KR970049067A - Deformation lighting device - Google Patents
Deformation lighting device Download PDFInfo
- Publication number
- KR970049067A KR970049067A KR1019950067043A KR19950067043A KR970049067A KR 970049067 A KR970049067 A KR 970049067A KR 1019950067043 A KR1019950067043 A KR 1019950067043A KR 19950067043 A KR19950067043 A KR 19950067043A KR 970049067 A KR970049067 A KR 970049067A
- Authority
- KR
- South Korea
- Prior art keywords
- light
- reticle
- incident
- condenser lens
- lighting device
- Prior art date
Links
Abstract
간단한 구조 개선을 통하여 조명 광원의 빛의 세기를 감소시키지 않으면서 노광되는 빛의 간섭성을 향상시킬수 있는 변형 조명 장치가 개시되어 있다. 본 발명은 파리 눈 렌즈(Fly's eye Lens); 빛을 모으는 콘덴서 렌즈(Condenser Lens); 레티클(Rdticle); 및 빛의 세기를 저하시키는 어퍼쳐의 사용없이 상기 레티클에 사입사성분의 빛을 입사시킬 수 있도록 상기 콘덴서 렌즈와 레티클과의 사이에 서로 대향설치된 한 쌍의 거울(Morror)을 구비한다.Disclosed is a modified illumination device capable of improving the coherence of exposed light without reducing the intensity of light of the illumination light source through a simple structure improvement. The present invention provides a fly's eye lens; A condenser lens for collecting light; Reticle; And a pair of mirrors disposed opposite to each other between the condenser lens and the reticle so that light of an incidence component can be incident on the reticle without using an aperture that reduces the light intensity.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 의한 변형 조명 장치를 개략적으로 보여주는 도면이다.2 is a view schematically showing a modified lighting apparatus according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950067043A KR970049067A (en) | 1995-12-29 | 1995-12-29 | Deformation lighting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950067043A KR970049067A (en) | 1995-12-29 | 1995-12-29 | Deformation lighting device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970049067A true KR970049067A (en) | 1997-07-29 |
Family
ID=66638204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950067043A KR970049067A (en) | 1995-12-29 | 1995-12-29 | Deformation lighting device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970049067A (en) |
-
1995
- 1995-12-29 KR KR1019950067043A patent/KR970049067A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |