KR970049067A - Deformation lighting device - Google Patents

Deformation lighting device Download PDF

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Publication number
KR970049067A
KR970049067A KR1019950067043A KR19950067043A KR970049067A KR 970049067 A KR970049067 A KR 970049067A KR 1019950067043 A KR1019950067043 A KR 1019950067043A KR 19950067043 A KR19950067043 A KR 19950067043A KR 970049067 A KR970049067 A KR 970049067A
Authority
KR
South Korea
Prior art keywords
light
reticle
incident
condenser lens
lighting device
Prior art date
Application number
KR1019950067043A
Other languages
Korean (ko)
Inventor
최용석
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950067043A priority Critical patent/KR970049067A/en
Publication of KR970049067A publication Critical patent/KR970049067A/en

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Abstract

간단한 구조 개선을 통하여 조명 광원의 빛의 세기를 감소시키지 않으면서 노광되는 빛의 간섭성을 향상시킬수 있는 변형 조명 장치가 개시되어 있다. 본 발명은 파리 눈 렌즈(Fly's eye Lens); 빛을 모으는 콘덴서 렌즈(Condenser Lens); 레티클(Rdticle); 및 빛의 세기를 저하시키는 어퍼쳐의 사용없이 상기 레티클에 사입사성분의 빛을 입사시킬 수 있도록 상기 콘덴서 렌즈와 레티클과의 사이에 서로 대향설치된 한 쌍의 거울(Morror)을 구비한다.Disclosed is a modified illumination device capable of improving the coherence of exposed light without reducing the intensity of light of the illumination light source through a simple structure improvement. The present invention provides a fly's eye lens; A condenser lens for collecting light; Reticle; And a pair of mirrors disposed opposite to each other between the condenser lens and the reticle so that light of an incidence component can be incident on the reticle without using an aperture that reduces the light intensity.

Description

변형 조명 장치Deformation lighting device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 의한 변형 조명 장치를 개략적으로 보여주는 도면이다.2 is a view schematically showing a modified lighting apparatus according to the present invention.

Claims (2)

파리 눈 렌즈(Fly's eye Lens); 빛을 모으는 콘덴서 렌즈(Condenser Lens); 레티클(Rdticle); 및 빛의 세기를 저하시키는 어퍼쳐의 사용없이 상기 레티클에 사입사 성분의 빛을 입사시킬 수 있도록 상기 콘덴서 렌즈와 레티클과의 사이에 서로 마주보는 한 쌍의 거울(Morror)을 설치한 것을 특징으로 하는 사입사 조명 장치.Fly's eye Lens; A condenser lens for collecting light; Reticle; And a pair of mirrors facing each other between the condenser lens and the reticle so that light of an incidence component can be incident on the reticle without using an aperture that reduces the light intensity. Inclusion lighting device. 제1항에 있어서, 상기 한 쌍의 거울을 수평 이동시키거나 거울들의 기울기를 변화시켜 상기 레티클(Rdticle) 상에 입사되는 빛의 입사각을 조절하는 것을 특징으로 하는 사입사 조명 장치.The incident illumination device of claim 1, wherein the incident angle of light incident on the reticle is adjusted by horizontally moving the pair of mirrors or changing the inclination of the mirrors. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950067043A 1995-12-29 1995-12-29 Deformation lighting device KR970049067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950067043A KR970049067A (en) 1995-12-29 1995-12-29 Deformation lighting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950067043A KR970049067A (en) 1995-12-29 1995-12-29 Deformation lighting device

Publications (1)

Publication Number Publication Date
KR970049067A true KR970049067A (en) 1997-07-29

Family

ID=66638204

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950067043A KR970049067A (en) 1995-12-29 1995-12-29 Deformation lighting device

Country Status (1)

Country Link
KR (1) KR970049067A (en)

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