KR970002267B1 - Semiconductor integrated circuit device fabrication process - Google Patents

Semiconductor integrated circuit device fabrication process Download PDF

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Publication number
KR970002267B1
KR970002267B1 KR92017909A KR920017909A KR970002267B1 KR 970002267 B1 KR970002267 B1 KR 970002267B1 KR 92017909 A KR92017909 A KR 92017909A KR 920017909 A KR920017909 A KR 920017909A KR 970002267 B1 KR970002267 B1 KR 970002267B1
Authority
KR
South Korea
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
fabrication process
device fabrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR92017909A
Other languages
English (en)
Korean (ko)
Inventor
Shunpei Yamazaki
Akira Mase
Hideki Uochi
Yasuhiko Takemura
Original Assignee
Semiconductor Energy Lab Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3278704A external-priority patent/JP2877586B2/ja
Priority claimed from JP3278706A external-priority patent/JP2877587B2/ja
Priority claimed from JP4237764A external-priority patent/JPH0661491A/ja
Application filed by Semiconductor Energy Lab Kk filed Critical Semiconductor Energy Lab Kk
Priority to KR1019970001226A priority Critical patent/KR100208540B1/ko
Application granted granted Critical
Publication of KR970002267B1 publication Critical patent/KR970002267B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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KR92017909A 1991-09-30 1992-09-30 Semiconductor integrated circuit device fabrication process Expired - Fee Related KR970002267B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019970001226A KR100208540B1 (ko) 1991-09-30 1997-01-17 반도체 장치

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP3278704A JP2877586B2 (ja) 1991-09-30 1991-09-30 半導体集積回路およびその作製方法
JP3278706A JP2877587B2 (ja) 1991-09-30 1991-09-30 半導体集積回路およびその作製方法
JP17488292 1992-06-09
JP4237764A JPH0661491A (ja) 1992-06-09 1992-08-12 半導体装置の作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1019970001226A Division KR100208540B1 (ko) 1991-09-30 1997-01-17 반도체 장치

Publications (1)

Publication Number Publication Date
KR970002267B1 true KR970002267B1 (en) 1997-02-27

Family

ID=27474600

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92017909A Expired - Fee Related KR970002267B1 (en) 1991-09-30 1992-09-30 Semiconductor integrated circuit device fabrication process

Country Status (2)

Country Link
KR (1) KR970002267B1 (enrdf_load_stackoverflow)
TW (1) TW235372B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090090915A1 (en) * 2007-10-05 2009-04-09 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor, display device having thin film transistor, and method for manufacturing the same
KR101455304B1 (ko) * 2007-10-05 2014-11-03 가부시키가이샤 한도오따이 에네루기 켄큐쇼 박막트랜지스터, 및 박막트랜지스터를 가지는 표시장치, 및그들의 제작방법

Also Published As

Publication number Publication date
TW235372B (enrdf_load_stackoverflow) 1994-12-01

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