KR970002429B1 - Supplying apparatus of development liquor - Google Patents

Supplying apparatus of development liquor Download PDF

Info

Publication number
KR970002429B1
KR970002429B1 KR94001767A KR19940001767A KR970002429B1 KR 970002429 B1 KR970002429 B1 KR 970002429B1 KR 94001767 A KR94001767 A KR 94001767A KR 19940001767 A KR19940001767 A KR 19940001767A KR 970002429 B1 KR970002429 B1 KR 970002429B1
Authority
KR
South Korea
Prior art keywords
developer
tank
supplying
main
auxiliary
Prior art date
Application number
KR94001767A
Other languages
Korean (ko)
Other versions
KR950024279A (en
Inventor
Hee-Wook Park
Original Assignee
Lg Semicon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Semicon Co Ltd filed Critical Lg Semicon Co Ltd
Priority to KR94001767A priority Critical patent/KR970002429B1/en
Publication of KR950024279A publication Critical patent/KR950024279A/en
Application granted granted Critical
Publication of KR970002429B1 publication Critical patent/KR970002429B1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Wet Developing In Electrophotography (AREA)
  • Photographic Developing Apparatuses (AREA)

Abstract

The developer supplying device additionally installs an auxiliary tank in a main developer tank to supply a constant amount of developer, without any interruption. The developer supplying device comprises: the main tank for supplying the developer through a nozzle; the auxiliary tank for supplying the developer to the main tank; a valve for supplying a vacuum state and the developer in accordance with the charged state of the auxiliary tank; a valve for supplying an air pressure to the main and auxiliary tanks; a valve for supplying the developer from the auxiliary tank to the main tank; low/high level sensors for sensing the charged state of the main and auxiliary tanks; a first switch for turning on/off the valve in accordance with the sensed state of the low/high level sensors to control the supply of the developer to the auxiliary tank; a second switch for turning on the valve for the supply of the developer to the main tank, upon the charging of the auxiliary tank; and a third switch for supplying the developer of the main tank to the nozzle in accordance with the sensed result of the high level sensor.
KR94001767A 1994-01-31 1994-01-31 Supplying apparatus of development liquor KR970002429B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR94001767A KR970002429B1 (en) 1994-01-31 1994-01-31 Supplying apparatus of development liquor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94001767A KR970002429B1 (en) 1994-01-31 1994-01-31 Supplying apparatus of development liquor

Publications (2)

Publication Number Publication Date
KR950024279A KR950024279A (en) 1995-08-21
KR970002429B1 true KR970002429B1 (en) 1997-03-05

Family

ID=19376551

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94001767A KR970002429B1 (en) 1994-01-31 1994-01-31 Supplying apparatus of development liquor

Country Status (1)

Country Link
KR (1) KR970002429B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW382749B (en) * 1996-12-24 2000-02-21 Tokyo Electron Ltd Liquid supplying device
KR20020006369A (en) * 2000-07-12 2002-01-19 김광교 Method and chemicals recover system

Also Published As

Publication number Publication date
KR950024279A (en) 1995-08-21

Similar Documents

Publication Publication Date Title
DE3066917D1 (en) Pressure monitoring system for electrofluidic sensing devices
WO2006056878A3 (en) Gas leak detection device and fuel cell system
CA2158245A1 (en) Liquid pressure measuring device and control means of said device
EP3643189B1 (en) Atomizing device and electronic cigarette having same
EP1192000A4 (en) Apparatus and procedures for replenishing particulate materials
AU1885697A (en) An ink jet printing system
EP1003025A3 (en) Fluid leakage and fluid flow detection for preventing and limiting damage
KR970002429B1 (en) Supplying apparatus of development liquor
EP1122422A3 (en) Diagnosing apparatus for evaporation purge system and pressure sensor
CA2420571A1 (en) Hydrogen storage system and power system incorporating same
EP0976601A3 (en) Fuel tank with level measurement device
TW428128B (en) A power supply for automatically supplying a proper voltage to a central processing unit
SI0628653T1 (en) Automatically controlled washing machine
DE3780325D1 (en) DEVICE FOR PROTECTION AGAINST WATER DAMAGE IN DISHWASHER.
TW324672B (en) Polyimide coating device
JPS575062A (en) Developing device
TW357290B (en) Apparatus and method for controlling a computer system having a hot-swapping function
KR930006561Y1 (en) Central supply apparatus for chemical liquid
JPS56102863A (en) Electrophotographic copying apparatus
JPS57136668A (en) Developer density controller
DK0852684T3 (en) Hydropneumatic anti-hammer tank with air inlet and control device and method of air supply
JPS5778972A (en) Method for quantitatively supplying coating liquid
JPS6460042A (en) Control system for power source of communication adapter
JPH08203359A (en) Pressure dice device for covering linear body
JPS56109373A (en) Control system for supply of toner of copying machine

Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20060221

Year of fee payment: 10

LAPS Lapse due to unpaid annual fee