KR970023642A - Manufacturing method of optical path control device - Google Patents

Manufacturing method of optical path control device Download PDF

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Publication number
KR970023642A
KR970023642A KR1019950038534A KR19950038534A KR970023642A KR 970023642 A KR970023642 A KR 970023642A KR 1019950038534 A KR1019950038534 A KR 1019950038534A KR 19950038534 A KR19950038534 A KR 19950038534A KR 970023642 A KR970023642 A KR 970023642A
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KR
South Korea
Prior art keywords
optical path
path control
manufacturing
control device
signal
Prior art date
Application number
KR1019950038534A
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Korean (ko)
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KR100197377B1 (en
Inventor
전용배
Original Assignee
배순훈
대우전자 주식회사
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Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to KR1019950038534A priority Critical patent/KR100197377B1/en
Publication of KR970023642A publication Critical patent/KR970023642A/en
Application granted granted Critical
Publication of KR100197377B1 publication Critical patent/KR100197377B1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

본 발명은 광로 조절 장치의 제조 방법에 관한 것으로, 복수개의 신호 패드가 형성된 실리콘 웨이퍼상에 형성된 구동 기판상에 소정 형상의 희생층을 형성시키고 다수의 절연층 및 도전층을 교번적으로 적층시키는 단계와, 식각 공정에 의하여 상기 다수의 절연층 및 도전층을 패터닝시켜서 액츄에이터를 형성시키는 단계와, 상기 희생층을 제거하는 단계로 이루어지고 상기 식각 공정에 의하여 신호 패드용 개방부는 소정 형상으로 패터닝시킴으로서 상기 신호 패드용The present invention relates to a method for manufacturing an optical path control apparatus, comprising: forming a sacrificial layer having a predetermined shape on a driving substrate formed on a silicon wafer on which a plurality of signal pads are formed, and alternately stacking a plurality of insulating and conductive layers. And forming an actuator by patterning the plurality of insulating layers and the conductive layers by an etching process, and removing the sacrificial layer. The opening for the signal pad is patterned into a predetermined shape by the etching process. For signal pad

Description

광로조절 장치의 제조방법Manufacturing method of optical path control device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도(가) 내지 (마)는 본 발명에 따른 광로 조절 장치의 제조 방법을 순차적으로 도시한 단면도.3 (a) to (e) are cross-sectional views sequentially showing a manufacturing method of the optical path control apparatus according to the present invention.

Claims (4)

복수개의 신호 패드(20)가 형성된 실리콘 웨이퍼(10)상에 광로 조절 장치를 제조하기 위한 방법에 있어서, 상기 신호 패드(20)와 전기적으로 연결된 트랜지스터 패드(320)가 복수개 형성된 구동 기판(310)상에 소정 형상의 희생층(330)을 형성시키고 다수의 절연층(342, 344) 및 도전층(343, 345)을 교번적으로 적층시키는 단계와, 식각 공정에 의하여 상기 다수의 절연층(342, 344) 및 도전층(343, 345)을 패터닝시켜서 액츄에이터(340)를 형성시키는 단계와, 상기 희생층(330)을 제거하는 단계로 이루어지고,상기 신호 패드를 노출시키기 위한 신호 패드용 개방부(a′)는 소정 형상으로 패터닝되는 것을 특징으로 하는 광로 조절 장치의 제조 방법.In the method for manufacturing an optical path control device on a silicon wafer 10 having a plurality of signal pads 20, the driving substrate 310 having a plurality of transistor pads 320 electrically connected to the signal pads 20. Forming a sacrificial layer 330 having a predetermined shape on the substrate, and alternately stacking the plurality of insulating layers 342 and 344 and the conductive layers 343 and 345, and etching the plurality of insulating layers 342 by an etching process. And patterning the conductive layers 343 and 345 to form the actuator 340, and removing the sacrificial layer 330, and openings for signal pads to expose the signal pads. (a ') is a method of manufacturing an optical path control device, characterized in that patterned to a predetermined shape. 제1항에 있어서, 상기 신호 패드용 개방부(a′)는 소정 패턴의 선폭을 갖는 멤브레인(342)의 일부, 스톱층(332)의 일부 및 보호층(331)의 일부가 잔존하는 것을 특징으로 하는 광로 조절 장치의 제조 방법.The method of claim 1, wherein the signal pad opening portion a 'includes a portion of the membrane 342, a portion of the stop layer 332, and a portion of the protective layer 331 having a predetermined line width. The manufacturing method of the optical path control apparatus. 제2항에 있어서, 상기 신호 패드용 개방부(a′)에 잔존하는 상기 신호 패드(20)의 일부는 상기 패턴을 통하여 부분 노출되는 것을 특징으로 하는 광로 조절 장치의 제조 방법.The method of claim 2, wherein a part of the signal pad (20) remaining in the opening (a ') for the signal pad is partially exposed through the pattern. 제3항에 있어서, 상기 신호 패드용 개방부(a′)에 잔존하는 멤브레인(342)의 일부, 스톱층(332)의 일부 및 보호층(331)의 일부는 산화층(311)의 일부를 화학적 손상으로부터 보호하는 것을 특징으로 하는 광로 조절 장치의 제조 방법.4. A portion of the membrane 342, a portion of the stop layer 332, and a portion of the protective layer 331 which remain in the opening for a signal pad a 'are partially chemically oxidized. A method for producing an optical path control device, characterized in that it is protected from damage. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950038534A 1995-10-31 1995-10-31 Method for fabricating an optical projection system KR100197377B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950038534A KR100197377B1 (en) 1995-10-31 1995-10-31 Method for fabricating an optical projection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950038534A KR100197377B1 (en) 1995-10-31 1995-10-31 Method for fabricating an optical projection system

Publications (2)

Publication Number Publication Date
KR970023642A true KR970023642A (en) 1997-05-30
KR100197377B1 KR100197377B1 (en) 1999-06-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950038534A KR100197377B1 (en) 1995-10-31 1995-10-31 Method for fabricating an optical projection system

Country Status (1)

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KR (1) KR100197377B1 (en)

Also Published As

Publication number Publication date
KR100197377B1 (en) 1999-06-15

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