KR970017958A - A rust prevention treatment method of an aperture mask and a rust prevention treatment device - Google Patents

A rust prevention treatment method of an aperture mask and a rust prevention treatment device Download PDF

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Publication number
KR970017958A
KR970017958A KR1019960031468A KR19960031468A KR970017958A KR 970017958 A KR970017958 A KR 970017958A KR 1019960031468 A KR1019960031468 A KR 1019960031468A KR 19960031468 A KR19960031468 A KR 19960031468A KR 970017958 A KR970017958 A KR 970017958A
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KR
South Korea
Prior art keywords
aperture mask
mask
electrolytic solution
aperture
mask material
Prior art date
Application number
KR1019960031468A
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Korean (ko)
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KR100210134B1 (en
Inventor
야스요시 미야지
Original Assignee
이시다 아키라
다이닛뽕스크린 세이조오 가부시키가이샤
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Application filed by 이시다 아키라, 다이닛뽕스크린 세이조오 가부시키가이샤 filed Critical 이시다 아키라
Publication of KR970017958A publication Critical patent/KR970017958A/en
Application granted granted Critical
Publication of KR100210134B1 publication Critical patent/KR100210134B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
    • H01J9/146—Surface treatment, e.g. blackening, coating

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

어퍼처 마스크 제품이나 어퍼처 마스크 소재에 대해서 충분한 녹방지 효과가 주어지고, 약액의 사용에 의한 비용증가를 초래하거나 품질상의 단점을 발생시키거나 하는 것이 없는 녹방지 처리방법을 제공한다.There is provided a rust prevention treatment method in which sufficient rust prevention effect is given to the aperture mask product or the aperture mask material and the cost is not increased by the use of the chemical solution or there is no disadvantage in terms of quality.

정면공정이나 박막공정에 있어서, 어퍼처 마스크 소재(15)를 화성조(14)내에 수용된 중성 또는 알카리성의 전해액(28)중에 침지시켜서 전위적으로 부식영역과 부동태영역과의 경계전위보다 부동태영역측으로 양분극시킨다.In the frontal process or thin film process, the aperture mask material 15 is immersed in a neutral or alkaline electrolytic solution 28 contained in the chemical bath 14, so that the boundary potential between the corrosion area and the passive area is shifted to the passive area side Make a polarity.

Description

어퍼처 마스크(aperture mask)의 녹방지 처리방법 및 녹방지 처리장치A rust prevention treatment method of an aperture mask and a rust prevention treatment device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 청구항 1에 관한 발명의 녹방지 처리방법의 실시에 사용되는 어퍼쳐 마스크 제조장치의 일부를 구성하는 정면(整面)처리부의 구성의 한 예를 나타내는 개략도.FIG. 1 is a schematic view showing an example of a configuration of a front surface (surface) processing section constituting a part of an apparatus for manufacturing an aperture mask used in the rust prevention process of the invention according to claim 1. FIG.

Claims (4)

띠모양의 금속박판으로 이루어지는 어퍼처 마스크(aperture mast) 소재를 탈지하여 수세(水洗)해서 정면처리(整面處理)한 후에, 상기 어퍼처 마스크 소재를 화성조(化成槽)내에 수용된 중성 또는 알카리성의 전해액중에 침지시켜서 전위적으로 부식영역과 부동태영역과의 경계전위보다 부동태영역측으로 양분극(陽分極)시킨 것을 특징으로 하는 어퍼처 마스크의 녹방지 처리방법.A method of manufacturing a mask for masking an aperture mast made of a strip-shaped thin metal plate by degreasing and washing the mask with water and then treating the mask material with a neutral or alkaline Wherein the negative electrode is positively polarized toward the passive region side from the boundary potential between the corrosion region and the passive region by being dipped in an electrolytic solution of the rust preventive treatment. 띠모양의 금속박판으로 이루어지는 어퍼처 마스크 소재를 탈지하여 수세하는 탈지조 및 수세조의 후방측에 병설되고, 중성 또는 알카리성의 전해액을 수용해서, 그 전해액 중에 상기 어퍼처 마스크 소재가 침지하게 되는 화성조와, 이 화성조 내에 수용된 전해액 중에 침지하게 된 상기 어퍼쳐 마스크 소재를 양분극시키는 수단으로 이루어지는 어퍼쳐 마스크의 녹방지 처리장치.A mask for masking an aperture mask made of a strip-shaped metal thin plate, which is provided on the rear side of a degreasing bath and a water bath for degreasing and washing, is provided with a neutral or alkaline electrolytic solution accommodated therein, And a means for separating the material of the aperture mask immersed in the electrolytic solution contained in the chemical bath. 띠모양의 금속박판으로 이루어지는 어퍼처 마스크 소재를 에칭 처리하여 박막처리 (剝膜處理)한 후에, 상기 어퍼처 마스크 소재를 화성조 내에 수용된 중성 또는 알카리성의 전해액 중에 침지시켜서 전위적으로 부식영역과 부동태영역과의 경계전위보다 부동태영역폭으로 양분극시키는 것을 특징으로 하는 어퍼처 마스크의 녹방지 처리 방법.The upper mask material is immersed in a neutral or alkaline electrolyte contained in the chemical bath so as to form a corrosion area and a passive area, Wherein the negative electrode is polarized with a passive region width larger than the boundary potential with the region. 띠모양의 금속박판으로 이루어지는 어퍼처 마스크 소재의 표면에서 그 표면에 피착된 레지스트 막을 박리하여 수세하는 박막조 및 수세조의 후방측에 병설되고, 중성 또는 알카리성의 전해액을 수용해서, 그 전해액중에 상기 어퍼처 마스크 소재가 침지하게 되는 화성조와, 이 화성조 내에 수용된 전해액 중에 침지하게 된 상기 어퍼처 마스크 소재를 양분극시키는 수단으로 이루어지는 어퍼처 마스크의 녹방지 처리장치.A thin film tank for stripping and washing the resist film deposited on the surface of the aperture mask material made of a thin strip of metal thin plate and a neutral or alkaline electrolytic solution juxtaposed on the rear side of the water tank, Wherein the aperture mask material is immersed in the aperture mask and the aperture mask material immersed in the electrolytic solution contained in the mask is separated from the aperture mask material. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960031468A 1995-09-18 1996-07-30 Rust preventive treatment method and device for aperture mask KR100210134B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-266425 1995-09-18
JP7266425A JPH0982220A (en) 1995-09-18 1995-09-18 Rust preventive treatment method and device for aperture mask

Publications (2)

Publication Number Publication Date
KR970017958A true KR970017958A (en) 1997-04-30
KR100210134B1 KR100210134B1 (en) 1999-07-15

Family

ID=17430765

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960031468A KR100210134B1 (en) 1995-09-18 1996-07-30 Rust preventive treatment method and device for aperture mask

Country Status (2)

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JP (1) JPH0982220A (en)
KR (1) KR100210134B1 (en)

Also Published As

Publication number Publication date
JPH0982220A (en) 1997-03-28
KR100210134B1 (en) 1999-07-15

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