KR970046850U - 스테이지 구동장치 - Google Patents

스테이지 구동장치

Info

Publication number
KR970046850U
KR970046850U KR2019950048426U KR19950048426U KR970046850U KR 970046850 U KR970046850 U KR 970046850U KR 2019950048426 U KR2019950048426 U KR 2019950048426U KR 19950048426 U KR19950048426 U KR 19950048426U KR 970046850 U KR970046850 U KR 970046850U
Authority
KR
South Korea
Prior art keywords
stage drive
stage
drive
Prior art date
Application number
KR2019950048426U
Other languages
English (en)
Other versions
KR0131754Y1 (ko
Inventor
남윤준
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950048426U priority Critical patent/KR0131754Y1/ko
Publication of KR970046850U publication Critical patent/KR970046850U/ko
Application granted granted Critical
Publication of KR0131754Y1 publication Critical patent/KR0131754Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Machine Tool Units (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019950048426U 1995-12-27 1995-12-27 스테이지 구동장치 KR0131754Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950048426U KR0131754Y1 (ko) 1995-12-27 1995-12-27 스테이지 구동장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950048426U KR0131754Y1 (ko) 1995-12-27 1995-12-27 스테이지 구동장치

Publications (2)

Publication Number Publication Date
KR970046850U true KR970046850U (ko) 1997-07-31
KR0131754Y1 KR0131754Y1 (ko) 1999-02-01

Family

ID=19439094

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950048426U KR0131754Y1 (ko) 1995-12-27 1995-12-27 스테이지 구동장치

Country Status (1)

Country Link
KR (1) KR0131754Y1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100982345B1 (ko) * 2008-05-14 2010-09-15 주식회사 쎄믹스 레이저 리페어 시스템을 위한 척 플레이트 이송장치
KR101403458B1 (ko) * 2012-11-13 2014-06-30 삼성디스플레이 주식회사 기판 이송 장치 및 기판 처리 장치

Also Published As

Publication number Publication date
KR0131754Y1 (ko) 1999-02-01

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Legal Events

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