KR970008339A - UV irradiation device - Google Patents

UV irradiation device Download PDF

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Publication number
KR970008339A
KR970008339A KR1019950022943A KR19950022943A KR970008339A KR 970008339 A KR970008339 A KR 970008339A KR 1019950022943 A KR1019950022943 A KR 1019950022943A KR 19950022943 A KR19950022943 A KR 19950022943A KR 970008339 A KR970008339 A KR 970008339A
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KR
South Korea
Prior art keywords
wafer
power source
ultraviolet
vacuum chuck
light source
Prior art date
Application number
KR1019950022943A
Other languages
Korean (ko)
Other versions
KR0144877B1 (en
Inventor
김동호
안웅관
고균희
차훈
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950022943A priority Critical patent/KR0144877B1/en
Priority to JP09703096A priority patent/JP3859259B2/en
Priority to US08/679,084 priority patent/US5872365A/en
Publication of KR970008339A publication Critical patent/KR970008339A/en
Application granted granted Critical
Publication of KR0144877B1 publication Critical patent/KR0144877B1/en
Priority to JP2006222028A priority patent/JP2006352155A/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

자외선 조사장치가 개시되어 있다. 본 발명은 웨이퍼를 자외선 조사장치에 로딩(loading)시키거나 자외선 조사장치로부터 언로딩(unloading)시키기 위하여 수평이동시킬 수 있음은 물론, 웨이퍼의 중심과 웨이퍼를 회전시키기 위한 동력원의 중심축을 일치시키지 않음으로써 동력원을 동작시킬 때 웨이퍼의 중심이 원을 그리면서 선회시킬 수 있는 웨이퍼 전송수단을 제공한다.An ultraviolet irradiation device is disclosed. The present invention can move the wafer horizontally for loading or unloading the ultraviolet irradiation device, and does not coincide with the center axis of the wafer and the central axis of the power source for rotating the wafer. This provides a wafer transfer means capable of turning the center of the wafer in a circle when operating the power source.

본 발명에 의하면, 웨이퍼에 자외선 조사시 웨이퍼를 선회시킴과 동시에 직진시킬 수 있어 자외선이 웨이퍼 표면 전체에 균일하게 조사된다. 이는, 접착제에 의해 보호용테이프가 앞면에 부착된 웨이퍼를 백그라인딩(back grinding)한 후, 보호용테이프를 제거하기 위한 자외선 조사시 접착제 전체가 균일한 화학반응을 일으키도록 한다. 따라서, 보호용테이프를 용이하게 제거할 수 있다.According to the present invention, the wafer can be rotated and go straight at the same time as the wafer is irradiated with ultraviolet rays, and the ultraviolet rays are uniformly irradiated on the entire surface of the wafer. This causes the entire adhesive to cause a uniform chemical reaction upon UV irradiation to remove the protective tape after back grinding the wafer having the protective tape attached to the front surface by the adhesive. Therefore, the protective tape can be easily removed.

Description

자외선 조사장치UV irradiation device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 의한 웨이퍼 전송수단의 정면도이다. 제2도는 제1도의 평면도이다. 제3도는 본 발명에 의한 자외선 조사장치의 사시도이다.1 is a front view of a wafer transfer means according to the present invention. 2 is a plan view of FIG. 3 is a perspective view of the ultraviolet irradiation device according to the present invention.

Claims (5)

챔버 내에 설치된 광원, 상기 광원의 하부에 웨이퍼를 이동시키기 위하여 설치된 웨이퍼 전송수단, 및 상기 웨이퍼 전송수단에 상기 광원으로부터 발생되는 자외선을 집중시키기 위하여 상기 광원을 둘러싸면서 설치된 반사경을 포함하는 자외선 조사장치에 있어서, 상기 웨이퍼 전송수단은 웨이퍼를 지지하는 진공 척(chuck); 상기 진공 척의 중심축과 연결되어 상기 진공 척을 상/하로 이동시키는 기능을 갖는 실린더부: 상기 실린더부의 바닥에 접촉되고 상기 실린더부의 한쪽 옆에 돌출되면서 상기 실린더부를 고정시키는 실린더 고정블록: 상기 실린더 고정블록의 돌출된 부분에 중심축이 연결되어 고정되고 상기 실린더부를 원운동시키기 위한 동력원: 상기 동력원에 부착되어 상기 동력원을 고정시키는 동력원 고정블록; 상기 동력원 고정블록이 수평이동되도록 상기 동력원 고정블록의 몸체를 같은 방향으로 관통하는 복수의 샤프트(shaft); 및 상기 복수의 샤프트를 고정시키기 위하여 상기 복수의 샤프트의 양 끝에 부착된 샤프트 고정블록을 구비하여, 상기 진공 척을 상/하 이동 및 수평이동시킴과 아울러 선회시킬수 있는 것을 특징으로 하는 자외선 조사장치.A light source installed in the chamber, a wafer transfer means installed to move the wafer under the light source, and a reflector provided to surround the light source to concentrate the ultraviolet rays generated from the light source in the wafer transfer means. The wafer transfer means comprises: a vacuum chuck supporting a wafer; A cylinder part connected to a central axis of the vacuum chuck and having a function of moving the vacuum chuck up and down: a cylinder fixing block which contacts the bottom of the cylinder part and protrudes to one side of the cylinder part to fix the cylinder part: fixing the cylinder A power source for connecting the central shaft to the protruding portion of the block and fixing the circular cylinder; the power source fixing block attached to the power source to fix the power source; A plurality of shafts penetrating the body of the power source fixing block in the same direction so that the power source fixing block is moved horizontally; And a shaft fixing block attached to both ends of the plurality of shafts to fix the plurality of shafts, wherein the vacuum chuck can be pivoted up and down and horizontally. 제1항에 있어서, 상기 광원과 상기 진공 척 사이에 자외선만을 투과시키고 적외선 및 가시광선은 반사시키는 자외선 필터를 더 구비하는 것을 특징으로 하는 자외선 조사장치.The ultraviolet irradiation device according to claim 1, further comprising an ultraviolet filter for transmitting only ultraviolet rays and reflecting infrared rays and visible rays between the light source and the vacuum chuck. 제2항에 있어서, 상기 자외선 필터는 석영(quartz) 기판의 한 쪽 표면에 코팅된 복수의 특수물질층으로 이루어지는 것을 특징으로 하는 자외선 조사장치.The ultraviolet irradiation device according to claim 2, wherein the ultraviolet filter comprises a plurality of special material layers coated on one surface of a quartz substrate. 제3항에 있어서, 상기 특수물질층은 이산화 지르코늄(ZrO2)층과 이산화 실리콘(SiO2)층이 적층된 것을 특징으로 하는 자외선 조사장치.The ultraviolet irradiation apparatus according to claim 3, wherein the special material layer is formed by stacking a zirconium dioxide (ZrO 2 ) layer and a silicon dioxide (SiO 2 ) layer. 제1항에 있어서, 상기 동력원은 모터인 것을 특징으로 하는 자외선 조사장치.The ultraviolet irradiation device according to claim 1, wherein the power source is a motor. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950022943A 1995-07-13 1995-07-28 Uv irradiation apparatus KR0144877B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019950022943A KR0144877B1 (en) 1995-07-28 1995-07-28 Uv irradiation apparatus
JP09703096A JP3859259B2 (en) 1995-07-13 1996-04-18 UV irradiation equipment
US08/679,084 US5872365A (en) 1995-07-13 1996-07-12 UV irradiation apparatus
JP2006222028A JP2006352155A (en) 1995-07-13 2006-08-16 Ultra-violet ray irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950022943A KR0144877B1 (en) 1995-07-28 1995-07-28 Uv irradiation apparatus

Publications (2)

Publication Number Publication Date
KR970008339A true KR970008339A (en) 1997-02-24
KR0144877B1 KR0144877B1 (en) 1998-08-17

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ID=19422090

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950022943A KR0144877B1 (en) 1995-07-13 1995-07-28 Uv irradiation apparatus

Country Status (1)

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Also Published As

Publication number Publication date
KR0144877B1 (en) 1998-08-17

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