KR970018000A

KR970018000A - Align Jig for Sputtering Holder

Info

Publication number: KR970018000A
Application number: KR1019950033252A
Authority: KR
Inventors: 임종권
Original assignee: 김광호; 삼성전자 주식회사
Priority date: 1995-09-30
Filing date: 1995-09-30
Publication date: 1997-04-30

Abstract

본 발명은 반도체의 제반 소자제조 공정중 한 단계로써, 실시되고 있는 메탈(METAL) 증착용 스퍼터링 홀더의 얼라인 지그로써, 좀더 상세하게는 스퍼터링 설비 안에서 웨이퍼를 잡아주는 홀더의 교정을 위해 스퍼터링 설비 외부에서 스퍼터링 내부상태를 구현되는 한 얼라인 지그를 제공함으로 실제 진행되는 상황과 같은 조건하에서 홀더의 제 문제점을 체크할 수 있도록 한 스퍼터링 홀더용 얼라인 지그에 관한 것으로 메탈증착을 위한 반도체 고진공 스퍼터링 설비의 홀더 얼라인에 적용되어 홀더가 내주면에 결합되고, 외주면으로 결합편을 형성한 씰링의 홀더 얼라인에 있어서, 상기 씰링이 장착되기 위한 지지판과, 상기 씰링의 결합편에 긴밀히 결합되도록 지지판상에 형성된 결합수단과, 상기 지지판의 중심부에 돌출된 원형의 백 플랜히터가 구비되어 홀더의 얼라인이 용이함을 특징으로 하는 것이다.The present invention is an alignment jig of a sputtering holder for metal deposition, which is a step in the overall manufacturing process of a semiconductor, and more particularly, outside the sputtering facility for the calibration of the holder holding the wafer in the sputtering facility. The aligning jig for sputtering holder which can check the problems of holder under the same conditions as the actual situation by providing the aligning jig as long as the sputtering internal state is realized in the present invention. The semiconductor high vacuum sputtering equipment for metal deposition In the holder alignment of the sealing applied to the holder alignment, the holder is coupled to the inner circumferential surface, the coupling piece is formed on the outer circumferential surface, the support plate for mounting the sealing, and formed on the support plate to be closely coupled to the coupling piece of the sealing Coupling means and a circular back plan heater protruding in the center of the support plate is provided It is characterized in that the alignment of the holder is easy.

Description

Align Jig for Sputtering Holder

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2는 본 발명의 홀더용 얼라인 지그를 도시한 사시도,2 is a perspective view showing an alignment jig for a holder of the present invention;

제3도는 본 발명의 얼라인 지그에 홀더가 장착됨을 도시한 설명도.3 is an explanatory view showing that the holder is mounted on the alignment jig of the present invention.

Claims

A holder alignment of a sealing in which a holder is coupled to an inner circumferential surface and a coupling piece is formed on an outer circumferential surface, the support plate for mounting the seal, coupling means formed on a support plate to be closely coupled to the coupling piece of the sealing, and the support plate ALIGN JlG for sputtering holder, characterized in that a circular back plan heater is provided at the center of the sputtering.

※ Note: The disclosure is based on the initial application.