KR970018329A - Spin Chucks for Fixing Semiconductor Substrates (CHUCK) - Google Patents
Spin Chucks for Fixing Semiconductor Substrates (CHUCK) Download PDFInfo
- Publication number
- KR970018329A KR970018329A KR1019950030050A KR19950030050A KR970018329A KR 970018329 A KR970018329 A KR 970018329A KR 1019950030050 A KR1019950030050 A KR 1019950030050A KR 19950030050 A KR19950030050 A KR 19950030050A KR 970018329 A KR970018329 A KR 970018329A
- Authority
- KR
- South Korea
- Prior art keywords
- spin
- chuck
- fixing
- substrate
- motor
- Prior art date
Links
Abstract
본 발명은 반도체 제조공정 LCD 공정에 있어서, 감광액을 이용하여 다양한 패턴을 형성하는 사진공정에 적용될 수 있도록 마련된 기판(웨이퍼)의 흡착 고정용 스핀척에 관한 것으로 좀더 상세하게는, 스핀척의 하단에 위치하여 회전가능을 담당하는 모터의 발생열이 스핀 척으로 전달됨을 차단하고, 기판의 균일성을 향상시킴으로 도포되는 감광액의 두께 균일성을 달성함에 이용되는 반도체 기판 고정용 스핀 척에 관한 것으로 균일성을 위해 회전력을 발생하는 스핀모터, 상기 스핀모터의 회전축에 축설되는 반도체기판을 흡착고정하는 스핀 척을 포함하는 감광액 도포설비에 있어서, 상기 스핀모터 축을 통하여 스핀모터로부터 전달된 열을 반도체기판에 충분히 분산시킬 수 있을 정도의 확대된 직경을 가지며, 모터축의 발생 열 전도를 방지토록 분신 및 차단수단이 형성되는 것이다.The present invention relates to a spin chuck for fixing and fixing a substrate (wafer) provided to be applied to a photographic process for forming various patterns using a photoresist in a semiconductor manufacturing process LCD process. The invention relates to a spin chuck for fixing semiconductor substrates used to achieve uniformity in thickness of a photosensitive liquid applied by blocking the generation of heat generated from a motor responsible for rotatable to the spin chuck and improving the uniformity of the substrate. A photosensitive liquid coating apparatus comprising a spin motor generating a rotational force and a spin chuck for attracting and fixing a semiconductor substrate arranged on a rotating shaft of the spin motor, wherein the heat transferred from the spin motor through the spin motor shaft is sufficiently dispersed in the semiconductor substrate. It has an enlarged diameter so that it can prevent the heat conduction of the motor shaft. And it will be cut-off means is formed.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명과 관련되는 반도체 기판 고정용 스핀척을 도시한 것으로, (A)는 측 단면도를 도시한 것이고,2 shows a spin chuck for fixing a semiconductor substrate according to the present invention, (A) shows a side cross-sectional view,
(B)는 저면의 형상을 도시한 것이다.(B) shows the shape of the bottom face.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950030050A KR970018329A (en) | 1995-09-14 | 1995-09-14 | Spin Chucks for Fixing Semiconductor Substrates (CHUCK) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950030050A KR970018329A (en) | 1995-09-14 | 1995-09-14 | Spin Chucks for Fixing Semiconductor Substrates (CHUCK) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970018329A true KR970018329A (en) | 1997-04-30 |
Family
ID=66615739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950030050A KR970018329A (en) | 1995-09-14 | 1995-09-14 | Spin Chucks for Fixing Semiconductor Substrates (CHUCK) |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970018329A (en) |
-
1995
- 1995-09-14 KR KR1019950030050A patent/KR970018329A/en not_active Application Discontinuation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Withdrawal due to no request for examination |