KR970022559A - Projection exposure apparatus - Google Patents
Projection exposure apparatus Download PDFInfo
- Publication number
- KR970022559A KR970022559A KR1019950034920A KR19950034920A KR970022559A KR 970022559 A KR970022559 A KR 970022559A KR 1019950034920 A KR1019950034920 A KR 1019950034920A KR 19950034920 A KR19950034920 A KR 19950034920A KR 970022559 A KR970022559 A KR 970022559A
- Authority
- KR
- South Korea
- Prior art keywords
- lens
- exposure apparatus
- projection exposure
- projection
- afocal
- Prior art date
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
어포컬(afocal) 렌즈를 이용하여 해상도를 개선할 수 있는 투영 노광장치에 관하여 개시한다. 본 발명은 광원, 파리눈 렌즈, 어퍼쳐, 콘덴서 렌즈 및 투영 렌지를 가진 투영 노광장치에 있어서, 상기 투영 노광장치는 가간섭도를 줄일 수 있는 어포컬 렌즈가 구비된 것을 특징으로 하는 투영 노광장치에 제공한다. 상기 어포컬 렌즈는 상기 어퍼쳐와 콘덴서 렌즈 사이에 설치하거나 상기 콘덴서 렌즈와 투영렌즈 사이에 설치 할 수 있다. 본 발명의 투영 노광장치는 어포컬렌즈로 빛을 집광하여 광강도를 그대로 유지하면서 σ를 작게할 수 있다.A projection exposure apparatus capable of improving the resolution by using an afocal lens is disclosed. The present invention provides a projection exposure apparatus having a light source, a fly's eye lens, an aperture, a condenser lens, and a projection lens, wherein the projection exposure apparatus includes an afocal lens capable of reducing coherence. To provide. The afocal lens may be installed between the aperture and the condenser lens or between the condenser lens and the projection lens. The projection exposure apparatus of the present invention can reduce the sigma by condensing light with an afocal lens while maintaining the light intensity as it is.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 의한 투영 노광장치를 도시한 개략도이다.2 is a schematic view showing a projection exposure apparatus according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950034920A KR970022559A (en) | 1995-10-11 | 1995-10-11 | Projection exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950034920A KR970022559A (en) | 1995-10-11 | 1995-10-11 | Projection exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970022559A true KR970022559A (en) | 1997-05-30 |
Family
ID=66583642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950034920A KR970022559A (en) | 1995-10-11 | 1995-10-11 | Projection exposure apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970022559A (en) |
-
1995
- 1995-10-11 KR KR1019950034920A patent/KR970022559A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |