KR970046710U - 웨이퍼의 폴리싱장치 - Google Patents

웨이퍼의 폴리싱장치

Info

Publication number
KR970046710U
KR970046710U KR2019950038874U KR19950038874U KR970046710U KR 970046710 U KR970046710 U KR 970046710U KR 2019950038874 U KR2019950038874 U KR 2019950038874U KR 19950038874 U KR19950038874 U KR 19950038874U KR 970046710 U KR970046710 U KR 970046710U
Authority
KR
South Korea
Prior art keywords
polishing machine
wafer polishing
wafer
machine
polishing
Prior art date
Application number
KR2019950038874U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950038874U priority Critical patent/KR970046710U/ko
Publication of KR970046710U publication Critical patent/KR970046710U/ko

Links

KR2019950038874U 1995-12-07 1995-12-07 웨이퍼의 폴리싱장치 KR970046710U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950038874U KR970046710U (ko) 1995-12-07 1995-12-07 웨이퍼의 폴리싱장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950038874U KR970046710U (ko) 1995-12-07 1995-12-07 웨이퍼의 폴리싱장치

Publications (1)

Publication Number Publication Date
KR970046710U true KR970046710U (ko) 1997-07-31

Family

ID=60877586

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950038874U KR970046710U (ko) 1995-12-07 1995-12-07 웨이퍼의 폴리싱장치

Country Status (1)

Country Link
KR (1) KR970046710U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application