KR970014837U - Device for adjusting the amount of photoresist remaining in the photoresist supply container for semiconductor device manufacturing process - Google Patents

Device for adjusting the amount of photoresist remaining in the photoresist supply container for semiconductor device manufacturing process

Info

Publication number
KR970014837U
KR970014837U KR2019950024233U KR19950024233U KR970014837U KR 970014837 U KR970014837 U KR 970014837U KR 2019950024233 U KR2019950024233 U KR 2019950024233U KR 19950024233 U KR19950024233 U KR 19950024233U KR 970014837 U KR970014837 U KR 970014837U
Authority
KR
South Korea
Prior art keywords
photoresist
adjusting
amount
manufacturing process
supply container
Prior art date
Application number
KR2019950024233U
Other languages
Korean (ko)
Other versions
KR0121223Y1 (en
Inventor
양천수
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950024233U priority Critical patent/KR0121223Y1/en
Publication of KR970014837U publication Critical patent/KR970014837U/en
Application granted granted Critical
Publication of KR0121223Y1 publication Critical patent/KR0121223Y1/en

Links

KR2019950024233U 1995-09-06 1995-09-06 Photoresist residual amount control device of photoresist supply container for semiconductor device manufacturing process KR0121223Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950024233U KR0121223Y1 (en) 1995-09-06 1995-09-06 Photoresist residual amount control device of photoresist supply container for semiconductor device manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950024233U KR0121223Y1 (en) 1995-09-06 1995-09-06 Photoresist residual amount control device of photoresist supply container for semiconductor device manufacturing process

Publications (2)

Publication Number Publication Date
KR970014837U true KR970014837U (en) 1997-04-28
KR0121223Y1 KR0121223Y1 (en) 1998-07-01

Family

ID=70851801

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950024233U KR0121223Y1 (en) 1995-09-06 1995-09-06 Photoresist residual amount control device of photoresist supply container for semiconductor device manufacturing process

Country Status (1)

Country Link
KR (1) KR0121223Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102565095B1 (en) 2021-12-29 2023-08-09 송용익 Drug remaining minimum slope driving device when discharging the drug from the container

Also Published As

Publication number Publication date
KR0121223Y1 (en) 1998-07-01

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Legal Events

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A201 Request for examination
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Payment date: 20050322

Year of fee payment: 8

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