KR970022559A - Projection exposure apparatus - Google Patents

Projection exposure apparatus Download PDF

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Publication number
KR970022559A
KR970022559A KR1019950034920A KR19950034920A KR970022559A KR 970022559 A KR970022559 A KR 970022559A KR 1019950034920 A KR1019950034920 A KR 1019950034920A KR 19950034920 A KR19950034920 A KR 19950034920A KR 970022559 A KR970022559 A KR 970022559A
Authority
KR
South Korea
Prior art keywords
lens
exposure apparatus
projection exposure
projection
afocal
Prior art date
Application number
KR1019950034920A
Other languages
Korean (ko)
Inventor
계종욱
임성출
문성용
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950034920A priority Critical patent/KR970022559A/en
Publication of KR970022559A publication Critical patent/KR970022559A/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

어포컬(afocal) 렌즈를 이용하여 해상도를 개선할 수 있는 투영 노광장치에 관하여 개시한다. 본 발명은 광원, 파리눈 렌즈, 어퍼쳐, 콘덴서 렌즈 및 투영 렌지를 가진 투영 노광장치에 있어서, 상기 투영 노광장치는 가간섭도를 줄일 수 있는 어포컬 렌즈가 구비된 것을 특징으로 하는 투영 노광장치에 제공한다. 상기 어포컬 렌즈는 상기 어퍼쳐와 콘덴서 렌즈 사이에 설치하거나 상기 콘덴서 렌즈와 투영렌즈 사이에 설치 할 수 있다. 본 발명의 투영 노광장치는 어포컬렌즈로 빛을 집광하여 광강도를 그대로 유지하면서 σ를 작게할 수 있다.A projection exposure apparatus capable of improving the resolution by using an afocal lens is disclosed. The present invention provides a projection exposure apparatus having a light source, a fly's eye lens, an aperture, a condenser lens, and a projection lens, wherein the projection exposure apparatus includes an afocal lens capable of reducing coherence. To provide. The afocal lens may be installed between the aperture and the condenser lens or between the condenser lens and the projection lens. The projection exposure apparatus of the present invention can reduce the sigma by condensing light with an afocal lens while maintaining the light intensity as it is.

Description

투영 노광장치Projection exposure apparatus

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 의한 투영 노광장치를 도시한 개략도이다.2 is a schematic view showing a projection exposure apparatus according to the present invention.

Claims (2)

광원, 파리눈 렌즈, 어퍼쳐, 콘덴서 렌즈 및 투영 렌즈를 가진 투영 노광장치에 있어서, 상기 투영 노광장치는 가간섭도를 줄일 수 있는 어포컬 렌즈가 구비된 것을 특징으로 하는 투영 노광장치.A projection exposure apparatus having a light source, a fly's eye lens, an aperture, a condenser lens, and a projection lens, wherein the projection exposure apparatus comprises an afocal lens capable of reducing coherence. 제1항에 있어서, 상기 어포컬렌즈는 상기 어퍼쳐와 콘덴서 렌즈 사이에 설치하거나 상기 콘덴서 렌즈와 투영렌즈 사이에 설치하는 것을 특징으로 하는 투영 노광장치.The projection exposure apparatus according to claim 1, wherein the afocal lens is provided between the aperture and the condenser lens or between the condenser lens and the projection lens. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950034920A 1995-10-11 1995-10-11 Projection exposure apparatus KR970022559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950034920A KR970022559A (en) 1995-10-11 1995-10-11 Projection exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950034920A KR970022559A (en) 1995-10-11 1995-10-11 Projection exposure apparatus

Publications (1)

Publication Number Publication Date
KR970022559A true KR970022559A (en) 1997-05-30

Family

ID=66583642

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950034920A KR970022559A (en) 1995-10-11 1995-10-11 Projection exposure apparatus

Country Status (1)

Country Link
KR (1) KR970022559A (en)

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