pressure between the internal pressure and the external pressure of the semiconductor manufacturing apparatus with the differential pressure gauge and the reference differential pressure signal corresponding to the difference between the internal pressure and the external pressure of the semiconductor manufacturing apparatus. Then, the deviation between the two is obtained, and the power regulator is controlled so that this deviation becomes 0, and the electric power supplied to the motor is adjusted, whereby the air volume of the fan is adjusted and the internal pressure and external pressure of the semiconductor manufacturing apparatus are adjusted. It is disclosed that the differential pressure between and is set to an appropriate value.

As an approximation technique of the present invention described later,
For example, in Japanese Patent Laid-Open No. 7-55652, a thermal clean chamber is used as a device under test, and a portable test booth that is lightweight and easy to move is left at the manufacturing site, and the device is tested. By storing the body in the test booth, giving a start command to the automatic operation control panel equipped in the test booth at that position, and performing each required test,
It is disclosed that the effort and burden on the tester and the worker are reduced.

Further, as another conventional example of the approximation technique of the present invention, for example, in Japanese Patent Laid-Open No. 2-148822, an exposure apparatus in a semiconductor manufacturing apparatus is maintained by keeping a constant environmental temperature and humidity. It is disclosed that, in an environmental chamber that maintains the performance of (1) in a highly accurate and stable manner for a long period of time, when an operation abnormality occurs, the abnormality is analyzed and appropriate treatment is performed. In the case of this publication, a HEPA filter is installed in the chamber that covers the exposure apparatus.
(High efficiency air filter) is provided, and the fan, heater, and cooler are sequentially arranged between the HEPA filter and the intake hole. When an abnormality occurs in these fans, heaters, coolers, etc., the abnormality detection circuit detects the abnormality. And outputs it to the abnormality detection signal analysis circuit section.

If the abnormality detection signal analysis circuit section determines that the abnormality is a continuous abnormality, it causes the abnormality signal cancellation circuit section to reset the abnormality detection circuit section an arbitrary number of times, When the abnormality detection signal analysis circuit section determines that the abnormality can be recovered and determines whether the abnormality can be recovered, the operation of the location where the abnormality occurs is continued, thereby ensuring stable operation of the exposure apparatus. It describes what you can do.

As a technique related to the cleaning of the above clean chamber, for example, a semiconductor manufacturing apparatus having a conventional belt-driven HEPA filter system as shown in FIG. 2 is known. FIG. 2 is a perspective view showing the configuration of an example thereof. In FIG. 2, a tube 2 is placed in a hermetically sealed space where a semiconductor wafer is located, such as a chamber.
High purity air is blown from e).

The driven pulley 11 together with the shaft of the motor 10
(driving pully) rotates, and a belt 30 is stretched between the driven pulley 11 and the driven pulley 21. The belt 30 is a belt for transmitting the rotational force of the motor 10 to the fan 20.

In the belt electric type semiconductor manufacturing apparatus as shown in FIG. 2, the power of the motor 10 is transmitted to the fan 20 through the driven pulley 11, the belt 30, and the driven pulley 21, and the fan 20 rotates. The space 1 thus sealed is maintained in a preset state.

[0013]

However, in such a conventional electric belt type semiconductor manufacturing apparatus, the belt 30 is driven by the driven pulley 1 while the semiconductor device manufacturing process is being performed.
1, 21, or when the belt 30 is loosened, it idles to interrupt the power transmission to the fan 20, the belt 30 is broken, or the rotation of the motor 10 is stopped. It becomes impossible to maintain the space 1 in a predetermined state, but there was no means to make the worker recognize this state as soon as possible and take the most desirable measure as soon as possible. In addition, the reduction in the productivity of semiconductor devices had to be accepted.

An object of the present invention is to provide an electric belt type semiconductor manufacturing apparatus capable of preventing a reduction in productivity of a semiconductor device due to an abnormality in power transmission using a belt.

Another object of the present invention is to provide an electric belt type semiconductor manufacturing apparatus capable of more accurately grasping the power transmission state of the belt by an operator and minimizing the loss in the semiconductor manufacturing operation. To provide.

[0016]

In order to achieve such an object, a belt electric type semiconductor manufacturing apparatus according to the present invention is provided in the case of an abnormal situation of tension of a belt during the execution of a semiconductor device manufacturing process. It is characterized in that it is provided with a display means and an alarm means for displaying this and giving an alarm.

According to another aspect of the present invention, there is provided an electric belt type semiconductor manufacturing apparatus in which a distance detecting means is provided in the vicinity of a driven pulley driven by a motor through the belt to detect the distance from the driven pulley or the belt. Depending on the analog (ana
log) electrical signal is generated. A control means is provided for controlling the display means and the alarm means by inputting a digital signal obtained by converting the electric signal by the A / D conversion means to determine whether or not the driving force transmitting action of the belt is abnormal.

According to the belt electric type semiconductor manufacturing apparatus of the present invention, when the display and warning means have an abnormality in the tension of the belt during the execution of the semiconductor device manufacturing process, it is displayed and an alarm is issued. Allows optimal treatment by the operator.

According to another aspect of the present invention, there is provided an electric belt type semiconductor manufacturing apparatus in which the distance detecting means generates an analog electric signal corresponding to the distance from the driven pulley or the belt, and the analog electric signal is generated. The signal is converted into a digital signal by an A / D converter and then input to the control means. Based on this signal, the control means determines whether or not there is an abnormality in the driving force transmission action of the belt, and displays the result of the determination on the display means and the alarm means and gives an alarm.

Next, an embodiment of an electric belt type semiconductor manufacturing apparatus of the present invention will be described. Prior to the specific description thereof, in order to facilitate understanding of various characteristic portions of the present invention. First, an outline of the features of the present invention will be described.

One of the features of the present invention is that when the belt is disengaged from the driven pulley during the execution of the manufacturing process of the semiconductor device and the belt is loosened, it spins,
A display unit and an alarm unit are provided to display and warn when power transmission to the load is interrupted.

Another feature of the present invention is that when the belt is disengaged from the driven pulley during the execution of the semiconductor device manufacturing process and the belt is loosened, the belt idles or the power transmission to the load is interrupted. In the case where the belt is worn, and when the belt is broken, a display unit and an alarm unit are provided to display and warn, respectively.

Another feature of the present invention is that when the belt is disengaged from the driven pulley during the execution of the semiconductor device manufacturing process and the belt is loosened, the belt idles or the power transmission to the load is intermittent. Display means and warning means, respectively, when the belt is broken, and when the rotation of the belt is stopped due to interruption of current supply to the motor or decrease in current value supplied to the motor. Equipped with.

Still another characteristic of the electric belt type semiconductor manufacturing apparatus according to the present invention is that it is installed close to a driven pulley of a load and generates an electric signal corresponding to the distance from the driven pulley or belt. Distance detection means, A / D conversion means for converting an analog output signal of the distance detection means into a digital signal, display means and alarm means, and presence / absence of abnormality in power transmission using the belt are determined. Control means for controlling the above-mentioned display means and alarm means.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a block diagram showing the configuration of a preferred embodiment of the present invention. In FIG. 1, the same components as those of the conventional apparatus are indicated by the same reference numerals as in FIG.

Referring to FIG. 1, an electric belt type semiconductor manufacturing apparatus according to the present invention has the same structure as the conventional apparatus.
Distance proximity sensor 40 (proximity) is installed close to the driven pulley 21 and serves as a capacitance type distance detecting means for generating an analog electric signal corresponding to the distance from the object.
sensor), a voltage amplifier 50 that amplifies the output voltage of the distance proximity sensor 40, and an A / D converter 60 that converts an analog output signal of the voltage amplifier 50 into a digital signal.
And a display unit 81 and an alarm unit, which are controlled by a myloprocessor 70 as a control unit that determines whether or not there is an abnormality in power transmission using a belt and performs control according to the abnormality, and displays and alarms the power transmission state. 82
And an ammeter 8 for measuring the current value supplied to the motor 10.
3 has a configuration in which 3 is added.

The operation principle of the embodiment of the present invention having such a configuration will be described in detail. Before describing the organic working relationship between the respective configurations of this embodiment, first, the operating principle of the capacitance type distance proximity sensor 40 will be described. The distance proximity sensor 40 in this embodiment acts as one electrode of the virtual capacitor, and the object acts as the other electrode of the virtual capacitor.

Therefore, the object and the distance proximity sensor 40
When the distance between them is changed, the capacitance of the virtual capacitor is changed. The capacitance-type short-range sensor 40 is a sensor that uses such a principle, and is usually several mm to several tens of mm.
It has a detection range of. This distance proximity sensor is mainly used as a control sensor for industrial robots and automation equipment, and is already well known in the technical field.

In the case where the belt 30 comes off from the driven pulleys 11 and 21 or the belt breaks during the execution of the steps in the electric belt type semiconductor manufacturing apparatus according to the embodiment, the driven pulley 21 is moved to a distance. It becomes the target of the proximity sensor 40, and the distance between the two electrodes of the virtual capacitor is increased more than in the normal state, so that the capacitance thereof is reduced. This lowers the output voltage level of the distance proximity sensor 40.

On the other hand, when the belt 30 is relaxed,
Since the distance between the distance proximity sensor 40 and the target object (that is, the two electrodes of the virtual capacitor) is smaller than the normal state, the capacitance of the virtual capacitor is increased. This raises the output voltage level of the distance proximity sensor 40.

The microprocessor 70 has predetermined reference data corresponding to the output voltage level of the distance proximity sensor 40 in a normal operating state in which power transmission from the motor 10 to the fan 20 is normally performed by the belt 30. There is.
The microprocessor 70 compares the output data of the distance / proximity sensor 40 provided from the A / D converter 60 with the reference data. At this time, if it is determined that the output data of the A / D converter 60 corresponding to the output voltage signal of the distance proximity sensor 40 falls within the range of the reference data, the microprocessor 70 determines that the power transmission by the belt 30 is not transmitted. If it is determined that the normal operation is performed and it is determined that the power is out of the range of the reference data, it is determined that the power transmission by the belt 30 is abnormal.

First, when it is determined that the power transmission by the belt 30 from the motor 10 to the fan 20 is normally performed, the microprocessor 70 controls the display unit 81 to display this. At this time, the display unit 81 may not operate in order to reduce current consumption.

Next, when it is determined that an abnormality has occurred in the power transmission by the belt 30, the microprocessor 70
Compares whether the value of the data from the A / D converter 60 is smaller than the minimum value of the reference data. At this time, A / D
If it is determined that the value of the data from the conversion unit 60 is smaller than the minimum value of the reference data, the microprocessor 70 determines that the belt 30 has been disengaged from the driven pulleys 11 and 21, or has been broken, and the display unit 81. Is displayed on the display unit 81, and the alarm unit 82 is controlled to sound an alarm.

On the other hand, if it is determined that the value of the data from the A / D converter 60 is not smaller than the minimum value of the reference data, the microprocessor 70 determines that the value of the A / D converter 60 is smaller than the minimum value of the reference data. It is determined that the value of the data is larger, and the display unit 81 is controlled to display the same on the display unit 81, and the alarm unit 82 is controlled to control the alarm unit 8 as well.
Make the alarm sound from 2.

As a result, the worker who is performing the process can easily understand the power transmission state from the motor 10 to the fan 20 by the belt 30. Further, the operator can use the ammeter 83 at any time to know whether the current supply to the motor 10 is normally performed.

According to a modification of this embodiment, the current value supplied to the motor 10 is detected and provided to the microprocessor 70, through which the microprocessor 70 is detected.
It is also possible to determine and display whether or not the current supply to the motor 10 is normally performed and to give an alarm.

As mentioned above, one preferable embodiment is given,
Although the present invention has been described in detail, the present invention is not limited to the above description and can be applied to any semiconductor manufacturing apparatus of the belt electric type.

[0038]

As described above, according to the belt electric type semiconductor manufacturing apparatus of the present invention, when the belt tension is abnormal during the execution of the manufacturing process of the semiconductor device, the display means and the alarm means display and warn. By doing so, the operator can quickly recognize when an abnormality occurs in the tension of the belt, and the most desirable measure can be taken as soon as possible. Therefore, it is possible to minimize the operational loss due to the abnormal power transmission of the belt.

According to another embodiment of the belt-electric-type semiconductor manufacturing apparatus of the present invention, the distance from the driven pulley or the belt is detected by the distance detecting means, and the detected signal is converted into a digital signal for control. By means of the means, whether the power transmission status of the belt is abnormal or not is determined and the display means and the alarm means are controlled according to the determination result, so that the operator can grasp the power transmission status of the belt more accurately. Therefore, it is possible to minimize the loss in the semiconductor manufacturing work due to the abnormal power transmission of the belt.

[Brief description of the drawings]

FIG. 1 is a block diagram showing the configuration of an embodiment of an electric belt type semiconductor manufacturing apparatus according to the present invention.

FIG. 2 is a perspective view showing a schematic configuration of a conventional belt-powered semiconductor manufacturing apparatus.

[Explanation of symbols]

 1 Space 2 Tube 10 Motor 11, 21 Driven Pulley 20 Fan 30 Belt 40 Distance Proximity Sensor 50 Voltage Amplifier 60 A / D Converter 70 Microprocessor 81 Display 82 Alarm Part 83 Ammeter

Claims (7)

[Claims] 1. In a belt-electric-type semiconductor manufacturing apparatus in which power is transmitted from a motor to a load by a belt, a display means and an alarm means for displaying and alarming an abnormal state of the tension of the belt during the execution of the manufacturing process. An electric belt type semiconductor manufacturing apparatus comprising: 2. The electric belt type semiconductor manufacturing apparatus according to claim 1, wherein the display means and the alarm means are operated when the belt is idle or the power transmission to the load is interrupted due to the loosening of the belt. An electric belt type semiconductor manufacturing apparatus characterized by displaying this and giving an alarm. 3. The belt electric type semiconductor manufacturing apparatus according to claim 2, wherein the display means and the alarm means display and warn when the belt is broken. Semiconductor manufacturing equipment. 4. The belt electric type semiconductor manufacturing apparatus according to claim 3, wherein the display means and the alarm means are provided for the motor due to interruption of current supply to the motor or decrease in current value supplied to the motor. When the rotation is stopped, an electric belt type semiconductor manufacturing device is displayed to warn the user. 5. A belt electric semiconductor manufacturing apparatus having a load driven by the power transmitted from a motor to a driven pulley through a belt, wherein the driven pulley or the driven pulley is installed in the vicinity of the driven pulley. A distance detecting means for generating an electric signal corresponding to a distance from the belt; an A / D converting means for converting an analog output signal of the distance detecting means into a digital signal; a displaying means and an alarming means; A belt electric type semiconductor manufacturing apparatus comprising: a control unit that determines whether or not there is an abnormality in power transmission used and controls the display unit and the alarm unit according to the abnormality. 6. The belt electric semiconductor manufacturing apparatus according to claim 5, wherein the motor is additionally provided with means for measuring a current value supplied to the motor. Manufacturing equipment. 7. The belt electric type semiconductor manufacturing apparatus according to claim 5, wherein the distance detecting means is a distance proximity sensor.