KR970022342A - Test device of semiconductor device - Google Patents
Test device of semiconductor device Download PDFInfo
- Publication number
- KR970022342A KR970022342A KR1019950034951A KR19950034951A KR970022342A KR 970022342 A KR970022342 A KR 970022342A KR 1019950034951 A KR1019950034951 A KR 1019950034951A KR 19950034951 A KR19950034951 A KR 19950034951A KR 970022342 A KR970022342 A KR 970022342A
- Authority
- KR
- South Korea
- Prior art keywords
- measuring
- semiconductor device
- terminals
- wafer
- connection state
- Prior art date
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Abstract
측정장비와 웨이퍼 프로버간의 연결상태를 정확히 검진함으로써 웨이퍼 소자 특성 측정의 정확성을 기할 수 있는 반도체 장치의 테스트 장치를 개시한다.Disclosed is a test apparatus for a semiconductor device capable of accurately measuring wafer device characteristics by accurately detecting a connection state between a measuring device and a wafer prober.
반도체 장치의 전기적 특성검사 장치에 있어서, 측정장비와 웨이퍼 프로버 사이의 단자간 끊김(OPEN) 또는 단락(SHORT)를 측정하는 것을 특징으로 하는 반도체 장치의 테스트 장치를 제공한다.An apparatus for inspecting electrical characteristics of a semiconductor device, the present invention provides a test apparatus for a semiconductor device, characterized in that for measuring the terminal disconnection (OPEN) or short circuit (SHORT) between the measuring equipment and the wafer prober.
상기 테스터 장치는 각각의 측정단자 사이에 저항기를 사용하여 연결한다.The tester device is connected using a resistor between each measuring terminal.
본 발명의 바람직한 실시예는 상기 각각의 측정 단자에 일정 전압을 인가하여 전류와 저항값을 읽음으로써 상기 각 저항기의 고유의 저항값과 측정된 저항값을 비교하여 단자간의 연결상태를 검진한다.According to a preferred embodiment of the present invention, a constant voltage is applied to each of the measurement terminals to read a current and a resistance value, thereby comparing the inherent resistance values of the respective resistors with the measured resistance values to check the connection state between the terminals.
따라서, 본 발명에 의하면 측정장비와 웨이퍼 프로버간의 연결상태를 정확히 검진함으로써 웨이퍼 소자 특성 측정의 정확성을 기하고 단자간 끊김과 단락(open/short)를 사전에 검증함으로써 측정결과에 신뢰성을 높일 수 있다.Therefore, according to the present invention, it is possible to improve the reliability of the measurement results by accurately checking the connection state between the measuring equipment and the wafer prober, and verifying the accuracy of the wafer device characteristics and verifying the disconnection and short-circuit between terminals in advance. have.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명에 의해 각 단자 사이에 일정한 저항값을 가진 저항기를 연결한 모습을 나타낸 테스터 장치의 개념도이다,1 is a conceptual diagram of a tester device showing the connection of a resistor having a constant resistance value between each terminal according to the present invention,
제2도는 본 발명에 의해 각 단자 사이에 일정한 저항값을 가진 저항기를 연결하고 웨이퍼 프로브와 연결할 수 있는 커넥터가 달린 보드를 구비한 테스터 장치의 평면도이다.2 is a plan view of a tester device having a board with a connector capable of connecting a resistor with a constant resistance value between each terminal and a wafer probe in accordance with the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950034951A KR970022342A (en) | 1995-10-11 | 1995-10-11 | Test device of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950034951A KR970022342A (en) | 1995-10-11 | 1995-10-11 | Test device of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970022342A true KR970022342A (en) | 1997-05-28 |
Family
ID=66583669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950034951A KR970022342A (en) | 1995-10-11 | 1995-10-11 | Test device of semiconductor device |
Country Status (1)
Country | Link |
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KR (1) | KR970022342A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100322620B1 (en) * | 1999-08-16 | 2002-03-18 | 황인길 | Cassette carrier moving device of standard mechanical interface |
KR100739883B1 (en) * | 2006-11-07 | 2007-07-16 | (주)피엘텍 | Apparatus and method for testing probe card signal channel |
KR20210049257A (en) * | 2019-10-25 | 2021-05-06 | 마이크로 인스펙션 주식회사 | Inspection apparatus of printed circuit board and control method thereof |
-
1995
- 1995-10-11 KR KR1019950034951A patent/KR970022342A/en not_active Application Discontinuation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100322620B1 (en) * | 1999-08-16 | 2002-03-18 | 황인길 | Cassette carrier moving device of standard mechanical interface |
KR100739883B1 (en) * | 2006-11-07 | 2007-07-16 | (주)피엘텍 | Apparatus and method for testing probe card signal channel |
KR20210049257A (en) * | 2019-10-25 | 2021-05-06 | 마이크로 인스펙션 주식회사 | Inspection apparatus of printed circuit board and control method thereof |
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |