KR970048918A - Halftone Phase Inversion Mask Manufacturing Method - Google Patents
Halftone Phase Inversion Mask Manufacturing Method Download PDFInfo
- Publication number
- KR970048918A KR970048918A KR1019950050921A KR19950050921A KR970048918A KR 970048918 A KR970048918 A KR 970048918A KR 1019950050921 A KR1019950050921 A KR 1019950050921A KR 19950050921 A KR19950050921 A KR 19950050921A KR 970048918 A KR970048918 A KR 970048918A
- Authority
- KR
- South Korea
- Prior art keywords
- halftone phase
- mask
- phase shift
- phase inversion
- light shielding
- Prior art date
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
본 발명은 하프톤 위상반전마스크 제조방법에 있어서, 투명 기판 상에 불투명막과 위상반전물질 및 차광막을 차례로 형성하고, 마스크 프레임의 바깥쪽에만 차광막이 형성되도록 패터닝하여 하프톤 위상반전마스크 원판을 형성하는 것을 특징으로 하는 위상반전마스크 제조방법에 관한 것으로, 하프톤 위상반전마스크제작시 마스크 프레임 테두리 바깥쪽에 불투명 링을 형성시키지 않기 때문에, 기존의 크롬 마스크와 같은 양의 데이타만 필요하게 되어 종래 보다 마스크 제작시간을 단축할 수 있다.In the method of manufacturing a halftone phase shift mask, an opaque film, a phase shift material, and a light shielding film are sequentially formed on a transparent substrate, and patterned so that a light shielding film is formed only on the outer side of the mask frame to form a halftone phase shift mask disc. The present invention relates to a method of manufacturing a phase inversion mask, which does not form an opaque ring on the outer edge of a mask frame when a halftone phase inversion mask is manufactured. Production time can be shortened.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제3도는 본 발명의 일실시예에 따른 하프톤 위상반전마스크 제조 공정도.Figure 3 is a halftone phase inversion mask manufacturing process according to an embodiment of the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950050921A KR970048918A (en) | 1995-12-16 | 1995-12-16 | Halftone Phase Inversion Mask Manufacturing Method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950050921A KR970048918A (en) | 1995-12-16 | 1995-12-16 | Halftone Phase Inversion Mask Manufacturing Method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970048918A true KR970048918A (en) | 1997-07-29 |
Family
ID=66595114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950050921A KR970048918A (en) | 1995-12-16 | 1995-12-16 | Halftone Phase Inversion Mask Manufacturing Method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970048918A (en) |
-
1995
- 1995-12-16 KR KR1019950050921A patent/KR970048918A/en not_active Application Discontinuation
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