KR970051804A - Orifice status monitoring device of semiconductor manufacturing system - Google Patents

Abstract

Orifice (Orifice) relates to the orifice state monitoring device of the semiconductor manufacturing system to be able to know the operating state of the orifice according to the degree of load applied when discharging the debris in the process chamber. Orifice state monitoring apparatus of the semiconductor manufacturing system according to the present invention, the orifice (Orifice) is mounted to discharge the by-product generated in the process chamber during the process to the exhaust pipe by applying the driving force of the motor to the process chamber for manufacturing the semiconductor device In the semiconductor manufacturing equipment, characterized in that it comprises a monitoring means for monitoring by determining the load amount added to the orifice as the amount of current flowing in for the motor operation. According to the present invention, it is possible to accurately determine the situation of the orifice assembly motor that is operated to remove impurities, so that the process control is easy, and the operation abnormality is an alarm operation is performed, so that appropriate process can be minimized accordingly accordingly. There is.

Description

Orifice status monitoring device of semiconductor manufacturing system

Since this is an open matter, no full text was included.

2 is a view showing an embodiment of an orifice state monitoring apparatus of a semiconductor manufacturing system according to the present invention.

3 is a detailed block diagram of a monitor configured in an embodiment according to the present invention.

Claims (10)

In a semiconductor manufacturing apparatus equipped with an orifice to discharge by-products generated inside the process chamber during an operation to an exhaust pipe by applying a driving force of a motor to a process chamber for manufacturing a semiconductor device, the load added to the orifice is measured. Orifice state monitoring apparatus for a semiconductor manufacturing system, characterized in that it comprises a monitoring means for monitoring by determining the amount of current flowing in for the motor operation. According to claim 1, The monitoring means, Voltage conversion means for converting the current flowing from the motor into a DC voltage of a predetermined level; Current detecting means for detecting a current amplified by the DC voltage of the predetermined level; Comparing means for determining whether the detected current is out of a range of a preset motor load state and outputting a signal according thereto; And an alarm means for alarming when a signal determined by the comparison means that the load state of the motor is out of the range is outputted. The voltage conversion means of claim 2, wherein the voltage conversion means comprises: an AC voltage conversion means for converting a current flowing from the motor into an AC voltage; And a direct current voltage converting means for converting said alternating current voltage into direct current voltage. 3. The apparatus of claim 2, wherein the current detecting means comprises: amplifying means for amplifying a predetermined DC voltage output from the conversion converting means; And error detection means for inductively detecting a current for judging a load state by the voltage amplified by the amplifying means. 3. The apparatus according to claim 2, wherein the comparing means comprises: range setting means for setting the range for determining the under-load of the motor and outputting a determination signal according to above and below the range; Clock generation means for outputting a clock signal of a predetermined frequency; And comparison determination means for inputting the clock signal and the determination signal of the range setting means to output a comparison signal according to the above or below the range. The orifice monitoring apparatus according to claim 2, wherein the alarm means comprises a buzzer for outputting a buzzer sound when the signal output from the comparing means is a comparison determination signal outside the range. The orifice monitoring of the semiconductor manufacturing system according to claim 2, wherein the alarm means comprises light emitting means for performing a light emitting operation when the signal output from the comparing means is a comparison determination signal outside the range. Device. 8. The light emitting device of claim 7, wherein the light emitting unit comprises: an overload light emitting unit configured to emit light when the load state of the motor exceeds the range according to the comparison determination signal output from the comparing unit; And a low load light emitting unit that emits light when the load state of the motor is less than the range according to the comparison determination signal output from the comparing means. The orifice state monitoring apparatus of claim 2, further comprising channel switching means for channeling each state of a plurality of motors sequentially as a signal output from the comparing means. The orifice state monitoring apparatus according to claim 2, further comprising current value display means for displaying a current value different from the current load state of the motor as a signal thrusted from the comparison means. ※ Note: The disclosure is based on the initial application.