KR970014837U - Device for adjusting the amount of photoresist remaining in the photoresist supply container for semiconductor device manufacturing process - Google Patents
Device for adjusting the amount of photoresist remaining in the photoresist supply container for semiconductor device manufacturing processInfo
- Publication number
- KR970014837U KR970014837U KR2019950024233U KR19950024233U KR970014837U KR 970014837 U KR970014837 U KR 970014837U KR 2019950024233 U KR2019950024233 U KR 2019950024233U KR 19950024233 U KR19950024233 U KR 19950024233U KR 970014837 U KR970014837 U KR 970014837U
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist
- adjusting
- amount
- manufacturing process
- supply container
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950024233U KR0121223Y1 (en) | 1995-09-06 | 1995-09-06 | Photoresist residual amount control device of photoresist supply container for semiconductor device manufacturing process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950024233U KR0121223Y1 (en) | 1995-09-06 | 1995-09-06 | Photoresist residual amount control device of photoresist supply container for semiconductor device manufacturing process |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970014837U true KR970014837U (en) | 1997-04-28 |
KR0121223Y1 KR0121223Y1 (en) | 1998-07-01 |
Family
ID=70851801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950024233U KR0121223Y1 (en) | 1995-09-06 | 1995-09-06 | Photoresist residual amount control device of photoresist supply container for semiconductor device manufacturing process |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0121223Y1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102565095B1 (en) | 2021-12-29 | 2023-08-09 | 송용익 | Drug remaining minimum slope driving device when discharging the drug from the container |
-
1995
- 1995-09-06 KR KR2019950024233U patent/KR0121223Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0121223Y1 (en) | 1998-07-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050322 Year of fee payment: 8 |
|
LAPS | Lapse due to unpaid annual fee |