KR970046726U - Wafer backside etching device - Google Patents

Wafer backside etching device

Info

Publication number
KR970046726U
KR970046726U KR2019950048773U KR19950048773U KR970046726U KR 970046726 U KR970046726 U KR 970046726U KR 2019950048773 U KR2019950048773 U KR 2019950048773U KR 19950048773 U KR19950048773 U KR 19950048773U KR 970046726 U KR970046726 U KR 970046726U
Authority
KR
South Korea
Prior art keywords
etching device
wafer backside
backside etching
wafer
etching
Prior art date
Application number
KR2019950048773U
Other languages
Korean (ko)
Other versions
KR200144402Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950048773U priority Critical patent/KR200144402Y1/en
Publication of KR970046726U publication Critical patent/KR970046726U/en
Application granted granted Critical
Publication of KR200144402Y1 publication Critical patent/KR200144402Y1/en

Links

KR2019950048773U 1995-12-27 1995-12-27 Wafer backside etching device KR200144402Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950048773U KR200144402Y1 (en) 1995-12-27 1995-12-27 Wafer backside etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950048773U KR200144402Y1 (en) 1995-12-27 1995-12-27 Wafer backside etching device

Publications (2)

Publication Number Publication Date
KR970046726U true KR970046726U (en) 1997-07-31
KR200144402Y1 KR200144402Y1 (en) 1999-06-15

Family

ID=60878558

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950048773U KR200144402Y1 (en) 1995-12-27 1995-12-27 Wafer backside etching device

Country Status (1)

Country Link
KR (1) KR200144402Y1 (en)

Also Published As

Publication number Publication date
KR200144402Y1 (en) 1999-06-15

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Legal Events

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