KR970003197U - Cleaning Tank Cover of Wet Cleaner - Google Patents

Cleaning Tank Cover of Wet Cleaner

Info

Publication number
KR970003197U
KR970003197U KR2019950014625U KR19950014625U KR970003197U KR 970003197 U KR970003197 U KR 970003197U KR 2019950014625 U KR2019950014625 U KR 2019950014625U KR 19950014625 U KR19950014625 U KR 19950014625U KR 970003197 U KR970003197 U KR 970003197U
Authority
KR
South Korea
Prior art keywords
cleaning tank
tank cover
wet cleaner
cleaner
wet
Prior art date
Application number
KR2019950014625U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950014625U priority Critical patent/KR970003197U/en
Publication of KR970003197U publication Critical patent/KR970003197U/en

Links

KR2019950014625U 1995-06-24 1995-06-24 Cleaning Tank Cover of Wet Cleaner KR970003197U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950014625U KR970003197U (en) 1995-06-24 1995-06-24 Cleaning Tank Cover of Wet Cleaner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950014625U KR970003197U (en) 1995-06-24 1995-06-24 Cleaning Tank Cover of Wet Cleaner

Publications (1)

Publication Number Publication Date
KR970003197U true KR970003197U (en) 1997-01-24

Family

ID=60871940

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950014625U KR970003197U (en) 1995-06-24 1995-06-24 Cleaning Tank Cover of Wet Cleaner

Country Status (1)

Country Link
KR (1) KR970003197U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100344092B1 (en) * 1998-12-29 2002-11-23 주식회사 에스아이테크 Cover structure of semiconductor equipment
KR100558539B1 (en) * 1999-02-22 2006-03-10 삼성전자주식회사 Tool for cleaning a cover of a etching bath
KR101054836B1 (en) * 2011-03-29 2011-08-05 (주)엠앤에스시스템 Apparatus for cleaning of siemiconductor wafer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100344092B1 (en) * 1998-12-29 2002-11-23 주식회사 에스아이테크 Cover structure of semiconductor equipment
KR100558539B1 (en) * 1999-02-22 2006-03-10 삼성전자주식회사 Tool for cleaning a cover of a etching bath
KR101054836B1 (en) * 2011-03-29 2011-08-05 (주)엠앤에스시스템 Apparatus for cleaning of siemiconductor wafer

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination