CN101118350A - Method for forming functional film and method for manufacturing liquid crystal display - Google Patents
Method for forming functional film and method for manufacturing liquid crystal display Download PDFInfo
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- CN101118350A CN101118350A CNA2007101383858A CN200710138385A CN101118350A CN 101118350 A CN101118350 A CN 101118350A CN A2007101383858 A CNA2007101383858 A CN A2007101383858A CN 200710138385 A CN200710138385 A CN 200710138385A CN 101118350 A CN101118350 A CN 101118350A
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Abstract
A method for forming a functional film includes a step of preparing a substrate having a surface roughness of 2.3 nm or greater, a step of preparing a functional film forming composition containing functional film forming material and organic solvent, and a step of forming the functional film through ejection of the functional film forming composition onto the substrate using a droplet ejection apparatus.
Description
Technical field
The present invention relates to a kind ofly form and use composition, thereby formation does not have the striped inequality and has the thickness of homogeneous and the formation method of the functional membrane of the functional membrane on smooth surface and the manufacture method of liquid crystal indicator by using droplet ejection apparatus on substrate, apply functional membrane.
Background technology
In the past, as the method for the liquid crystal orientation film that forms liquid crystal indicator, the known method that the use droplet ejection apparatus is arranged.This method uses droplet ejection apparatus to spray liquid crystal orientation film formation composition on substrate, and dry formation of said composition filmed then.Then, give the liquid crystal aligning energy, form liquid crystal orientation film to filming of formation.Described composition be with liquid crystal orientation film form with material for example polyimide or polyamic acid to be dissolved in suitable solvent formulated.
In recent years, the method for this use droplet ejection apparatus is because for example following former thereby get most of the attention.That is, in the method, can form exactly in the position of needs and have the liquid crystal orientation film that needs thickness.In addition, in the method, the liquid crystal orientation film of use forms with the amount of composition few.But in the method, the drop that is ejected into the described composition on the substrate is not expanded on substrate fully.That is, the moistening extendability of composition is poor.So, be the uneven problem of filming that can not form thickness with homogeneous and smooth surface of striped thereby there is in the established liquid crystal orientation film inequality that striated takes place in this method.
In order to address this problem, to open the spy of Japan and to disclose the method that improves the moistening extendability of drop in the 2004-290961 communique.In the method, spray drop with the ejection spacing (configuration spaces of a plurality of drop nozzles of droplet ejection apparatus) identical at substrate from droplet ejection apparatus, and use the substrate of having implemented the lyophily processing on the surface simultaneously with land diameter (diameter of the drop of ejection after land).But, can not utilize the substrate of use to guarantee moistening extendability in the method, the striped inequality takes place in established liquid crystal orientation film sometimes.
Summary of the invention
The object of the present invention is to provide a kind of by using droplet ejection apparatus on substrate, to form not have the striped inequality and having the formation method of functional membrane of functional membrane on the thickness of homogeneous and smooth surface and a manufacture method of liquid crystal indicator.
The formation method of functional membrane is provided in first mode of the present invention to achieve these goals.This method possesses: preparation has the operation of the substrate of the above surfaceness of 2.3nm; Preparation contains functional membrane and forms the operation of using composition with the functional membrane formation of material and organic solvent; Thereby use droplet ejection apparatus on substrate, to spray functional membrane and form the operation that forms functional membrane with composition.
In second mode of the present invention, provide the manufacture method of liquid crystal indicator.This method possesses: the operation that is formed with the transparency carrier of nesa coating on the surface of preparing to have the above surfaceness of 2.3nm; Preparation contains liquid crystal orientation film and forms the operation of using composition with the liquid crystal orientation film formation of material and organic solvent; Thereby use droplet ejection apparatus on transparency carrier, to spray liquid crystal orientation film and form the operation that forms liquid crystal orientation film with composition.
Other features and advantages of the present invention can with following detailed description and for feature of the present invention is described subsidiary annexed drawings set forth.
Description of drawings
Novel feature of the present invention quilt in additional claim scope is clear and definite especially.Can by with additional accompanying drawing with reference to present explanation preferred embodiment shown below, understand the present invention who has purpose and advantage.
Fig. 1 is the skeleton diagram of the ink jet type blowoff in the present embodiment.
Fig. 2 is the skeleton diagram in the cross section of expression liquid crystal indicator.
Fig. 3 is the figure of an example of the manufacturing line of expression liquid crystal indicator.
Fig. 4 is the process flow diagram of the manufacture method of expression liquid crystal indicator.
Fig. 5 is the figure of the configuration of a plurality of ink guns of expression.
Fig. 6 is the partial cross section figure of the inner structure of expression ink gun.
Fig. 7 is that the position that sprays between position and the nozzle concerns and the vertical view of the configuration pattern of drop to schematically show.
Fig. 8 be the expression liquid crystal indicator manufacture process in base board end surface figure.
Fig. 9 be the expression liquid crystal indicator manufacture process in base board end surface figure.
Figure 10 A is the figure that is used to illustrate the manufacture process of liquid crystal indicator, is that the figure of sealant observes in the side from it.
Figure 10 B is the figure that is used to illustrate the manufacture process of liquid crystal indicator, is the sectional view from its transverse observation sealant.
Figure 11 be the expression liquid crystal indicator manufacture process in base board end surface figure.
Figure 12 A is the figure of bonding process that is used for illustrating the manufacture process of liquid crystal indicator, is the end view drawing of display base plate.
Figure 12 B is the figure of curing of sealant that is used for illustrating the manufacture process of liquid crystal indicator, is the end view drawing of display base plate.
Figure 13 is the vertical view with the configuration pattern that schematically shows ejection position in first modification and the position between nozzle relation and drop.
Figure 14 is the vertical view with the configuration pattern that schematically shows ejection position in second modification and the position between nozzle relation and drop.
Figure 15 is the vertical view with the configuration pattern that schematically shows ejection position in the 3rd modification and the position between nozzle relation and drop.
Figure 16 is the vertical view with the configuration pattern that schematically shows ejection position in the 4th modification and the position between nozzle relation and drop.
Embodiment
Below the present invention is divided into the formation method of functional membrane and the manufacture method of liquid crystal indicator is elaborated.
The formation method of functional membrane
The formation method of the functional membrane among the present invention possesses: preparation has the operation of the substrate of the above surfaceness of 2.3nm; The preparatory function film forms the operation with material; Thereby use droplet ejection apparatus on substrate, to spray functional membrane and form the operation that forms functional membrane with composition.Functional membrane formation contains functional membrane with composition and forms with material and organic solvent.
The functional membrane that utilizes the method among the present invention to form is the functional film that has that forms on substrate.As functional membrane, for example can enumerate the liquid crystal orientation film that on transparency carrier, forms, outside be coated with (over coat) film, colour filter film, photoresist film, at electric conductor film that forms on the circuit substrate and the electrode film that on collector body, forms.Wherein, as functional membrane, preferably has the liquid crystal orientation film that forms on the transparency carrier of nesa coating.
Substrate
Substrate among the present invention has the surfaceness that 2.3nm is above, be preferably 2.3～4.0nm.In the present invention, surfaceness is meant center line average roughness (Ra).The surfaceness of substrate (Ra) can be used for example atomic force microscope (AMF) mensuration.Form basalis on the surface of substrate for example under the situation of nesa coating, basalis has the above surfaceness (Ra) of 2.3nm.That is, in the present invention, the surfaceness of substrate is meant the surfaceness of substrate itself when this substrate does not have basalis, is meant the surfaceness of basalis when this substrate has basalis.
Material to substrate is not particularly limited, and as this material, for example can enumerate glass, silicon, quartz, pottery, metal and plastics.Substrate can only be formed by a kind of material, also can make up two or more materials and form.As substrate, can use the substrate of individual layer, also can use the substrate of stacked multilayer, can also use to be formed with for example substrate of semiconductor film, metal film, dielectric film, organic membrane or conducting film on the surface.Wherein, under the situation that forms liquid crystal orientation film,, preferably use the transparency carrier that is formed with nesa coating on the surface as substrate.
As transparency carrier, for example can enumerate substrate that constitutes by glass and the substrate that constitutes by plastics.As glass, for example can enumerate float glass (float glass) and soda-lime glass.As plastics, for example can enumerate polyethylene terephthalate, according to mutual-phenenyl two acid bromide two alcohol ester, polyethersulfone and polycarbonate.As nesa coating, for example can enumerate by tin oxide (SnO
2) the NESA film (U.S. PPG register of company trade mark) and the indium oxide-tin oxide (In that constitute
2O
3-SnO
2) indium tin oxide ITO (the Indium Tin Oxide) film that constitutes.
The method that forms nesa coating on transparency carrier is not particularly limited,, for example can enumerates sputtering method, ion plating method and vacuum vapour deposition as this method.
In the present invention, by the substrate that use has the surfaceness (Ra) more than the 2.3nm, can improve the moistening extendability that functional membrane forms the relative substrate surface of drop of using composition.Though the functional membrane that particularly has coating adaptability utilizing droplet ejection apparatus but have the poor moistening extendability of substrate surface forms with under the situation of composition, can easily form does not have striped uneven and have the thickness of homogeneous and a functional membrane on smooth surface.
The method of surfaceness (Ra) more than 2.3nm that makes substrate is not particularly limited, can adopts known roughened method as this method.As such method, for example can enumerate on the surface of substrate and utilize medicines such as organic acid, permanganate to implement the method for roughened.In addition, forming on the transparency carrier under the situation of nesa coating, by the control membrance casting condition, can film forming be the nesa coating with the above surfaceness (Ra) of 2.3nm.As described membrance casting condition, when using sputtering method, can enumerate the temperature of for example sputter and the pressure of gas.
In the present invention, the preferred substrate that has the above surfaceness (Ra) of 2.3nm and implemented the lyophily processing on the surface that uses.Implement the lyophily processing by surface, can make functional membrane formation higher with the wettability on the surface of the relative substrate of composition at substrate.So, can easily form the functional membrane on thickness with homogeneous more and smooth surface.
The method of implementing the lyophily processing on the surface of substrate is not particularly limited, can adopts known method as this method.As such method, for example can enumerate ultraviolet treatment and plasma processing.In the front and back of lyophily processing, the surfaceness of substrate (Ra) scarcely can great changes will take place, after the lyophily processing as long as the surfaceness (Ra) of substrate surface is more than the 2.3nm.
Functional membrane forms uses composition
Functional membrane formation among the present invention contains functional membrane with composition and forms with material and organic solvent.The kind that functional membrane is formed with material is not particularly limited.Functional membrane is for example under the situation of the electric conductor film that forms on the circuit substrate, and formation can be used conductive material with material as functional membrane.Functional membrane is for example under the situation of the electric conductor film that forms on the collector body, and formation can be used electrode material with material as functional membrane.Functional membrane can use liquid crystal orientation film to form as functional membrane formation with material and use material for example under the situation of the liquid crystal orientation film that forms on the transparency carrier.Wherein, material is used in formation as functional membrane, is particularly preferred for the liquid crystal orientation film formation material that is forming liquid crystal orientation film on the transparency carrier of nesa coating being formed with.
The kind that liquid crystal orientation film is formed with material is not particularly limited, and can use known liquid crystal orientation film to form as this material and use material.Material is used in formation as liquid crystal orientation film, for example can enumerate polyamic acid, polyimide, poly amic acid ester, polyester, polyamide, polysiloxane, cellulose derivative, polyacetal, polystyrene derivative, poly-(styrene-phenyl maleimide) derivant and poly-(methyl) acrylate.
For example for can form have outstanding liquid crystal aligning can alignment films, can preferably use to have at least a polymkeric substance of from the repetitive shown in repetitive shown in the following formula (I) and the following formula (II), selecting and form as liquid crystal orientation film and use material.
(I)
In the formula, P
1The organic group of representing 4 valencys, Q
1The organic group of expression divalent.
(II)
In the formula, P
2The organic group of representing 4 valencys, Q
2The organic group of expression divalent.
As such polymkeric substance, for example can enumerate (i) have the polyamic acid of the repetitive of described formula (I) expression, (ii) have described formula (II) expression repetitive imide amination polymer and (iii) possess the amic acid organism of repetitive and have the segmented copolymer that the imide prepolymer of the repetitive of described formula (II) expression forms with described formula (I) expression.They may be used alone, can also be used in combination wherein two or more.Be used in combination under the two or more situations, the preferred mixing used polyamic acid and imide amination polymer.Mean molecular weight to polymkeric substance is not particularly limited, and is generally more than 170,000.
Functional membrane forms the kind with the organic solvent that contains in the composition, so long as can dissolve equably or solvent that the divergent function film forms the usefulness material gets final product, is not particularly limited.As organic solvent, for example can enumerate the good solvent of polyamic acid, for example proton inertia polarity solvent and phenol are solvent.
As proton inertia polarity solvent, for example can enumerate acid amides is that solvent, sulfoxide are that solvent, ether are that solvent and nitrile are solvent.As acid amides is solvent, for example can enumerate gamma-butyrolacton, N-N-methyl-2-2-pyrrolidone N-, N,N-dimethylacetamide, N, dinethylformamide, hexamethyl phosphoramide and tetramethylurea.As sulfoxide is solvent, for example can enumerate dimethyl sulfoxide (DMSO) and diethyl sulfoxide.
As phenol is solvent, for example can enumerate cresols, xylenols, phenol and halogen phenol.As cresols, for example can enumerate orthoresol, metacresol and paracresol.As xylenols, for example can enumerate o-xylene phenol, m-xylene phenol and P-xylene phenol.As halogen phenol, for example can enumerate orthomonochlorphenol, m-Chlorophenol, o-bromophenol and m-bromophenol, they may be used alone, can also be used in combination the two or more of them.
As organic solvent, also can suitably select the poor solvent of polyamic acid, with described solvent and usefulness.As the poor solvent of polyamic acid, for example can enumerate alcohol is that solvent, ketone are that solvent, ether are that solvent, ester are solvent, halo hydrocarbon system solvent, aliphatics hydrocarbon system solvent and aromatic series hydrocarbon system solvent.
As alcohol is solvent, for example can enumerate methyl alcohol, ethanol, isopropyl alcohol, cyclohexanol, 4-hydroxy-4-methyl-2-heptanone (diacetone alcohol), ethylene glycol, propylene glycol, 1,4-butylene glycol and triethylene glycol.As ketone is solvent, for example can enumerate acetone, methyl ethyl ketone, hexone and cyclohexanone.
As ether is solvent, for example can enumerate glycol monomethyl ether, diethyl ether, ethylene glycol monomethyl ether, ethylene glycol ethyl ether, ethylene glycol positive propyl ether, glycol isopropyl ether, ethylene glycol n-butyl ether (butyl cellosolve), glycol dimethyl ether, ethyl cellosolve acetate, diethylene glycol dimethyl ether, diethyl carbitol, diethylene glycol monomethyl ether, carbitol, acetate diethylene glycol monomethyl ether ester, acetate carbitol ester and tetrahydrofuran.
As ester is solvent, for example can enumerate ethyl lactate, butyl lactate, methyl acetate, ethyl acetate, butyl acetate, methyl methoxy base propionic ester, ethyl ethoxy-c acid esters, diethy-aceto oxalate and diethylmalonate.As halo hydrocarbon system solvent, for example can enumerate methylene chloride, 1,2-ethylene dichloride, 1,4-dichloroetane, trichloroethanes, chlorobenzene and o-dichlorobenzene.As aliphatics hydrocarbon system solvent, for example can enumerate n-hexyl alcohol, n-heptanol, n-octyl alcohol.As aromatic series hydrocarbon system solvent, for example can enumerate benzene, toluene and dimethylbenzene.
For the cementability on the surface of improving the relative substrate of functional membrane, except described functional membrane forms with material and the organic solvent, functional membrane forms and also can contain the functional silanes compound or contain epoxy compounds with composition.To containing the functional silanes compound and containing the kind of epoxy compounds, be not particularly limited, can use known compound as these compounds.Functional membrane forms with composition and can or disperse preferred dissolution above-mentioned functions film to form and make with material and the functional silanes compound that for example contains as required by dissolving in above-mentioned organic solvent.
In order to make said composition have the outstanding elastic property and the stability of ejection, can obtain having the thickness of homogeneous more and the functional membrane on smooth surface, the functional membrane among the present invention forms solid component concentration, viscosity and the surface tension that preferably has scope shown below with composition.
That is, functional membrane forms with the solid component concentration of composition whole relatively preferred 1～10 weight % of composition, more preferably 1～4 weight %.Under the whole relatively situations of composition less than 1 weight % of solid component concentration, the thickness of functional membrane becomes too small, can not obtain the excellent function film.Solid component concentration surpasses under the situation of 10 weight %, and the thickness of functional membrane becomes excessive, can not obtain the excellent function film, and the functional membrane formation viscosity increase of composition, and coating characteristics is poor.
The viscosity that functional membrane under 23 ℃ forms with composition is preferably 3～20mPas, more preferably 3～8mPas.By viscosity being adjusted to this scope, the mobile functional membrane that can obtain playing very well forms uses composition, utilizes the ejection of droplet ejection apparatus stable.
The surface tension that functional membrane under 23 ℃ forms with composition is preferably 30～45mN/m, more preferably 34～45mN/m.Capillary functional membrane with such scope forms with composition has outstanding wettability to substrate surface, can utilize droplet ejection apparatus to form effectively and have filming of homogeneous thickness.
In the present invention, by on substrate with the surfaceness (Ra) more than the 2.3nm, the functional membrane formation composition that has described physical parameter with the droplet ejection apparatus ejection, can easily form does not have striped uneven and have the thickness of homogeneous and the functional membrane on smooth surface, can improve yield rate significantly.
Droplet ejection apparatus
In the present invention, as the method that on substrate, forms functional membrane, can use with droplet ejection apparatus on substrate, to spray described functional membrane formation method for compositions.
The kind of the droplet ejection apparatus that uses is not particularly limited so long as the blowoff of so-called ink-jetting style gets final product.As droplet ejection apparatus, for example can enumerate utilize foamable produce bubble carry out drop ejection hot mode blowoff and utilize the compression of piezoelectric element to carry out the blowoff of the piezoelectricity mode of drop ejection.
The example of the droplet ejection apparatus among the present invention as shown in Figure 1.Fig. 1 is the skeleton diagram of the structure of ink jet type liquid ejection apparatus 3a.This droplet ejection apparatus 3a possesses the ink gun 22 that sprays ejecta 34 (functional membrane forms and uses composition) with the drop form on substrate.This ink gun 22 possesses a body 24 and nozzle plate (nozzle plate) 26.Nozzle at nozzle plate 26 forms face 27, is formed for the most nozzles with drop form ejection ejecta 34.Relative on the substrate of configured in parallel with nozzle formation face 27 relatively, ejecta 34 becomes drop and is sprayed from each nozzle.
Accommodate from the groove 30 of the ejecta 34 that forms the nozzle ejection that face 27 forms at nozzle and be connected with ink gun 22.That is, groove 30 is connected by the ejecta delivery pipe 32 of carrying ejecta 34 with ink gun 22.Ejecta delivery pipe 32 possesses: interior charged ejecta stream portion ground connection (earth) joint 32a and the showerhead bubble drain 32b of stream that is used to prevent ejecta delivery pipe 32.Use under the situation of the ejecta 34 of this showerhead bubble drain 32b in utilizing attraction cap 40 attraction ink guns 22 described later.That is, when utilizing the ejecta 34 that attracts in the cap 40 attraction shower nozzles 22, make this showerhead bubble drain 32b be in the state of closing, do not flow into ejectas 34 to ink gun 22 from groove 30.Then, if with attracting cap 40 to attract ejecta 34, the flow velocity of the ejecta 34 that then is attracted rises, and the bubble in the ink gun 22 is discharged from rapidly.
Form face 27 with nozzle and form face 27 relative configurations attraction caps 40 across certain distance and with the nozzle of ink gun 22.Attract cap 40 to attract the interior ejecta 34 of nozzle of ink gun 22.The structure of this attraction cap for moving along the Z-direction shown in the arrow among Fig. 1.Attract cap (cap) 40 can connect airtight, form a plurality of nozzles that form on the face 27 to surround nozzle, and nozzle forms formation confined space outer atmosphere of blocking and nozzle between the face 27 at nozzle formation face 27.
Do not spray at ink gun 22 under the state of ejecta 34, for example ink gun 22 is hidden to retreating position, when worktable 28 is hidden to the position shown in the with dashed lines in Fig. 1, utilizes the ejecta 34 in the nozzle that attracts cap 40 to attract ink gun 22.Attract the below of cap 40 that stream is set.The suction pump 46 that configuration suction pump 42, detection attract unusual suction pressure detecting sensor 44 and for example be made of the pipe pump in this stream.The ejecta 34 that is attracted attractions such as pump 46 and is transported in the stream is housed in the waste liquid tank 48.
Use above-mentioned droplet ejection apparatus 3a, the regulation zone on described substrate, ejection ormal weight functional membrane forms the drop with composition (ejecta 34).Then, by forming with the dried coating film of composition from the functional membrane that obtains and removing organic solvent, carry out heat treated as required, formation objective function film.
In the formation method of functional membrane in the present invention, using from the drop of droplet ejection apparatus 3a ejection is that functional membrane forms the moistening extendability outstanding substrate of drop on substrate with composition.So, do not use functional membrane to form and use composition with outstanding especially wettability, also can easily form the functional membrane on the thickness that do not have the striped inequality and have homogeneous and smooth surface, can improve yield rate significantly.
The manufacture method of liquid crystal indicator
The manufacture method of the liquid crystal indicator among the present invention possesses: the operation of preparing to be formed with on the surface transparency carrier of nesa coating; Prepare liquid crystal orientation film and form the operation of using composition; Thereby use droplet ejection apparatus on transparency carrier, to spray liquid crystal orientation film and form the operation that forms liquid crystal orientation film with composition.Liquid crystal orientation film formation contains liquid crystal orientation film with composition and forms with material and organic solvent.As described substrate, can use the transparency carrier that possesses nesa coating with the above surfaceness (Ra) of 2.3nm.In the present invention, form as described liquid crystal orientation film and use composition, preferably use solid component concentration relatively all compositions be 1～10 weight %, be that 3～20mPas and the surface tension under 23 ℃ are the liquid crystal orientation film formation composition of 30～45mN/m in the viscosity under 23 ℃.
Then, as explanation of the present invention, the situation of making liquid crystal indicator shown in Figure 2 is elaborated.Liquid crystal indicator 50 shown in Figure 2 is the semi-penetration type color liquid crystal display arrangement of passive matrix mode.In liquid crystal indicator 50, have the infrabasal plate 52a of writing board shape of rectangle and upper substrate 52b by encapsulant and dividing plate (spacer) 59 with state configuration opposite each other.Infrabasal plate 52a for example is made of glass or plastics.Form liquid crystal layer 56 in the space that sealed material between this infrabasal plate 52a and upper substrate 52b surrounds.
Between infrabasal plate 52a and liquid crystal layer 56, begin to form successively a plurality of segmentations (segment) electrode 58 and liquid crystal orientation film 60 from infrabasal plate 52a side.As shown in Figure 2, segmented electrode 58 forms band (strip) shape, utilizes for example ITO film formation of nesa coating.Liquid crystal orientation film 60 utilizes liquid crystal orientation film to form and forms with material.
Between upper substrate 52b and liquid crystal layer 56, from upper substrate 52b side, form color filter 62, film 66 outward, public (common) electrode 68 and liquid crystal orientation film 70.Color filter 62 is made of red (R), green (G), blue (B) each uvea 62r, 62g, 62b.The black matrix 64 of (border) configuration between each uvea 62r, 62g of constituting color filter 62,62b.The metal that black matrix 64 utilizes resin black for example or has a low light reflectivity constitutes.As such metal, for example can enumerate chromium (Cr).Segmented electrode 58 relative configurations on each uvea 62r, 62g of color filter 62,62b and the infrabasal plate 52a.
Film outward and 66 make the difference of height planarization between each uvea 62r, 62g, the 62b and protect each uveal surface simultaneously.Film outward and 66 utilize acryl resin, polyimide resin or inoranic membrane to form.As inoranic membrane, for example can enumerate silicon oxide film.Public electrode 68 by nesa coating for example the ITO film form.Public electrode 68 forms along the band shape of extending with the direction of segmented electrode 58 quadratures that form at infrabasal plate 52a.Liquid crystal orientation film 70 for example utilizes polyimide resin to form.
At first, the infrabasal plate 52a that preparation is made of transparency carrier on the surface that forms liquid crystal orientation film 60, utilizes sputtering method to form nesa coating (segmented electrode 58).When implementing sputter, temperature and pressure during the control sputter, the nesa coating of formation have the above surfaceness (Ra) of 2.3nm.Like this, in the present embodiment, make the infrabasal plate 52a that is formed with segmented electrode 58.
S10: substrate cleans
Then, to infrabasal plate 52a, clean the surface that is formed with liquid crystal orientation film 60.That is, be formed with infrabasal plate 52a (following also be called simply " substrate " of segmented electrode 58.) be transported to cleaning device 1 by band conveyor 10, be imported in the cleaning device 1.Then, using alkali is that washing agent or pure water clean infrabasal plate 52a, carries out set point of temperature and time for example 80～90 ℃, 5～10 minutes dried then.Implemented to clean and be transported to lyophily treating apparatus 2 by band conveyor 10 with dry infrabasal plate 52a.
S11: the lyophilyization of substrate surface
Then, implementing to clean and the lyophily processing is implemented on dry infrabasal plate 52a surface.That is, the infrabasal plate 52a that is transported to lyophily treating apparatus 2 by band conveyor 10 is imported in the lyophily treating apparatus 2, implements the lyophily processing on the surface of infrabasal plate 52a.As the lyophily treating apparatus that uses, for example can enumerate apparatus for ultraviolet light treamtent and plasma treatment appts.By implement the lyophily processing on the surface of infrabasal plate 52a, can further improve liquid crystal orientation film and form wettability with composition, on infrabasal plate 52a, form the liquid crystal orientation film 60 on thickness with homogeneous more and smooth surface.
S12: alignment films forms and applies with composition
Then, having implemented on the infrabasal plate 52a of lyophily processing the coated with liquid crystal alignment films in S11 forms and uses composition.Form as liquid crystal orientation film and use composition, uses contain liquid crystal orientation film formation with material and organic solvent, to have under 23 ℃ be the viscosity of 3～20mPas and at the 23 ℃ times capillary compositions as 30mN/m.
At first, the infrabasal plate 52a that has implemented the lyophily processing on the surface is transported to droplet ejection apparatus 3a by band conveyor 10.Then, the infrabasal plate 52a that is transferred, is input in the droplet ejection apparatus 3a in worktable 28 by mounting.In droplet ejection apparatus 3a, the liquid crystal orientation film that is accommodated in the groove 30 forms with the nozzle ejection of composition (ejecta 34) via nozzle plate 26, and liquid crystal orientation film forms and is applied to infrabasal plate 52a with composition.
Describe using the droplet ejection apparatus 3a example that the coated with liquid crystal alignment films forms with composition on infrabasal plate 52a according to Fig. 5～Fig. 7.As shown in Figure 5, droplet ejection apparatus 3a possesses a plurality of ink guns 22.A plurality of ink guns 22 are configured to staggered respectively along sub scanning direction (Y direction).This droplet ejection apparatus 3a is by being configured to meander-like along sub scanning direction with a plurality of ink guns 22, and (X-direction) run-down infrabasal plate 52a in the direction of scanning just can form to whole infrabasal plate 52a coated with liquid crystal alignment films roughly and use composition.
Nozzle at the nozzle plate 101 of each ink gun 22 forms face 101a, and 180 nozzle N that run through nozzle plate 101 along the normal direction (Z-direction) of same formation face 101a uniformly-spaced arrange along the sub scanning direction of ink gun 22.These nozzles N constitutes 1 row nozzle rows NR as nozzle sets.
A plurality of ink guns 22 that will be disposed at counter-scanning direction (reverse direction of X-direction) side are called ink gun 22L in advance, will have the nozzle N of ink gun 22L in advance and be called nozzle NL in advance as first nozzle.In addition, a plurality of ink guns 22 that will be disposed at main scanning direction (X-direction) side are called follow-up ink gun 22F, and the nozzle N that will have a follow-up ink gun 22F is called the follow-up nozzle NF as second nozzle.In Fig. 5, the part of a plurality of nozzle N is omitted in the configuration of ink gun 22 for convenience of explanation.
The width of nozzle rows NR is called nozzle rows width W 1, and the width that overlaps each other of adjacent nozzles row NR becomes overlap width W2.In addition, the ratio of the relative nozzle rows width W 1 of overlap width W2 is called " coincidence factor ".In order to alleviate the striped inequality of the liquid crystal orientation film 60 that forms on infrabasal plate 52a, this coincidence factor is preferably 5%～40%.Coincidence factor is less than under 5% the situation, may begin to form the striped inequality between liquid crystal orientation film 60 that is formed by nozzle NL in advance and the liquid crystal orientation film 60 that formed by follow-up nozzle NF.Coincidence factor is greater than under 40% the situation, and ink gun 22L becomes big with overlapping of follow-up ink gun 22F in advance, and the possibility of result has to increase the quantity of ink gun 22.
At infrabasal plate 52a when main scanning direction scans, each follow-up ink gun 22F is for the zone between the scanning pattern that compensates the adjacent ink gun 22L that respectively goes ahead of the rest, the scanning pattern of ink gun 22L in advance to adjacent only scans with the scanning pattern that is equivalent to the coincidence of coincidence factor degree.Like this, on the ejection face SF of infrabasal plate 52a, form to the zone that overlaps with the scanning pattern of follow-up ink gun 22F as the scanning pattern of ink gun 22L in advance and have overlap width W2 and to the coincidence region S of the band shape of main scanning direction extension.
In Fig. 6, each nozzle N goes up and forms the chamber (cavity) 102 that is communicated with black liquid bath 30.The described liquid crystal orientation film that black liquid bath 30 is stored in each chamber 102 derives forms with composition (hereinafter referred to as alignment films with black liquid Ik), supplies to the nozzle N of correspondence.On each chamber 102, attach can the above-below direction vibration oscillating plate 103.Oscillating plate 103 can enlarge and dwindle the volume in corresponding chamber 102.On each oscillating plate 103, set piezoelectric element PZ.When each piezoelectric element PZ is used for the drive waveforms signal of drive pressure electric device PZ in input, makes and carry out oscillating plate 103 vibrations that above-below direction shrinks and elongation is corresponding.
Each chamber 102 makes the gulf liquid level above-below direction vibration of corresponding nozzle N when oscillating plate 103 vibration of correspondence, from the nozzle N of correspondence the alignment films of the weight of corresponding drive waveforms signal is sprayed as drop D with black liquid Ik.Each drop D of ejection is along the roughly normal flight of infrabasal plate 52a, and land are in the ejection face SF of the infrabasal plate 52a relative with nozzle N.The drop D of land integrates on ejection face SF, forms liquid film LF.At liquid film LF evaporation solvent or dispersion medium under the dried of regulation of ejection face SF formation, forming the orientation of having given liquid crystal molecule can preceding liquid crystal orientation film 60.
Be called " drop in advance " from the drop D of nozzle NL ejection in advance, the liquid crystal orientation film 60 that is formed by the drop of going ahead of the rest is called " alignment films in advance ".In addition, the drop D that sprays from follow-up nozzle NF is called " subsequent droplet ", and the liquid crystal orientation film 60 that is formed by subsequent droplet is called " follow-up alignment films ".
Ejection position and the corresponding nozzle N that respectively spray position of Fig. 7 to schematically show the drop D on the ejection face of the being defined in SF.That is, Fig. 7 represents dot pattern (dot pattern).In Fig. 7, the corresponding scanning area of ink gun 22L in advance in the right side of ejection face SF, the scanning area of the corresponding follow-up ink gun 22F in left side of ejection face SF.In Fig. 7, ejection face SF by imagination by cutting apart with the dot pattern grid shown in the dot-and-dash line.The dot pattern grid is meant the grid of the ejection spacing Py regulation of extending by the ejection spacing Px that extends along main scanning direction with along sub scanning direction.In the ejection of the grid point P of each this dot pattern grid regulation drop D and do not spray.
In each grid point P, surround by having tetragonal frame (being called ejection frame F in the following description) at each grid point P of ejection position regulation.Selected to demonstrate and told same order, selected to demonstrate whiting equally to the nozzle N of the ejection action of the ejection frame F of whiting to the nozzle N of the ejection of the ejection frame F that tells order action.Selected the nozzle N of ejection action to represent, do not selected the nozzle N of ejection action to dot with solid line.Select the nozzle NL in advance of ejection action to be called and selected nozzle NLs in advance, selected the follow-up nozzle NF of ejection action to be called follow-up selection nozzle NFs.
As shown in Figure 7, the nozzle N by each grid point P selects ejection drop D stipulates the nozzle N by the top of corresponding grid point P.That is, in overlapping each grid point P of region S, the nozzle N of ejection drop D is selected as any one party of nozzle NL and follow-up nozzle NF in advance.In overlapping region S, be positioned at each grid point P by anti-main scanning direction side and be prescribed non-ejection position as drop D, other grid point P all is prescribed the ejection position as drop D.Each the grid point P that is prescribed as the ejection position is endowed order along sub scanning direction every a point, selects nozzle NLs and follow-up selection nozzle NFs by alternate selection in advance.
At this moment, because drop is different with the ejection sequential of subsequent droplet in advance, so at the difference of height (striped inequality) of the border formation thickness between alignment films and the follow-up alignment films of going ahead of the rest.Land make this striped uneven as the uneven and dispersion regularly at the fine striped of each ejection spacing Py in drop in advance that overlaps region S and subsequent droplet, depict neat vertical rib decorative pattern in whole coincidence region S.So, overlapping the liquid crystal orientation film 60 that region S forms through operation later, to observe from whole liquid crystal orientation film 60, go ahead of the rest alignment films and follow-up alignment films of the border between alignment films and the follow-up alignment films and making is continuous in advance in desalination.As a result, can alleviate the striped inequality of going ahead of the rest between alignment films and the follow-up alignment films.
S13: interim dry
Then, form the processing of carrying out interim drying with the infrabasal plate 52a of composition to being coated with liquid crystal orientation film.That is, the substrate that is transported to drying device 4 by band conveyor 10 is imported in the drying device 4, for example makes it dry temporarily under 60～200 ℃.The interim dried infrabasal plate 52a of coated composition is shifted to band conveyor 10, be transported to burning apparatus 5 by this band conveyor 10.
S14: burn till
Then, the infrabasal plate 52a that implements dry temporarily processing is burnt till processing.That is, the substrate that is transported to burning apparatus 5 by band conveyor 10 is imported in the burning apparatus 5, for example under 180～250 ℃ it is burnt till.The liquid crystal orientation film that use contains polyamic acid forms with under the situation of composition, can utilize this to burn till processing and carry out dehydration closed-loop, becomes and further carries out filming of imidizate.The thickness of filming that forms is generally 0.001～1 μ m, is preferably 0.005～0.5 μ m.
As mentioned above, as shown in Figure 8, obtain being formed with the infrabasal plate 52a of liquid crystal orientation film formation with the 60a that films of composition.The 60a that films that liquid crystal orientation film forms with composition utilizes the formation method among the present invention to form, so there is not the striped inequality in this films 60a, this 60a that films has the thickness of homogeneous and smooth surface.Infrabasal plate 52a is moved toward band conveyor 10, is transported to lapping device 6 by band conveyor 10.
S15: grind
Then, the 60a that films that the liquid crystal orientation film that forms on infrabasal plate 52a is formed with composition carries out milled processed.That is, the infrabasal plate 52a that is carried by band conveyor 10 is imported in the lapping device 6, wipes the milled processed of infrabasal plate 52a with the roller that is wound with the cloth that fibers such as for example nylon, viscose rayon, staple constitute, to certain orientation.Like this, as shown in Figure 9, the orientation energy to the 60a that films gives liquid crystal molecule forms liquid crystal orientation film 60.
In addition, omit diagram, utilize and also can utilize processing as follows to improve the field-of-view characteristics of liquid crystal display cells.That is, also can by open as the spy flat 6-222366 communique or special open shown in the flat 6-281937 communique to established liquid crystal orientation film 60 part irradiation ultraviolet radiations, pre-tilt angle is changed.In addition, can also form resist film by open the surface portion shown in the flat 5-107544 communique as the spy at the liquid crystal orientation film 60 of implementing milled processed, after the direction different with direction in the milled processed of front carried out milled processed, remove resist film, change the liquid crystal aligning energy of liquid crystal orientation film 60.
The infrabasal plate 52a that forms liquid crystal orientation film 60 is moved toward band conveyor 10, is transported to droplet ejection apparatus 3b by this band conveyor 10 and is imported in the droplet ejection apparatus 3b.
S16: encapsulant coating
Then, in droplet ejection apparatus 3b, shown in Figure 10 A and Figure 10 B, on the liquid crystal orientation film 60 of implementing milled processed, the coating sealant forms uses solution, and surrounds liquid crystal display area (liquid crystal layer forms regional Z1), forms sealant 59a.At Figure 10 A is the square from it figure that observes sealant 59a, and Figure 10 B is the figure from its transverse observation sealant 59a.
As sealant formation solution, the bonding agent as engaging infrabasal plate 52a and upper substrate 52b can use the known composition as bonding agent.Form as sealant and to use solution, for example can enumerate the drop (ionising radiation hardening resin composition) that contains ionising radiation curable resin etc. and contain the drop (hot curing resin composition) of heat-curing resin etc.From the outstanding angle of operability, preferred ionising radiation hardening resin composition.Kind as hot curing resin composition and ionising radiation hardening resin composition is not particularly limited, and as these compositions, can use known in the past composition.
Be coated with the infrabasal plate 52a that sealant forms with solution and be moved toward band conveyor 10, be transported to droplet ejection apparatus 3c by this band conveyor 10 and be imported in the droplet ejection apparatus 3c.
S17: liquid crystal material coating
In droplet ejection apparatus 3c, as shown in figure 11, form the liquid crystal material that regional Z1 coating is used to form liquid crystal layer 56 to the liquid crystal layer that forms the sealant 59a encirclement that constitutes with filming of solution by above-mentioned sealant.To liquid crystal material, be not particularly limited, can use material known as liquid crystal material.
As liquid crystal mode, can enumerate TN (twisted-nematic) type, STN (supertwist is to row) type, HAN (mixing collating sequence) (Hybrid Alignment Nematic) type, VA (homeotropic alignment) (Vertical Alignment) type, MVA (multizone homeotropic alignment) (Multiple VerticalAlignment) type, IPS (face internal conversion) (In Plane Switching) type and OCB (optical compensation curved) (Optical Compensated Bend) type.
Liquid crystal material also can contain dividing plate.Dividing plate remains the thickness (unit interval (cellgap)) of liquid crystal layer necessarily.Material as dividing plate is not particularly limited, and can use the material known in the past as the material of dividing plate.In addition, with before the coating of liquid crystalline material or after being coated with, also can be coated with the functional liquid that contain dividing plate different with liquid crystal material.
S18: fit
Then, shown in Figure 12 A, the infrabasal plate 52a that is coated with liquid crystal material is transported in the vacuum chamber 90a of laminating apparatus.Then, for after the vacuum, infrabasal plate 52a is attracted and is fixed on the low bottom-disc 80a in making cabin 90a.Then, be formed with color filter 62, black matrix 64, film 66 outward, the upper substrate 52b of public electrode 68 and liquid crystal orientation film 70 (omitting their diagram) is attracted and is fixed on the top bottom-disc 80b, makes infrabasal plate 52a and upper substrate 52b applying.
Surface at the public electrode 68 that is formed with upper substrate 52b also forms liquid crystal orientation film 70.Liquid crystal orientation film 70 is used with the same method of above-mentioned infrabasal plate 52a in the formation of this upper substrate 52b and is carried out.That is, when upper substrate 52b formed public electrode 68, with above-mentioned same, public electrode 68 had the above surfaceness (Ra) of 2.3nm.Then, after making is formed with the upper substrate 52b of public electrode 68, clean and drying.
Then, implementing to clean and the lyophily processing is implemented on the surface of the public electrode 68 that dry upper substrate 52b forms.Like this, can further improve liquid crystal orientation film and form wettability, on upper substrate 52b, form the liquid crystal orientation film 70 on thickness with homogeneous more and smooth surface with composition.Then, the coated with liquid crystal alignment films forms and uses composition on the upper substrate 52b that has implemented the lyophily processing.As liquid crystal orientation film formation composition, liquid crystal orientation film forms uses composition, with similarly above-mentioned, contain liquid crystal orientation film and form solid component concentration, have under 23 ℃ and be the viscosity of 3～20mPas and be the surface tension of 30mN/m down at 23 ℃ with material and organic solvent, 1～10 weight %.
Then, use the droplet ejection apparatus 3a that possesses a plurality of ink guns 22 to form alignment films 70.At this moment, at configuration pattern arrangement drop D shown in Figure 7, dispersion is regularly depicted neat vertical rib decorative pattern in whole coincidence region S as fine striped is uneven.Then, upper substrate 52b has carried out burning till after the interim drying.At last, implement milled processed at upper substrate 52b, forming does not have striped uneven and have the thickness of homogeneous and a liquid crystal orientation film 70 on smooth surface.
S19: solidify
Then, the fit curing of sandwich of infrabasal plate 52a and upper substrate 52b is handled.Solidifying to handle uses solidification equipment to carry out.As solidification equipment, for example can enumerate ionizing radiation exposure device or heating arrangement, but use ultraviolet lamp 82 in the present embodiment.That is, shown in Figure 12 B, utilize ultraviolet lamp 82 irradiation ultraviolet radiations, sealant 59a is solidified.Then, make the pressure in the 90a of cabin return to atmospheric pressure, infrabasal plate 52a and upper substrate 52b are decontroled from adsorbed state.
Then, at the outside surface of liquid crystal cells promptly on the surface that the foreign side of each substrate that constitutes liquid crystal cells exposes, the applying polaroid.At this moment, make the consistent or polaroid of fitting orthogonally of grinding direction of the liquid crystal orientation film that forms on the one side of its direction of polarized light and this substrate.At this, as the polaroid of fitting at the outside surface of liquid crystal cells, can enumerate make polyvinyl alcohol (PVA) stretch orientation limit absorption iodine by the limit the polarization film that is called as the H film by the polaroid of cellulose acetate diaphragm clamping, and the polaroid that constitutes by the H film itself.
As mentioned above, can make liquid crystal indicator shown in Figure 2 50.The liquid crystal indicator that obtains possesses does not have striped uneven and have the thickness of homogeneous and the liquid crystal orientation film on smooth surface, is high-quality and liquid crystal indicator cheaply.So the manufacture method that the present invention vibrates liquid crystal indicator can improve yield rate significantly, can make high-quality liquid crystal indicator effectively.In addition, the border by each liquid crystal orientation film that forms at different sequential (timing) ejection drop is disperseed, can form liquid crystal orientation film integral body continuously.So, can more easily form the high-quality liquid crystal orientation film on thickness with homogeneous and smooth surface.
In the present embodiment, in S15, utilize the method for milled processed to form liquid crystal orientation film 60,70.But also can utilize and open the method that the disclosed utilization of 2004-163646 communique irradiation has been polarized the radioactive ray of light as the spy and give the liquid crystal aligning energy.
In the present embodiment, in S17, form liquid crystal layer by using droplet ejection apparatus 3c coated with liquid crystal material.But liquid crystal layer also can as described belowly form.That is, make two substrates that have been formed with liquid crystal orientation film, two substrates dispose under the state opposite each other by gap (unit interval), make grinding direction quadrature in each liquid crystal orientation film or antiparallel.Then, the periphery with two substrates of encapsulant applying injects and filling liquid crystal in the unit interval that utilizes substrate surface and encapsulant to draw, and the sealing filling orifice forms liquid crystal layer.
The present invention will be described in more detail below to utilize embodiment.But the present invention is not limited by following examples fully.
Liquid crystal orientation film forms the preparation with composition A
With gamma-butyrolacton: the N-N-methyl-2-2-pyrrolidone N-: the ratio of butyl cellosolve=90: 5: 5 (weight %) is mixed gamma-butyrolacton, N-N-methyl-2-2-pyrrolidone N-and butyl cellosolve, obtains mixed solvent.Dissolve polyimide in this solvent, the preparation liquid crystal orientation film forms uses composition A.The solid component concentration that liquid crystal orientation film forms with composition A is 2 weight %, and the viscosity under 23 ℃ is 4.0mPas, and the surface tension under 23 ℃ is 41mN/m.
Liquid crystal orientation film forms the preparation with composition B
With gamma-butyrolacton: the N-N-methyl-2-2-pyrrolidone N-: the ratio of butyl cellosolve=33.3: 33.3: 33.3 (weight %) is mixed gamma-butyrolacton, N-N-methyl-2-2-pyrrolidone N-and butyl cellosolve, obtains mixed solvent.Dissolve polyimide in this solvent, the preparation liquid crystal orientation film forms uses composition B.The solid component concentration that liquid crystal orientation film forms with composition B is 3 weight %, and the viscosity under 23 ℃ is 8.2mPas, and the surface tension under 23 ℃ is 38mN/m.
Use droplet ejection apparatus, the liquid crystal orientation film that obtains in the surface applied of the ito substrate with surfaceness shown in the following table 1 (Ra) forms with composition A or B, and makes dry film thickness become 60nm, forms the liquid crystal orientation film before the milled processed.
Form with under the situation of composition at ito substrate surface applied liquid crystal orientation film, whether can carry out the coating of thickness homogeneous with visualization.The results are shown in Table 1.In " homogeneous screening characteristics " hurdle of table 1, " 1 " expression can be carried out the coating of thickness homogeneous, and " 2 " expression can be carried out the roughly coating of homogeneous of thickness, and " 3 " expression can not be carried out the coating of thickness homogeneous.In addition, the liquid crystal orientation film that obtains with visualization.The result is as shown in table 1.In the hurdle of " the having or not of striped inequality " of table 1, the striped inequality is not observed in " 1 " expression, and the striped inequality has been observed in " 3 " expression.
Table 1
| Surfaceness (Ra:nm) | Composition | The homogeneous screening characteristics | Having or not of | |
| Embodiment | ||||
| 1 | 2.3 | A | 1 | 1 |
| Embodiment 2 | 2.9 | A | 1 | 1 |
| Embodiment 3 | 2.3 | B | 2 | 1 |
| Comparative example 1 | 1.4 | A | 3 | 3 |
| Comparative example 2 | 1.6 | A | 3 | 3 |
As known from Table 1, in embodiment 1～3, the coating that liquid crystal orientation film forms the homogeneous of using composition can be carried out, in established liquid crystal orientation film, the striped inequality can not be observed.Be that 1～10 weight %, viscosity are that 3～20mPas and surface tension are that the homogeneity of filming is outstanding in the comparative example 1,2 of liquid crystal orientation film formation with composition A of 30～45nN/m particularly using the whole relatively compositions of solid component concentration.On the other hand, be in the comparative example 1,2 less than the ito substrate of 2.3nm using surfaceness (Ra), formation liquid crystal orientation film that can not homogeneous forms uses composition, visual striation inequality in the liquid crystal orientation film of formation.
Above-mentioned embodiment also can change as described below.
In the above-described embodiment, utilize the configuration pattern of drop D as shown in Figure 7, striped in the coincidence region S is uneven depicts neat vertical rib decorative pattern as the uneven and dispersion regularly at the fine striped of each ejection spacing Py in whole coincidence region S, alleviates the striped inequality.
The configuration pattern of drop D also can change as illustrated in fig. 13.As shown in figure 13, in the left side that overlaps region S, alternately have along main scanning direction along sub scanning direction as each grid point P of ejection position regulation and to give a plurality of grid point P of order and to give a plurality of grid point P of order (gradation) along main scanning direction every a grid point.In addition, on the right side that overlaps region S, alternately have along a plurality of grid point P of main scanning direction whiting and give a plurality of grid point P of order along main scanning direction every a grid point along sub scanning direction as each grid point P of ejection position regulation.Then, optionally spray drop and subsequent droplet in advance, describe the in advance piece grid (tartan that different colours alternate) of drop of the subsequent droplet end of as described the piece grid (tartan that different colours alternate) of drop as the subsequent droplet at the end of going ahead of the rest on the right side that overlaps region S in the left side that overlaps region S.
Utilize such structure, can describe with the drop of going ahead of the rest continuously from the alignment films of going ahead of the rest be the piece grid of the subsequent droplet at the end, and can describe continuously with the drop of going ahead of the rest from follow-up alignment films is the piece grid of drop in advance at the end.Then, can be in the substantial middle of the sub scanning direction that overlaps region S, connect with drop in advance be the end subsequent droplet the piece grid and be the piece grid of drop in advance at the end with the subsequent droplet.Thereby, can utilize along the uneven border that forms go ahead of the rest alignment films and follow-up alignment films of the small striped of main scanning direction and sub scanning direction.
The configuration pattern of drop D also can change as illustrated in fig. 14.As Figure 14,, be prescribed position as follow-up nozzle NF along the continuous a plurality of grid point P of sub scanning direction in the left side that overlaps region S.In addition, on the right side that overlaps region S, be prescribed the conduct position of nozzle NL in advance at the continuous a plurality of grid point P of anti-sub scanning direction.In each the grid point P that stipulates as the ejection position of follow-up nozzle NF, be positioned at the grid point P that leans on the sub scanning direction side most and spray the size of spacing Px, describe to the continuous jagged track of main scanning direction along a sub scanning direction displacement ejection spacing Py by each.Then, optionally spray drop and subsequent droplet in advance, the subsequent droplet that is ejected in the left side that overlaps region S is depicted as along the continuous zigzag of main scanning direction with the border between the drop in advance that is ejected in the right side that overlaps region S.
Utilize such structure, can utilize direction that the jagged small striped inequality of extending along main scanning direction promptly intersects with main scanning direction and the small striped inequality of intersecting, the go ahead of the rest border of alignment films and follow-up alignment films of formation with sub scanning direction.As a result, can further form the border of go ahead of the rest alignment films and follow-up alignment films continuously.
The configuration pattern of drop D also can change as illustrated in fig. 15.As shown in figure 15, the subsequent droplet that is ejected into the left side that overlaps region S can constitute along the continuous zigzag of main scanning direction with the border between the drop in advance that is ejected into the right side that overlaps region S, and then also can be made of along the broach that sub scanning direction extends each sawtooth.That is, in advance drop and follow-up between the border also can be by being endowed broach order, that extend along sub scanning direction and forming with the broach of the whiting of described broach engagement.
Utilize this structure, the formation direction of the fine striped inequality in overlapping region S is dispersed in a plurality of directions that comprise sub scanning direction.Thereby, utilize overlapping the alignment films that region S forms, can make the border of going ahead of the rest between alignment films and the follow-up alignment films more continuous.
The configuration pattern of drop D also can change as illustrated in fig. 16.As shown in figure 16, each broach among Figure 15 also can be cut apart by vertical rib decorative pattern shown in Figure 13.Utilize this structure, the formation direction of the striped inequality in overlapping region S is dispersed in a plurality of directions that comprise main scanning direction and sub scanning direction.Thereby, utilize overlapping the alignment films that region S forms, can eliminate the striped inequality of go ahead of the rest alignment films and follow-up alignment films more reliably.
(2) in the above-described embodiment, along sub scanning direction, select nozzle NLs every a nozzle selection in advance.Be not limited thereto, for example also can select to select nozzle NLs at the nozzle NL in advance of per 2 extensions in advance along sub scanning direction.In addition, also can ground selection non-periodic select nozzle NLs in advance.
(3) in Figure 10, along main scanning direction, select nozzle NLs and follow-up selection nozzle NFs alternately to be selected at each grid point P in advance, form the configuration pattern of piece grid (tartan that different colours is alternate).Be not limited thereto, for example also can non-periodic ground and alternately select in advance to select nozzle NLs and follow-up selection nozzle NFs.
The invention is not restricted to above-mentioned embodiment, can in the scope of the scope that does not break away from claim, carry out various changes.Each structure of above-mentioned embodiment can omit wherein a part or with above-mentioned differently combination in any.At this, only put down in writing a plurality of embodiments, in the scope that does not break away from its purport, the present invention also can be specialized in other distinctive modes but industry practitioner should be understood that.The present invention is not limited by the content in this record, can be modified within the scope of the appended claims.
Claims (16)
1. the formation method of a functional membrane, it comprises:
Preparation has the operation of the substrate of the above surfaceness of 2.3nm;
Preparation contains functional membrane and forms the operation of using composition with the functional membrane formation of material and organic solvent;
Use droplet ejection apparatus on substrate, to spray functional membrane formation composition, thereby form the operation of functional membrane.
2. method according to claim 1, wherein,
It is 1～10 weight % that described functional membrane forms with the whole relatively compositions of the solid component concentration of composition, and the viscosity that functional membrane forms with composition is 3～20mPas, and the surface tension that functional membrane forms with composition is 30～45nN/m.
3. method according to claim 1 and 2, wherein,
Implemented the lyophily processing on the surface of described substrate.
4. the formation method of functional membrane according to claim 1 and 2, wherein,
Described substrate is a transparency carrier, is formed with nesa coating on the surface of transparency carrier, has implemented the lyophily processing on the surface of nesa coating.
5. the formation method of functional membrane according to claim 1 and 2, wherein,
Described functional membrane is a liquid crystal orientation film.
6. the manufacture method of a liquid crystal indicator, it comprises:
Preparation has the operation above surfaceness of 2.3nm, be formed with the transparency carrier of nesa coating on the surface;
Preparation contains liquid crystal orientation film and forms the operation of using composition with the liquid crystal orientation film formation of material and organic solvent;
Use droplet ejection apparatus on transparency carrier, to spray liquid crystal orientation film formation composition, thereby form the operation of liquid crystal orientation film.
7. method according to claim 6, wherein,
It is 1～10 weight % that described liquid crystal orientation film forms with the whole relatively compositions of the solid component concentration of composition, and the viscosity that liquid crystal orientation film forms with composition is 3～20mPas, and the surface tension that liquid crystal orientation film forms with composition is 30～45mN/m.
8. method according to claim 6, wherein,
Implemented the lyophily processing on the surface of described transparency carrier.
9. method according to claim 6, wherein,
Described droplet ejection apparatus possesses: first nozzle sets, and it is made of a plurality of first nozzles of arranging along sub scanning direction; Second nozzle sets, it is made of a plurality of second nozzles of arranging along described sub scanning direction, and first nozzle sets and second nozzle sets are configured to as follows, that is: the part of first nozzle sets overlaps with the part of second nozzle sets under the situation of observing from main scanning direction
The operation that forms described liquid crystal orientation film comprises operation as described below, that is: described relatively first nozzle sets of described transparency carrier and described second nozzle sets relatively move along described main scanning direction, from selecteed a plurality of described first nozzles and selecteed a plurality of described second nozzle ejection drop, on described transparency carrier, form described liquid crystal orientation film, in this operation, by a plurality of first nozzles ejection drops the zone that is selected from described first nozzle sets that under the situation that described main scanning direction is observed, overlaps, and select under the situation of described main scanning direction observation a plurality of second nozzles between described selecteed a plurality of first nozzles and from wherein spraying drop with described second nozzle sets.
10. method according to claim 9, wherein,
Select a plurality of first nozzles the zone of described first nozzle sets that under the situation of observing, overlaps in accordance with regulations at interval with described second nozzle sets from described main scanning direction, and from described a plurality of first nozzles ejection drops, and a plurality of second nozzles between described selecteed a plurality of first nozzles and from wherein spraying drop under the situation of selecting to observe from described main scanning direction.
11. method according to claim 9, wherein,
At least one pair of described first nozzle that overlaps under the situation that alternate selection is observed from described main scanning direction and described second nozzle and spray drop.
12. according to any described method in the claim 9～11, wherein,
Be selected from described in the zone of described first nozzle sets that under the situation that described main scanning direction is observed, overlaps a plurality of first nozzles the cycle displacement of position to stipulate by described sub scanning direction side with described second nozzle sets.
13. method according to claim 6, wherein,
Described droplet ejection apparatus possesses: first nozzle sets, and it is made of a plurality of first nozzles of arranging along sub scanning direction; Second nozzle sets, it is made of a plurality of second nozzles of arranging along described sub scanning direction, and first nozzle sets and second nozzle sets are configured to as follows, that is: the part of first nozzle sets overlaps with the part of second nozzle sets under the situation of observing from main scanning direction
The operation that forms described liquid crystal orientation film possesses operation as described below, that is: described relatively first nozzle sets of described transparency carrier and described second nozzle sets relatively move along described main scanning direction, from selecteed a plurality of described first nozzles and selecteed a plurality of described second nozzle ejection drop, on described transparency carrier, form described liquid crystal orientation film, in this operation, at least one pair of described first nozzle that overlaps under the situation that alternate selection is observed from described main scanning direction and described second nozzle and spray drop.
14. method according to claim 13, wherein,
At least one pair of described first nozzle that overlaps under the situation of observing from described main scanning direction with the cycle alternate selection of regulation and described second nozzle and spray drop.
15. method according to claim 13, wherein,
The zone of described first nozzle sets that under the situation of observing, overlaps with the cycle alternate selection of regulation with described second nozzle sets from described main scanning direction along described sub scanning direction continuous a plurality of described first nozzle and the zone of described second nozzle sets that under the situation of described main scanning direction observation, overlaps, spray drop along continuous a plurality of second nozzles of described sub scanning direction with described first nozzle sets.
16. according to any described method in the claim 13～15, wherein,
Be selected from described a plurality of first nozzles the zone of described first nozzle sets that under the situation that described main scanning direction is observed, overlaps the cycle displacement of position to stipulate by described sub scanning direction side with described second nozzle sets.
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| CN109445193A (en) * | 2018-02-13 | 2019-03-08 | 京东方科技集团股份有限公司 | A kind of display panel of horizontal electric field type, its production method and display device |
| US11126042B2 (en) | 2018-02-13 | 2021-09-21 | Beijing Boe Display Technology Co., Ltd. | Horizontal electric field type display panel, method of manufacturing the same, and display device |
| CN109976017A (en) * | 2019-04-10 | 2019-07-05 | 深圳市华星光电半导体显示技术有限公司 | Display panel and preparation method thereof |
| CN109976017B (en) * | 2019-04-10 | 2021-09-24 | 深圳市华星光电半导体显示技术有限公司 | Display panel and manufacturing method thereof |
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