KR970017924A - Heating device for semiconductor device manufacturing - Google Patents

Heating device for semiconductor device manufacturing Download PDF

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Publication number
KR970017924A
KR970017924A KR1019950031093A KR19950031093A KR970017924A KR 970017924 A KR970017924 A KR 970017924A KR 1019950031093 A KR1019950031093 A KR 1019950031093A KR 19950031093 A KR19950031093 A KR 19950031093A KR 970017924 A KR970017924 A KR 970017924A
Authority
KR
South Korea
Prior art keywords
heating
cooling line
semiconductor device
heater
manufacturing
Prior art date
Application number
KR1019950031093A
Other languages
Korean (ko)
Inventor
유영섭
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950031093A priority Critical patent/KR970017924A/en
Publication of KR970017924A publication Critical patent/KR970017924A/en

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Abstract

반도체 소자 제조에 사용되는 가열장치에 관하여 개시하고 있다. 본 발명은 히팅 코일(heating coil)이 내재하는 히터(heater), 상기 히터의 외부에 설치된 냉각 라인(cooling line), 상기 냉각라인의 단부에 설치된 인네트(in net) 및 아우트 네트(out net)를 구비하는 가열장치에 있어서, 상기 인 네트 및 아우트 네트를 통해 상기 냉각 라인에 질소(cooling nitrogen)를 공급하여 온도조절을 하는 것을 특징으로 하는 반도체 소자 제조용 가열장치를 제공한다. 따라서, 온도조절을 안정되게 함과 동시에 히팅 코일에 부하를 가중시키지 않기 때문에 가열장치의 수명을 연장시킬 수 있다.Disclosed is a heating apparatus used for manufacturing a semiconductor device. The present invention provides a heater in which a heating coil is embedded, a cooling line installed outside the heater, an in net and an out net installed at an end of the cooling line. In the heating apparatus provided, it provides a heating device for manufacturing a semiconductor device, characterized in that for controlling the temperature by supplying (cooling nitrogen) to the cooling line through the inlet and the outer net. Therefore, the temperature control can be stabilized and the load on the heating coil is not increased, thereby extending the life of the heating apparatus.

Description

반도체 소자 제조용 가열장치Heating device for semiconductor device manufacturing

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제3도 및 제4도는 본 발명의 실시예에 따른 가열장치를 도시한 사시도.3 and 4 are perspective views showing a heating apparatus according to an embodiment of the present invention.

Claims (2)

히팅 코일(heating coil)이 내재하는 히터(heater), 상기 히터의 외부에 설치된 냉각 라인(cooling line), 상기 냉각라인의 단부에 설치된 인 네트(in net) 및 아우트 네트(out net)를 구비하는 가열장치에 있어서, 상기 인 네트 및 아우트 네트를 통해 상기 냉각 라인에 질소(cooling nitrogen)를 공급하여 온도조절을 하는 것을 특징으로 하는 반도체 소자 제조용 가열장치.A heater in which a heating coil is embedded, a cooling line installed outside the heater, an in net and an out net installed at an end of the cooling line. In the heating apparatus, the heating device for manufacturing a semiconductor device, characterized in that for controlling the temperature by supplying (cooling nitrogen) to the cooling line through the innet and the outer net. 제1항에 있어서, 상기 히터는 폐쇄(close)형이나 개구(open)형인 것을 특징으로 하는 반도체 소자 제조용 가열장치.The heating device of claim 1, wherein the heater is a closed type or an open type. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950031093A 1995-09-21 1995-09-21 Heating device for semiconductor device manufacturing KR970017924A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950031093A KR970017924A (en) 1995-09-21 1995-09-21 Heating device for semiconductor device manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950031093A KR970017924A (en) 1995-09-21 1995-09-21 Heating device for semiconductor device manufacturing

Publications (1)

Publication Number Publication Date
KR970017924A true KR970017924A (en) 1997-04-30

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ID=66616211

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950031093A KR970017924A (en) 1995-09-21 1995-09-21 Heating device for semiconductor device manufacturing

Country Status (1)

Country Link
KR (1) KR970017924A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020057754A (en) * 2001-01-06 2002-07-12 윤종용 Apparatus and method for controlling temperature of a semiconductor fabrication system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020057754A (en) * 2001-01-06 2002-07-12 윤종용 Apparatus and method for controlling temperature of a semiconductor fabrication system

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