KR970046756U - 반도체 열처리로의 반응장치 - Google Patents
반도체 열처리로의 반응장치Info
- Publication number
- KR970046756U KR970046756U KR2019950054459U KR19950054459U KR970046756U KR 970046756 U KR970046756 U KR 970046756U KR 2019950054459 U KR2019950054459 U KR 2019950054459U KR 19950054459 U KR19950054459 U KR 19950054459U KR 970046756 U KR970046756 U KR 970046756U
- Authority
- KR
- South Korea
- Prior art keywords
- reactor
- heat treatment
- treatment furnace
- semiconductor heat
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950054459U KR200169967Y1 (ko) | 1995-12-30 | 1995-12-30 | 반도체 열처리로의 반응장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950054459U KR200169967Y1 (ko) | 1995-12-30 | 1995-12-30 | 반도체 열처리로의 반응장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970046756U true KR970046756U (ko) | 1997-07-31 |
KR200169967Y1 KR200169967Y1 (ko) | 2000-02-01 |
Family
ID=19443067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950054459U KR200169967Y1 (ko) | 1995-12-30 | 1995-12-30 | 반도체 열처리로의 반응장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200169967Y1 (ko) |
-
1995
- 1995-12-30 KR KR2019950054459U patent/KR200169967Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200169967Y1 (ko) | 2000-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20021025 Year of fee payment: 4 |
|
LAPS | Lapse due to unpaid annual fee |