KR970022342A - Test device of semiconductor device - Google Patents

Test device of semiconductor device Download PDF

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Publication number
KR970022342A
KR970022342A KR1019950034951A KR19950034951A KR970022342A KR 970022342 A KR970022342 A KR 970022342A KR 1019950034951 A KR1019950034951 A KR 1019950034951A KR 19950034951 A KR19950034951 A KR 19950034951A KR 970022342 A KR970022342 A KR 970022342A
Authority
KR
South Korea
Prior art keywords
measuring
semiconductor device
terminals
wafer
connection state
Prior art date
Application number
KR1019950034951A
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Korean (ko)
Inventor
백승용
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950034951A priority Critical patent/KR970022342A/en
Publication of KR970022342A publication Critical patent/KR970022342A/en

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Abstract

측정장비와 웨이퍼 프로버간의 연결상태를 정확히 검진함으로써 웨이퍼 소자 특성 측정의 정확성을 기할 수 있는 반도체 장치의 테스트 장치를 개시한다.Disclosed is a test apparatus for a semiconductor device capable of accurately measuring wafer device characteristics by accurately detecting a connection state between a measuring device and a wafer prober.

반도체 장치의 전기적 특성검사 장치에 있어서, 측정장비와 웨이퍼 프로버 사이의 단자간 끊김(OPEN) 또는 단락(SHORT)를 측정하는 것을 특징으로 하는 반도체 장치의 테스트 장치를 제공한다.An apparatus for inspecting electrical characteristics of a semiconductor device, the present invention provides a test apparatus for a semiconductor device, characterized in that for measuring the terminal disconnection (OPEN) or short circuit (SHORT) between the measuring equipment and the wafer prober.

상기 테스터 장치는 각각의 측정단자 사이에 저항기를 사용하여 연결한다.The tester device is connected using a resistor between each measuring terminal.

본 발명의 바람직한 실시예는 상기 각각의 측정 단자에 일정 전압을 인가하여 전류와 저항값을 읽음으로써 상기 각 저항기의 고유의 저항값과 측정된 저항값을 비교하여 단자간의 연결상태를 검진한다.According to a preferred embodiment of the present invention, a constant voltage is applied to each of the measurement terminals to read a current and a resistance value, thereby comparing the inherent resistance values of the respective resistors with the measured resistance values to check the connection state between the terminals.

따라서, 본 발명에 의하면 측정장비와 웨이퍼 프로버간의 연결상태를 정확히 검진함으로써 웨이퍼 소자 특성 측정의 정확성을 기하고 단자간 끊김과 단락(open/short)를 사전에 검증함으로써 측정결과에 신뢰성을 높일 수 있다.Therefore, according to the present invention, it is possible to improve the reliability of the measurement results by accurately checking the connection state between the measuring equipment and the wafer prober, and verifying the accuracy of the wafer device characteristics and verifying the disconnection and short-circuit between terminals in advance. have.

Description

반도체 장치의 테스트 장치Test device of semiconductor device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명에 의해 각 단자 사이에 일정한 저항값을 가진 저항기를 연결한 모습을 나타낸 테스터 장치의 개념도이다,1 is a conceptual diagram of a tester device showing the connection of a resistor having a constant resistance value between each terminal according to the present invention,

제2도는 본 발명에 의해 각 단자 사이에 일정한 저항값을 가진 저항기를 연결하고 웨이퍼 프로브와 연결할 수 있는 커넥터가 달린 보드를 구비한 테스터 장치의 평면도이다.2 is a plan view of a tester device having a board with a connector capable of connecting a resistor with a constant resistance value between each terminal and a wafer probe in accordance with the present invention.

Claims (3)

반도체 장치의 진기적 특성검사 장치에 있어서, 측정장비와 웨이퍼 프로버 사이의 단자간 끊김(OPEN) 또는 단락(SHORT)를 측정하는 것을 특징으로 하는 반도체 장치의 테스트 장치.An apparatus for testing quasi-characteristics of semiconductor devices, the apparatus for testing semiconductor devices characterized in that it measures an open terminal or a short circuit between the measuring equipment and the wafer prober. 제1항에 있어서. 상기 테스터 장치는 각각의 측정단자 사이에 저항기를 사용하여 연결한 것을 특징으로 하는 반도체 장치의 테스트 장치.The method of claim 1. The tester device is a test device for a semiconductor device, characterized in that the connection between each measuring terminal using a resistor. 제2항에 있어서, 상기 각각의 측정 단자에 일겅 전압을 인가하여 전류와 저항값을 읽음으로써 상기 각 저항기의 고유의 저항값과 측정원 저항값을 비교하여 단자간의 연결상태를 검진하는 것을 특징으로 하는 반도체 장치의 테스트 장치.The method according to claim 2, wherein the connection between the terminals is checked by comparing the intrinsic resistance value of each resistor and the measurement source resistance value by reading a current and a resistance value by applying a voltage to each measurement terminal. A test device for semiconductor devices. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950034951A 1995-10-11 1995-10-11 Test device of semiconductor device KR970022342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950034951A KR970022342A (en) 1995-10-11 1995-10-11 Test device of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950034951A KR970022342A (en) 1995-10-11 1995-10-11 Test device of semiconductor device

Publications (1)

Publication Number Publication Date
KR970022342A true KR970022342A (en) 1997-05-28

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950034951A KR970022342A (en) 1995-10-11 1995-10-11 Test device of semiconductor device

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KR (1) KR970022342A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100322620B1 (en) * 1999-08-16 2002-03-18 황인길 Cassette carrier moving device of standard mechanical interface
KR100739883B1 (en) * 2006-11-07 2007-07-16 (주)피엘텍 Apparatus and method for testing probe card signal channel
KR20210049257A (en) * 2019-10-25 2021-05-06 마이크로 인스펙션 주식회사 Inspection apparatus of printed circuit board and control method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100322620B1 (en) * 1999-08-16 2002-03-18 황인길 Cassette carrier moving device of standard mechanical interface
KR100739883B1 (en) * 2006-11-07 2007-07-16 (주)피엘텍 Apparatus and method for testing probe card signal channel
KR20210049257A (en) * 2019-10-25 2021-05-06 마이크로 인스펙션 주식회사 Inspection apparatus of printed circuit board and control method thereof

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