KR970004786A - 광로 조절 장치의 에어갭 형성방법 - Google Patents

광로 조절 장치의 에어갭 형성방법 Download PDF

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Publication number
KR970004786A
KR970004786A KR1019950018673A KR19950018673A KR970004786A KR 970004786 A KR970004786 A KR 970004786A KR 1019950018673 A KR1019950018673 A KR 1019950018673A KR 19950018673 A KR19950018673 A KR 19950018673A KR 970004786 A KR970004786 A KR 970004786A
Authority
KR
South Korea
Prior art keywords
control device
optical path
air gap
formation method
path control
Prior art date
Application number
KR1019950018673A
Other languages
English (en)
Other versions
KR0159369B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1019950018673A priority Critical patent/KR0159369B1/ko
Priority to US08/598,478 priority patent/US5677785A/en
Priority to IN246CA1996 priority patent/IN187493B/en
Priority to JP8084620A priority patent/JPH08292382A/ja
Publication of KR970004786A publication Critical patent/KR970004786A/ko
Application granted granted Critical
Publication of KR0159369B1 publication Critical patent/KR0159369B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/764—Air gaps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
KR1019950018673A 1995-04-21 1995-06-30 광로 조절 장치의 에어갭 형성방법 KR0159369B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019950018673A KR0159369B1 (ko) 1995-06-30 1995-06-30 광로 조절 장치의 에어갭 형성방법
US08/598,478 US5677785A (en) 1995-04-21 1996-02-08 Method for forming an array of thin film actuated mirrors
IN246CA1996 IN187493B (ko) 1995-04-21 1996-02-12
JP8084620A JPH08292382A (ja) 1995-04-21 1996-03-13 薄膜アクチュエーテッドミラーアレイの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950018673A KR0159369B1 (ko) 1995-06-30 1995-06-30 광로 조절 장치의 에어갭 형성방법

Publications (2)

Publication Number Publication Date
KR970004786A true KR970004786A (ko) 1997-01-29
KR0159369B1 KR0159369B1 (ko) 1999-01-15

Family

ID=19419120

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950018673A KR0159369B1 (ko) 1995-04-21 1995-06-30 광로 조절 장치의 에어갭 형성방법

Country Status (1)

Country Link
KR (1) KR0159369B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980702286A (ko) * 1995-02-17 1998-07-15
KR100490786B1 (ko) * 1997-12-27 2005-08-31 주식회사 현대오토넷 에어백 제어장치의 자동시간 측정장치 및 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980702286A (ko) * 1995-02-17 1998-07-15
KR100490786B1 (ko) * 1997-12-27 2005-08-31 주식회사 현대오토넷 에어백 제어장치의 자동시간 측정장치 및 방법

Also Published As

Publication number Publication date
KR0159369B1 (ko) 1999-01-15

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A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20020729

Year of fee payment: 5

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