KR970046662U - Boat for semiconductor oxide film formation process - Google Patents

Boat for semiconductor oxide film formation process

Info

Publication number
KR970046662U
KR970046662U KR2019950045192U KR19950045192U KR970046662U KR 970046662 U KR970046662 U KR 970046662U KR 2019950045192 U KR2019950045192 U KR 2019950045192U KR 19950045192 U KR19950045192 U KR 19950045192U KR 970046662 U KR970046662 U KR 970046662U
Authority
KR
South Korea
Prior art keywords
boat
oxide film
film formation
formation process
semiconductor oxide
Prior art date
Application number
KR2019950045192U
Other languages
Korean (ko)
Other versions
KR0131996Y1 (en
Inventor
이상경
민병호
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019950045192U priority Critical patent/KR0131996Y1/en
Publication of KR970046662U publication Critical patent/KR970046662U/en
Application granted granted Critical
Publication of KR0131996Y1 publication Critical patent/KR0131996Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H01L21/67316—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950045192U 1995-12-21 1995-12-21 Fixing boat of forming semiconductor oxidation film KR0131996Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950045192U KR0131996Y1 (en) 1995-12-21 1995-12-21 Fixing boat of forming semiconductor oxidation film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950045192U KR0131996Y1 (en) 1995-12-21 1995-12-21 Fixing boat of forming semiconductor oxidation film

Publications (2)

Publication Number Publication Date
KR970046662U true KR970046662U (en) 1997-07-31
KR0131996Y1 KR0131996Y1 (en) 1999-02-01

Family

ID=19436742

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950045192U KR0131996Y1 (en) 1995-12-21 1995-12-21 Fixing boat of forming semiconductor oxidation film

Country Status (1)

Country Link
KR (1) KR0131996Y1 (en)

Also Published As

Publication number Publication date
KR0131996Y1 (en) 1999-02-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20060830

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee