KR970045875A - 정압 베어링 장치 - Google Patents

정압 베어링 장치 Download PDF

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Publication number
KR970045875A
KR970045875A KR1019960068277A KR19960068277A KR970045875A KR 970045875 A KR970045875 A KR 970045875A KR 1019960068277 A KR1019960068277 A KR 1019960068277A KR 19960068277 A KR19960068277 A KR 19960068277A KR 970045875 A KR970045875 A KR 970045875A
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KR
South Korea
Prior art keywords
oil
hydrostatic bearing
pressure
support mechanism
bearing device
Prior art date
Application number
KR1019960068277A
Other languages
English (en)
Other versions
KR100193685B1 (ko
Inventor
하야마 사다찌
오찌아이 아끼라
히야시 히데끼
혼다 다까마사
Original Assignee
오까노 사다오
도시바 기까이 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오까노 사다오, 도시바 기까이 가부시끼 가이샤 filed Critical 오까노 사다오
Publication of KR970045875A publication Critical patent/KR970045875A/ko
Application granted granted Critical
Publication of KR100193685B1 publication Critical patent/KR100193685B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0644—Details of devices to control the supply of liquids to the bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0651—Details of the bearing area per se
    • F16C32/0655—Details of the bearing area per se of supply openings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0651—Details of the bearing area per se
    • F16C32/0659—Details of the bearing area per se of pockets or grooves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C23/00—Bearings for exclusively rotary movement adjustable for aligning or positioning
    • F16C23/02—Sliding-contact bearings
    • F16C23/04—Sliding-contact bearings self-adjusting

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Support Of The Bearing (AREA)

Abstract

본 발명은 구형 지지기구에 의한 자기정렬 기능을 갖는 정압 베어링 장치에 관한 것이다.
본 발명에 따른 자기정렬 기능을 갖는 정압 베어링 장치(B)는 작동자세가 가변될 수 있도록 베어링 베이스(1)상의 구형 지지기구(21)에 의해 지지되는 정압베어링 패드(13)를 구비하며, 상기 구형 지지기구(21)는 내부에 상호 대향되는 반구형의 구면쌍(5, 17)을 구비하고, 그 사이에 압유통로(47)로부터 압유를 공급받도록 오일주입공간(43)이 형성되어 있다.
따라서, 구형 지지기구는, 복잡한 구성없이 자기정렬 기능을 가진 정압 베어링 장치 본래의 구조를 이용하여, 내부에 작용하는 하중을 감소시킬 수 있고 충분한 윤활을 가능하게 하는 효과가 있다.

Description

정압 베어링 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
도2는 도1의 정압 베어링 장치의 종단면도이다.

Claims (6)

  1. 정압포켓을 가진 정압베어링 패드가 베어링 베이스상의 구형 지지기구에 의해 그 작동자세가 가변가능하도록 지지되는 자기정렬 기능을 갖는 정압 베어링 장치에 있어서,
    상기 구형 지지기구내에 서로 대향되는 기본적으로 반구형인 구면쌍의 사이에 제공되는 오일주입공간; 및
    상기 오일주입공간에 압유를 공급하기 위한 압유통로;
    를 구비하여 이루어지는 것을 특징으로 하는 정압 베어링 장치.
  2. 제 1 항에 있어서,
    상기 오일주입공간은 상기 구면쌍 중 어느 하나에 형성되며, 그 중심축에 동심적인 적어도 하나의 원주홈에 의해 한정되는 것을 특징으로 하는 상기 정압 베어링 장치.
  3. 제 1 항 또는 제 2 항에 있어서,
    상기 압유통로는 상기 정압베어링 패드의 정압포켓으로 압유를 공급하기 위한 정압포켓용 압유공급통로와 연통됨으로써, 상기 정압포켓용 압유가 공급되도록 한 것을 특징으로 하는 상기 정압 베어링 장치.
  4. 제 1 항 내지 제 3 항중 어느 한 항에 있어서,
    상기 구형 지지기구의 구면중심이 상기 정압베어링 패드의 회전중심과 일치하도록 형성되는 것을 특징으로 하는 상기 정압 베어링 장치.
  5. 제 1 항 내지 제 4 항중 어느 한 항에 있어서,
    상기 정압베어링 패드에는, 상기 구형 지지기구의 단부에서 윤활유로서 사용하기 위해 상기 정압포켓으로부터 오버플로우된 오일을 유도하는 오일홈이 형성된 것을 특징으로 하는 상기 정압 베어링 장치.
  6. 제 1 항 내지 제 5 항중 어느 한 항에 있어서,
    상기 정압 베어링 장치는 상기 압유통로에 공급되는 압유의 일시적인 증가를 조절할 수 있는 유압콘트롤러를 구비하는 것을 특징으로 하는 상기 정압 베어링 장치.
KR1019960068277A 1995-12-20 1996-12-19 정압 베어링 장치 KR100193685B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP33233495A JP3361677B2 (ja) 1995-12-20 1995-12-20 静圧軸受装置
JPP07-332334 1995-12-20

Publications (2)

Publication Number Publication Date
KR970045875A true KR970045875A (ko) 1997-07-26
KR100193685B1 KR100193685B1 (ko) 1999-06-15

Family

ID=18253807

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960068277A KR100193685B1 (ko) 1995-12-20 1996-12-19 정압 베어링 장치

Country Status (3)

Country Link
JP (1) JP3361677B2 (ko)
KR (1) KR100193685B1 (ko)
CN (1) CN1160518C (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100495877B1 (ko) * 2001-05-25 2005-06-16 캐논 가부시끼가이샤 정압베어링장치 및 그것을 이용한 스테이지장치

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT413049B (de) * 2002-07-31 2005-10-15 Philipp Dipl Ing Dr Te Gittler Dichtung zwischen zwei relativ zueinander bewegbaren teilen einer hydraulischen maschine
DE102004023771A1 (de) * 2004-05-11 2005-12-01 Voith Paper Patent Gmbh Lagerelement und hydrostatisches Lager
JP5158549B2 (ja) * 2009-02-18 2013-03-06 鈴木 律子 タワミ防止用軸受を備えたロール加圧装置
CN102094899A (zh) * 2011-02-14 2011-06-15 李记东 一种可低、中、高速旋转空气轴承
CN103899645B (zh) * 2014-03-12 2016-11-23 哈尔滨工程大学 阶梯式复合节流静压气体球面轴承
CN104295605A (zh) * 2014-09-23 2015-01-21 哈尔滨工程大学 环带复合节流静压气体球面轴承

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100495877B1 (ko) * 2001-05-25 2005-06-16 캐논 가부시끼가이샤 정압베어링장치 및 그것을 이용한 스테이지장치
US7232257B2 (en) 2001-05-25 2007-06-19 Canon Kabushiki Kaisha Hydrostatic bearing and stage apparatus using same

Also Published As

Publication number Publication date
JPH09177784A (ja) 1997-07-11
CN1160518C (zh) 2004-08-04
CN1159521A (zh) 1997-09-17
KR100193685B1 (ko) 1999-06-15
JP3361677B2 (ja) 2003-01-07

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