KR960042161A - Coating solution coating method of liquid crystal substrate - Google Patents

Coating solution coating method of liquid crystal substrate Download PDF

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Publication number
KR960042161A
KR960042161A KR1019950014170A KR19950014170A KR960042161A KR 960042161 A KR960042161 A KR 960042161A KR 1019950014170 A KR1019950014170 A KR 1019950014170A KR 19950014170 A KR19950014170 A KR 19950014170A KR 960042161 A KR960042161 A KR 960042161A
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KR
South Korea
Prior art keywords
liquid crystal
crystal substrate
coating solution
solution
stage
Prior art date
Application number
KR1019950014170A
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Korean (ko)
Inventor
이기종
Original Assignee
엄길용
오리오전기 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 엄길용, 오리오전기 주식회사 filed Critical 엄길용
Priority to KR1019950014170A priority Critical patent/KR960042161A/en
Publication of KR960042161A publication Critical patent/KR960042161A/en

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Abstract

본 발명은 액정기판의 코팅용액 도포방법에 관한 것으로서, 액정기판을 그 보다 큰 면적의 평판 스테이지상에 탑재하고, 그 상측을 가로질러 다수개의 노즐이 일렬로 배치되어 있는 분사장치를 좌우로 이동시키며 코팅용액을 분사시켜 골고루 살포한 후, 상기의 액정기판을 회전 스테이지에 탑재하여 일정한 회전수로 회전시켜 살포된 코팅용액을 균일하게 퍼뜨려 코팅용액막을 형성하였으므로, 많은 량의 코팅용액을 사용하지 않아도 되므로 제조단가를 절감할 수 있으며, 면적이 액정기판 보다 큰 평판 스테이지에서 용액을 코팅하므로 액정기판의 이면에 용액이 코팅되지 않아 이면 세척 공정을 생략할 수 있고, 액정기판 표면의 오염이 방지되어 공정수율이 향상된다.The present invention relates to a coating solution coating method of a liquid crystal substrate, comprising mounting a liquid crystal substrate on a flat surface stage having a larger area, and moving the spraying device in which a plurality of nozzles are arranged in a row across the upper side to the left and right. After spraying the coating solution and spreading it evenly, the liquid crystal substrate was mounted on the rotating stage and rotated at a constant rotational speed to uniformly spread the sprayed coating solution to form a coating solution film. Therefore, it is not necessary to use a large amount of coating solution. The manufacturing cost can be reduced, and since the solution is coated on a flat panel stage larger than the liquid crystal substrate, the back surface of the liquid crystal substrate is not coated, so the cleaning process can be omitted. This is improved.

Description

액정기판의 코팅용액 도포방법Coating solution coating method of liquid crystal substrate

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발며에 따른 액정기판 제조용 코팅용액 도포방법을 설명하기 위한 개략도.2 is a schematic view for explaining a coating solution coating method for manufacturing a liquid crystal substrate according to the present invention.

Claims (6)

액정기판의 코팅용액 도포방법에 있어서, 다수개의 용액 분사용 노즐이 배열되어 있는 용액 분사장치를 좌우로 움직이며 액정기판 상에 코팅용액을 도포하는 공정과, 상기 코팅용액이 도포된 액정기판을 회전 스테이지 상에 탑재하고, 회전시켜 코팅용액을 균일하게 분사시키는 공정을 구비하는 액정기판의 코팅용액 도포방법.In the coating solution coating method of a liquid crystal substrate, a process of applying a coating solution on a liquid crystal substrate by moving a solution injector in which a plurality of solution injection nozzles are arranged left and right, and rotating the liquid crystal substrate coated with the coating solution. A method for applying a coating solution for a liquid crystal substrate, the method comprising mounting on a stage and rotating to uniformly spray the coating solution. 제1항에 있어서, 상기 용액 코팅시 액정기판이 탑재되는 평판 스테이지가 상기 액정기판 보다 크게 형성되어 있어 용액이 액정기판의 이면에 코팅되는 것을 방지하는 것을 특징으로 하는 액정기판의 코팅용액 도포방법.The method of claim 1, wherein the liquid crystal substrate is mounted on a flat plate stage on which the liquid crystal substrate is mounted so as to prevent the solution from being coated on the rear surface of the liquid crystal substrate. 제1항에 있어서, 상기 분사장치가 액정기판이 탑재되는 평판 스테이지의 상측에서 가로지르는 원통형의 몸체과 그 하측에 설치되어 있는 다수개의 노즐로 구성되어 액정기판을 따라 좌우로 이동하며 용액을 살포하는 것을 특징으로 하는 액정기판의 코팅용액 도포방법.According to claim 1, wherein the spraying device is composed of a cylindrical body that traverses on the upper side of the flat stage on which the liquid crystal substrate is mounted and a plurality of nozzles provided on the lower side to move along the liquid crystal substrate to the left and right to spray the solution A coating solution coating method for a liquid crystal substrate. 제1항에 있어서, 상기 용액이 감광액, 배향막용 폴리이미드 및 칼라필터 화소용 폴리이미드로 구성되는 군에서 임의로 선택되는 하나의 용액인 것을 특징으로 하는 액정기판의 코팅용액 도포방법.The method of claim 1, wherein the solution is one solution arbitrarily selected from the group consisting of photoresist, polyimide for alignment layer, and polyimide for color filter pixel. 제1항에 있어서, 상기 회전 스테이지가 100∼5000RPM으로 회전하는 것을 특징으로 하는 액정기판의 코팅용액 도포방법.The method of claim 1, wherein the rotating stage is rotated at 100 to 5000 RPM. 제1항에 있어서, 상기 회전 스테이지가 진공흡입구를 구비하여 회전시 액정기판을 흡착하는 것을 특징으로 하는 액정기판의 코팅용액 도포방법.The method of claim 1, wherein the rotating stage includes a vacuum suction hole to suck the liquid crystal substrate during rotation. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950014170A 1995-05-31 1995-05-31 Coating solution coating method of liquid crystal substrate KR960042161A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950014170A KR960042161A (en) 1995-05-31 1995-05-31 Coating solution coating method of liquid crystal substrate

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Application Number Priority Date Filing Date Title
KR1019950014170A KR960042161A (en) 1995-05-31 1995-05-31 Coating solution coating method of liquid crystal substrate

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KR960042161A true KR960042161A (en) 1996-12-21

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488930B1 (en) * 1997-12-11 2005-10-26 비오이 하이디스 테크놀로지 주식회사 Developer and deionized water application device of developing equipment
KR101034695B1 (en) * 2004-06-30 2011-05-16 엘지디스플레이 주식회사 Spin coater nozzle system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488930B1 (en) * 1997-12-11 2005-10-26 비오이 하이디스 테크놀로지 주식회사 Developer and deionized water application device of developing equipment
KR101034695B1 (en) * 2004-06-30 2011-05-16 엘지디스플레이 주식회사 Spin coater nozzle system

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