KR970051813A - - Google Patents
Info
- Publication number
- KR970051813A KR970051813A KR960061293A KR960061293A KR970051813A KR 970051813 A KR970051813 A KR 970051813A KR 960061293 A KR960061293 A KR 960061293A KR 960061293 A KR960061293 A KR 960061293A KR 970051813 A KR970051813 A KR 970051813A
- Authority
- KR
- South Korea
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34477395A JP3563851B2 (en) | 1995-12-05 | 1995-12-05 | Substrate transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970051813A true KR970051813A (en) | 1997-07-29 |
Family
ID=18371872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR960061293A KR970051813A (en) | 1995-12-05 | 1996-12-03 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3563851B2 (en) |
| KR (1) | KR970051813A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7416758B2 (en) | 2004-12-31 | 2008-08-26 | Lg Display Co., Ltd. | Slit coater |
| US7449069B2 (en) | 2004-12-28 | 2008-11-11 | Lg Display Co., Ltd. | Slit coater having apparatus for supplying a coating solution |
| US7647884B2 (en) | 2004-12-31 | 2010-01-19 | Lg. Display Co., Ltd. | Slit coater with a standby unit for a nozzle and a coating method using the same |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002153801A (en) * | 2000-11-17 | 2002-05-28 | Chugai Ro Co Ltd | Table type coating equipment |
| JP4004239B2 (en) * | 2001-04-02 | 2007-11-07 | 東京応化工業株式会社 | Substrate transfer device |
| TWI224576B (en) * | 2003-08-11 | 2004-12-01 | Chi Mei Optoelectronics Corp | Substrate transporting device for sequential cassette |
| JP4976922B2 (en) * | 2007-05-29 | 2012-07-18 | 株式会社オーク製作所 | Substrate transfer device |
-
1995
- 1995-12-05 JP JP34477395A patent/JP3563851B2/en not_active Expired - Fee Related
-
1996
- 1996-12-03 KR KR960061293A patent/KR970051813A/ko unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7449069B2 (en) | 2004-12-28 | 2008-11-11 | Lg Display Co., Ltd. | Slit coater having apparatus for supplying a coating solution |
| US7416758B2 (en) | 2004-12-31 | 2008-08-26 | Lg Display Co., Ltd. | Slit coater |
| US7647884B2 (en) | 2004-12-31 | 2010-01-19 | Lg. Display Co., Ltd. | Slit coater with a standby unit for a nozzle and a coating method using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3563851B2 (en) | 2004-09-08 |
| JPH09162264A (en) | 1997-06-20 |