KR970046726U - Wafer backside etching device - Google Patents
Wafer backside etching deviceInfo
- Publication number
- KR970046726U KR970046726U KR2019950048773U KR19950048773U KR970046726U KR 970046726 U KR970046726 U KR 970046726U KR 2019950048773 U KR2019950048773 U KR 2019950048773U KR 19950048773 U KR19950048773 U KR 19950048773U KR 970046726 U KR970046726 U KR 970046726U
- Authority
- KR
- South Korea
- Prior art keywords
- etching device
- wafer backside
- backside etching
- wafer
- etching
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950048773U KR200144402Y1 (en) | 1995-12-27 | 1995-12-27 | Wafer backside etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950048773U KR200144402Y1 (en) | 1995-12-27 | 1995-12-27 | Wafer backside etching device |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970046726U true KR970046726U (en) | 1997-07-31 |
KR200144402Y1 KR200144402Y1 (en) | 1999-06-15 |
Family
ID=60878558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950048773U KR200144402Y1 (en) | 1995-12-27 | 1995-12-27 | Wafer backside etching device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200144402Y1 (en) |
-
1995
- 1995-12-27 KR KR2019950048773U patent/KR200144402Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200144402Y1 (en) | 1999-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20021220 Year of fee payment: 5 |
|
LAPS | Lapse due to unpaid annual fee |