KR970046719A - Vacuum Exhaust Valve of CVD System - Google Patents

Vacuum Exhaust Valve of CVD System Download PDF

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Publication number
KR970046719A
KR970046719A KR1019950053333A KR19950053333A KR970046719A KR 970046719 A KR970046719 A KR 970046719A KR 1019950053333 A KR1019950053333 A KR 1019950053333A KR 19950053333 A KR19950053333 A KR 19950053333A KR 970046719 A KR970046719 A KR 970046719A
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KR
South Korea
Prior art keywords
valve
vacuum exhaust
lead wire
cvd apparatus
exhaust valve
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Application number
KR1019950053333A
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Korean (ko)
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KR100256768B1 (en
Inventor
도시아키 이와부치
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나카니시 마사히코
가부시키사이샤 벤칸
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Priority to KR1019950053333A priority Critical patent/KR100256768B1/en
Publication of KR970046719A publication Critical patent/KR970046719A/en
Application granted granted Critical
Publication of KR100256768B1 publication Critical patent/KR100256768B1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/42—Valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K24/00—Devices, e.g. valves, for venting or aerating enclosures
    • F16K24/04—Devices, e.g. valves, for venting or aerating enclosures for venting only

Abstract

밸브내를, 밸브체나 벨로우즈등에 생성물이 부착하지 않도록 안정한 가열을 행할 수 있도록 한 CVD장치의 진공배기밸브를 제공한다.Provided is a vacuum exhaust valve of a CVD apparatus which enables stable heating to prevent a product from adhering to a valve body or a bellows.

한측에 가스유입구 또한 가스유출구를 갖고, 하측에 가스유출구 또는 가스유입구를 갖는 밸브상자내에서, 상측의 액츄에이터에 의하여 개폐동작하는 밸브체의 작동연결부를 벨로우즈로 시일한 CVD장치의 진공배기밸브에 있어서, 상기 벨로우즈내에서 밸브체의 작동 연결부의 외주측에 탄성신축가능한 코일상의 시스히터를 배치하고, 그 하단을 밸브체의 상측에 고정하고, 상단을 밸브상자내 천정면에서 고정한후, 밸브상자 밖의 리드선에 접속하여 이루는 CVD장치의 진공배기밸브.In a vacuum exhaust valve of a CVD apparatus in which a gas inlet and a gas outlet are provided at one side and a gas outlet or a gas inlet at the lower side, a bellows-sealed operation connecting part of the valve body is opened and closed by an upper actuator. In the bellows, the sheath heater on the elastically retractable coil is disposed on the outer circumferential side of the operating connection portion of the valve element, the lower end thereof is fixed on the upper side of the valve element, and the upper end is fixed on the ceiling surface in the valve box, and then A vacuum exhaust valve of a CVD apparatus connected to a lead wire.

이 CVD장치의 진공배기밸브에는 시스히터를 온도제어하는 시스열전대를 밸브상자내에 설치하거나, 이 시스히터의 리드선 및 시스열전대의 리드선을 밸브상자 밖의 온도조절기에 접속하거나 더욱더 밸브상자외면에 러버히터를 부착하여, 러버히터의 리드선 및 시스열전대의 리드선을 온도조절기에 접속하는 것이 바람직하다.In the vacuum exhaust valve of the CVD apparatus, a sheath thermocouple for controlling the temperature of the sheath heater is installed in the valve box, or the lead wire of the sheath heater and the sheath thermocouple lead are connected to a temperature controller outside the valve box, or a rubber heater is further provided on the outside of the valve box. It is preferable to attach the lead wire of the rubber heater and the lead wire of the sheath thermocouple to the temperature controller.

Description

CVD 장치의 진공배기밸브Vacuum Exhaust Valve of CVD System

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 진공배기밸브의 1실시예를 도시하는 밸브개방상태의 종단면도이다.1 is a longitudinal cross-sectional view of a valve open state, showing an embodiment of the vacuum exhaust valve of the present invention.

제2도는 제1도의 진공배기밸브의 밸브폐쇄상태를 도시하는 종단면도이다.FIG. 2 is a longitudinal sectional view showing a valve closing state of the vacuum exhaust valve of FIG.

제3도는 본 발명의 진공배기밸브의 다른 실시예를 도시하는 밸브폐쇄상태의 종단면도이다.3 is a longitudinal sectional view of a valve closed state showing another embodiment of the vacuum exhaust valve of the present invention.

제4도는 본 발명의 진공배기밸브를 밸브밖에서 온도제어하는 경우의 실시예의 개략도이다.4 is a schematic view of an embodiment in the case of controlling the temperature of the vacuum exhaust valve of the present invention outside the valve.

Claims (4)

한측에 가스유입구 또는 가스유출구를 갖고, 하측에 가스유출구 또는 가스유입구를 갖는 밸브상자내에서 상측의 액츄에이터에 의하여 개폐동작하는 밸브체의 작동연결부를 벨로우즈로 시일한 CVD장치의 진공배기밸브에 있어서, 상기 벨로우즈내에서 밸브체의 작동연결부의 외주측에 탄성신축가능한 코일상의 시스히터를 배치하고 그 하단을 밸브체의 상측에 고정하고, 상단을 밸브상자내 천정면에서 고정한 뒤, 밸브상자밖의 리드선에 접속하여 이루는 것을 특징으로 하는 CVD장치의 진공배기밸브.In the vacuum exhaust valve of the CVD apparatus which has a gas inlet or a gas outlet on one side and a bellows-sealed operation connection part of a valve body which is opened and closed by an upper actuator in a valve box having a gas outlet or a gas inlet on the lower side, In the bellows, a sheath heater on the elastically expandable coil is disposed on the outer circumferential side of the operating connection portion of the valve element, the lower end thereof is fixed to the upper side of the valve element, and the upper end is fixed to the ceiling surface in the valve box, and then to the lead wire outside the valve box. A vacuum exhaust valve of a CVD apparatus, characterized in that the connection is made. 제1항에 있어서, 시스히터를 온도제어하는 시스열전대를 시스히터의 내주측에 동일레벨 동일코일수로 동심으로 배치하고, 그 하단을 밸브체의 상측에 고정하고, 상단을 밸브상자내 천정면에서 고정한후, 밸브상자밖의 리드선에 접속하여 이루는 것을 특징으로 하는 CVD장치의 진공배기밸브.The sheath thermocouple for controlling the temperature of the sheath heater is disposed concentrically on the inner circumferential side of the sheath heater with the same number of coils, the lower end of which is fixed to the upper side of the valve body, and the upper end of the ceiling surface in the valve box. The vacuum exhaust valve of the CVD apparatus, characterized in that the connection is made to the lead wire outside the valve box after fixed in the. 제2항에 있어서, 밸브상자밖에 있어서 시스히터의 리드선 및 시스열전대의 리드선을 밸브상자밖에 설치한 온도조정기에 접속하여 이루는 것을 특징으로 하는 CVD장치의 진공배기밸브.The vacuum exhaust valve of a CVD apparatus according to claim 2, wherein the lead wire of the sheath heater and the sheath thermocouple lead are connected to a temperature regulator provided outside the valve box outside the valve box. 제3항에 있어서, 밸브상자외면에 러버히터를 부착하고, 러버히터의 리드선 및 시스열전대의 리드선을 온도조정기에 접속하여 이루는 것을 특징으로 하는 CVD장치의 진공배기밸브.The vacuum exhaust valve of a CVD apparatus according to claim 3, wherein a rubber heater is attached to an outer surface of the valve box, and the lead wire of the rubber heater and the lead wire of the sheath thermocouple are connected to a temperature controller.
KR1019950053333A 1995-12-21 1995-12-21 Vaccum exhaust valve KR100256768B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950053333A KR100256768B1 (en) 1995-12-21 1995-12-21 Vaccum exhaust valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950053333A KR100256768B1 (en) 1995-12-21 1995-12-21 Vaccum exhaust valve

Publications (2)

Publication Number Publication Date
KR970046719A true KR970046719A (en) 1997-07-26
KR100256768B1 KR100256768B1 (en) 2000-10-02

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KR101408008B1 (en) * 2012-01-18 2014-07-02 이호영 Air valve
KR101595217B1 (en) 2014-09-16 2016-02-17 프리시스 주식회사 A Fixed-heater provided angle valve

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