CN101105632A - Coating device and color filter production method - Google Patents
Coating device and color filter production method Download PDFInfo
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- CN101105632A CN101105632A CNA2006100616080A CN200610061608A CN101105632A CN 101105632 A CN101105632 A CN 101105632A CN A2006100616080 A CNA2006100616080 A CN A2006100616080A CN 200610061608 A CN200610061608 A CN 200610061608A CN 101105632 A CN101105632 A CN 101105632A
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Abstract
The invention relates to a coating device which comprises a loading machine platform and a nozzle device; wherein the loading machine platform is used to load a base which is to be coated; the nozzle device is corresponding to the loading machine platform; the nozzle device comprises three arrays of ejection mouths corresponding to the loading machine platform; the three arrays of the ejection mouths are respectively corresponding to coloration units in different colors of a color light filtering plate which is to be manufactured; the projections of the three arrays of the ejection mouths on the lengthwise of the nozzle device is arrayed in interval and in turn. The coating device in the invention can simplify manufacturing steps and improve efficiency. The invention also provides the manufacturing method of the color light filtering plate of the coating device.
Description
Technical field
The invention relates to a kind of apparatus for coating that is used to make colored filter, also about a kind of method for manufacturing colored filtering substrate that adopts this apparatus for coating.
Background technology
Liquid crystal indicator is a kind of passive type display device, for reaching the colored effect that shows, need provide a colored filter (Color Filter for it, CF), its effect is that the white light that will pass through is converted into red (R), green (G), blue (B) three primary colors light beam, and (ThinFilm Transistor, TFT) layer and other elements such as liquid crystal therebetween are to reach the effect that shows the different color image to cooperate thin film transistor (TFT).
Seeing also Fig. 1, is a kind of synoptic diagram of colored filter of prior art.This colored filter 1 comprises: a substrate of glass 10, one the black matrix 11 on this substrate of glass 10, between black matrix 11 dyed layer 12, be arranged on the protective clear layer 13 on dyed layer 12 surfaces and be arranged on the transparency conducting layer 14 on protective clear layer 13 surfaces.This dyed layer 12 is made up of three kinds of coloring units of RGB, and its material is pigment (pigment) or dyestuff (dye).
Recurring rule arrange these three kinds of coloring units on this substrate of glass 10 to see through the RGB primaries respectively, stop the light transmission of other wavelength.Should be arranged between this three coloring units by black matrix 11, its effect is that blocking sees through the light between three coloring units, prevents leakage of light and stops painted material to be mixed.Protective clear layer 13 is for making the colored filter flattening surface be provided with.Transparency conducting layer 14 then cooperates the light of these dyed layer 12 each coloring units of control what to see through to show different colors with a TFT array (figure does not show).
Seeing also Fig. 2, is the process flow diagram of the manufacture method of colored filter 1 shown in Figure 1, mainly may further comprise the steps: a substrate of glass 10 (step S1) is provided; Form black matrix 11 on this substrate of glass 10 (step S2); Be coated with the first color of light resistance layer on this substrate of glass 10 (step S3); The first color of light resistance layer exposure imaging is formed the first color dyes layer (step S4); Be coated with the second color of light resistance layer on this substrate of glass 10 (step S5); The second color of light resistance layer exposure imaging is formed the second color dyes layer (step S6); Be coated with the 3rd color of light resistance layer on this substrate of glass 10 (step S7); The 3rd color of light resistance layer exposure imaging is formed the 3rd color dyes layer (step S8); Form protective clear layer 13 on these dyed layer 12 surfaces (step S9); Form transparency conducting layer 14 on these protective clear layer 13 surfaces (step S10).
Seeing also Fig. 3, is the synoptic diagram of the apparatus for coating that adopts in the photoresistance application step among Fig. 2.This photoresistance apparatus for coating 20 comprises a carrying board 21 and a nozzle (Nozzle) 22.This carrying board 21 can move with respect to this nozzle 22, and it comprises a loading end 211, and this loading end 211 is used to carry this substrate of glass 10.See also Fig. 4 again, this nozzle 22 comprises that a photoresistance liquid containing cavity (figure does not show) and is positioned at the photoresistance liquid injection orifice 222 of this photoresistance liquid containing cavity one end.This photoresistance liquid injection orifice 222 is a long and narrow opening.This nozzle 22 is provided with respect to this loading end 211, and this photoresistance liquid injection orifice 222 is towards this loading end 211.During the coating photoresistance, this substrate of glass that is formed with black matrix is placed on this carrying board 21, photoresistance liquid penetrates from this photoresistance liquid injection orifice 222, and this carrying board 21 moves with respect to this nozzle 22, thereby photoresistance liquid evenly is applied on this substrate of glass that is formed with black matrix.
But this colored filter manufacturing must repeat to be coated with photoresistance, exposure imaging each three times, and manufacturing step is many, efficient is low.And should make needs three groups of boards, and cost is higher.
Summary of the invention
For solving the above-mentioned apparatus for coating cost problem of higher that colored filter is made that is used for, be necessary to provide a kind of apparatus for coating that is used for the colored filter manufacturing that can reduce cost.
Also be necessary to provide the method for manufacturing colored filtering substrate that adopts this apparatus for coating.
A kind of apparatus for coating, it comprises a carrying board and a spray nozzle device, this carrying board is used to carry substrate to be coated, this spray nozzle device is corresponding to this carrying board setting, this spray nozzle device comprises and three relative row injection orifices of carrying board, the coloring units of the different colours of the colored filter that this three row injection orifice is made with desire respectively is corresponding, and this three row injection orifice projection on this spray nozzle device length direction is spaced in regular turn.
Use a kind of manufacturing method of color filters of above-mentioned apparatus for coating, its step comprises: a substrate is provided; Form a black matrix in this substrate; This substrate that is formed with black matrix is placed on the carrying board, this carrying board top is to distinguishing the photoresistance liquid of three kinds of different colours of splendid attire in should a spray nozzle device of substrate, and respectively described three kinds of color of light blocking solutions are sprayed by three row injection orifices of spray nozzle device and to be coated in this substrate that is formed with black matrix, to form dyed layer by three kinds of different colours.
Compared with prior art, because this spray nozzle device of using in apparatus for coating of the present invention and the method for manufacturing colored filtering substrate comprises and three relative row injection orifices of carrying board, and the coloring units of the different colours of the colored filter that this three row injection orifice is made with desire respectively is corresponding, this three row injection orifice projection on the length direction of this spray nozzle device is spaced in regular turn, therefore with the photoresistance liquid splendid attire of different colours in spray nozzle device and eject by this three row injection orifice respectively and get final product, so can once form the dyed layer of three kinds of colors spaced apart by this apparatus for coating, need not repeat coating, repeated exposure is developed.Therefore can simplify manufacturing step, raise the efficiency, and should manufacturing only need one group of board, can reduce manufacturing cost.
Description of drawings
Fig. 1 is the synoptic diagram of the colored filter of prior art.
Fig. 2 is the process flow diagram of method for manufacturing colored filtering substrate shown in Figure 1.
Fig. 3 is the synoptic diagram of the apparatus for coating that adopts in the photoresistance application step among Fig. 2.
Fig. 4 is the synoptic diagram at another visual angle of nozzle in the apparatus for coating shown in Figure 3.
Fig. 5 is the synoptic diagram of apparatus for coating first embodiment of the present invention.
Fig. 6 is the enlarged diagram at another visual angle of the nozzle of apparatus for coating shown in Figure 5.
Fig. 7 is the synoptic diagram of colored filter of the present invention.
Fig. 8 is the manufacturing flow chart of colored filter of the present invention.
Fig. 9 is the synoptic diagram of the nozzle of apparatus for coating second embodiment of the present invention.
Figure 10 is the synoptic diagram at another visual angle of nozzle shown in Figure 9.
Figure 11 is the action synoptic diagram of nozzle shown in Figure 10.
Embodiment
Seeing also Fig. 5, is the synoptic diagram of apparatus for coating first embodiment of the present invention.This apparatus for coating 40 comprises a spray nozzle device 48, a carrying board 44 and two supports 45.This two support 45 is separately positioned on the both sides of this carrying board 44, and this spray nozzle device 48 is arranged on this carrying board 44 tops, and is supported by this two support 45, and these carrying board 44 relative these two supports 45 and spray nozzle device 48 are removable.
This carrying board 44 comprises a loading end 441, and this loading end 441 is used to carry colored filter 3, and this loading end 441 can move horizontally with respect to this spray nozzle device 48, and the spacing between this spray nozzle device 48 and the loading end 441 remains unchanged in the moving process.
Seeing also Fig. 6, is the enlarged diagram at another visual angle of this spray nozzle device 48.This spray nozzle device 48 comprises and being parallel to each other and first nozzle 41, second nozzle 42 and the 3rd nozzle 43 of the strip of adjacent setting.This first, second and third nozzle 41,42,43 comprises a containing cavity (figure does not show) and the spraying face 411,421 and 431 that links to each other with this containing cavity respectively, this spraying face 411,421 and 431 with this carrying board 44 loading end 441 relative and parallel, this spraying face 411,421 and 431 comprises tool one determining deviation and equally distributed a plurality of first, second and third injection orifice 412,422 and 432 respectively.
These a plurality of first, second, third injection orifices 412,422,432 are the identical rectangular opening of size.This is parallel to each other and the projection of this first, second, third injection orifice 412,422,432 on these spray nozzle device 48 length directions of first nozzle 41, second nozzle 42 and the 3rd nozzle 43 of adjacent setting is spaced in regular turn, and promptly the center line of the projection of this first, second, third injection orifice 412,422,432 on these spray nozzle device 48 length directions is mutually all at least every the width of an injection orifice.
This first, second, third nozzle 41,42 and 43 containing cavity are equipped with the photoresistance liquid of different colours respectively.The width of the coloring units of the colored filter that the width of the photoresistance liquid that is penetrated by this first, second, third injection orifice 412,422,432 and desire are made is corresponding, and the coloring units of three kinds of different colours of red, green, blue of the colored filter of these first, second, third injection orifice, 412,422,432 respectively corresponding desires manufacturings.
This is first years old, second and third nozzle 41,42, on 43 the length direction this first, second, the 3rd injection orifice 412,422, spacing scalable between 432, to be applicable to the colored filter 3 of making different size, this regulative mode can have multiple, as adjust this first, second, the 3rd nozzle 41,42 and 43 fixed positions and adjust this first, second, the 3rd injection orifice 412,422, spacing between 432, or change first nozzle 41, the spraying face 411 of second nozzle 42 and the 3rd nozzle 43,421 and 431 and realize to adjust this first, second, the 3rd injection orifice 412,422, spacing between 432 size reaches, or the nozzle 41 of replacing different size, 42 and 43 or the like.
In the manufacturing of colored filter 3, the process that forms coloring units can adopt form above-mentioned one step of apparatus for coating.
Seeing also Fig. 7, is the synoptic diagram of colored filter 3 of the present invention.This colored filter 3 comprises: a substrate 30, one the black matrix 31 in this substrate 30, between black matrix 31 dyed layer 32, be arranged on the protective clear layer 33 on dyed layer 32 surfaces and be arranged on the transparency conducting layer 34 on protective clear layer 33 surfaces.Wherein, this dyed layer 32 is made up of red, blue, green three kinds of coloring units, and these red, blue, green three kinds of coloring units are spaced apart.
Seeing also Fig. 8, is to adopt above-mentioned apparatus for coating 40 to make the process flow diagram of colored filter 3, and this manufacture method step is as follows:
(S21) provide a substrate 30;
This substrate 30 is as the carrier of other element, and it is a glass often, and is lower glass of basic ion concentration or alkali-free glass.
(S22) form black matrix 31;
Clean this substrate 30, mode known to the employing industry, the uniform black resin layer of coating thickness in this substrate 30 as method of spin coating (spin coating) or non-rotating rubbing method (spinless coating), dry this black resin layer of low pressure is to remove partly solvent, and is soft roasting further to remove residual solvent.
Utilize light shield to this black resin layer exposure.The normal ultraviolet light that adopts of exposure.This black resin is a photosensitive resin, after UV-irradiation, change original chemical property, at negative-type photosensitive resin, make irradiation area and the non-irradiation area rate of dissolution in developer solution produce dramatic difference, developer solution will be reached the development purpose by easy the to be molten zone dissolving of UV-irradiation, form black matrix 31 in substrate 30.Remaining developer solution and cleaning fluid are removed in hard roasting this substrate in back of developing.Should also can adopt the CrOx/Cr film to form by black matrix 31, and covered an eurymeric resistance material layer on this CrOx/Cr film, after UV-irradiation, developer solution will afterwards again through the etching manufacturing, form black matrix 31 not by easy the to be molten zone dissolving of UV-irradiation.
(S23) once coating forms dyed layer 32;
The substrate that will be formed with black matrix 31 is arranged on the carrying board 44 of this apparatus for coating 40, these carrying board 44 these substrates of carrying are with respect to this nozzle 41,42 and 43 move, this nozzle 41,42 and 43 eject respectively red, green, the photoresistance of blue three-color is coated in this substrate that is formed with black matrix 31, because this is first years old, second, the 3rd nozzle 41,42 and 43 containing cavity is equipped with the photoresistance liquid of different colours respectively, this is first years old, second, the 3rd injection orifice 412,422, the width of the 432 photoresistance liquid that penetrate is corresponding with the width of the coloring units of desire manufacturing colored filter, thus can by this photoresistance apparatus for coating 40 once form spaced apart have red, green, blue three kinds of color vertical bar formulas (Strip) dyed layer 32.
Above-mentioned is vertical bar formula dyed layer 32, if the dyed layer 32 that will form island (Island) form is also on above-mentioned coating is made, further exposure imaging gets final product again.
(S24) form protective clear layer 33;
Have at this and to form this protective clear layer 33 on dyed layer 32 of three kinds of colors of red, green, blue.
(S25) form transparency conducting layer 34;
On this protective clear layer 33, form transparency conducting layer 34, the material of this transparency conducting layer 34 be generally tin indium oxide (Indium Tin Oxide, ITO) or indium zinc oxide (IndiumZinc Oxide, IZO).Adopt sputtering method, in vacuum cavity, apply electric field, make argon (Argon, Ar) gas produces arc discharge, argon ion (Ar+) will obtain kinetic energy and impact tin indium oxide or indium zinc oxide target material surface on the minus plate that produces electric field in electric field, make tin indium oxide or indium zinc oxide be sputtered to substrate surface and pile up film forming, and install magnetic pole additional and be parallel to the number of times that cathode surface makes argon ion collide cathode targets by the magnetic line of force and greatly increase, even also can under low temperature environment, plate tin indium oxide or indium zinc oxide film under the low discharge gaseous tension.So far, form this colored filter 3.
Compared with prior art, because apparatus for coating 40 of the present invention and being used for is made colored filter 3 manufacture methods and has been used and be parallel to each other and first nozzle 41 of adjacent setting, second nozzle 42 and the 3rd nozzle 43, this is first years old, second and third nozzle 41, be respectively arranged with tool one determining deviation and equally distributed a plurality of first on the relative spraying face 411 of loading end 42 and 43 and this carrying board 44 441, second and third injection orifice 412,422,432, and this is first years old, second, the 3rd injection orifice 412,422,432 projections on these spray nozzle device 48 length directions are spaced in regular turn, also because of this first, second, the 3rd photoresistance liquid containing cavity is equipped with the photoresistance liquid of different colours respectively, this is first years old, second, the 3rd photoresistance liquid injection orifice 412,422, the width of the 432 photoresistance liquid that penetrate is corresponding with the width of the coloring units of the colored filter of desire manufacturing, so can by this photoresistance apparatus for coating 40 once form spaced apart have red, green, the dyed layer 32 of blue three-color promptly need not repeat coating, repeated exposure is developed.Therefore, can simplify manufacturing step, raise the efficiency, and should manufacturing only need one group of board, can reduce manufacturing cost.
See also Fig. 9, it is the synoptic diagram of the spray nozzle device of apparatus for coating second embodiment of the present invention, the present embodiment and the first embodiment difference are: the spray nozzle device 51 of present embodiment apparatus for coating is made of a nozzle, this nozzle comprises a storage tank (figure does not show), this storage tank forms first containing cavity 513, second containing cavity 515 and the 3rd containing cavity 517 at interval by two dividing plates 512, and this first, second and third containing cavity 513,515,517 is not connected.
Seeing also Figure 10, is the synoptic diagram at these spray nozzle device 51 another visual angles.This spray nozzle device 51 that is made of a nozzle comprises and the relative spraying face 511 of this carrying board loading end of (figure does not show) (figure does not show) that this spraying face 511 is also by this dividing plate 512 spaced apart formation Unit first, second and third spraying face 521,531,541.This Unit first, second and third spraying face 521,531,541 is corresponding with this first, second and third containing cavity 513,515,517 respectively.This first module spraying face 521 comprises tool one determining deviation and a plurality of first injection orifices 522 of equally distributed row, this Unit second spraying face 531 comprises that tool one determining deviation and a plurality of second injection orifices of equally distributed row Unit 532, the three spraying face 541 comprise tool one determining deviation and a plurality of the 3rd injection orifices 542 of equally distributed row.
See also Figure 11, the action synoptic diagram of second embodiment of apparatus for coating of the present invention.These a plurality of first, second, third injection orifices 522,532,542 are the identical rectangular opening of size.This first, second, third injection orifice 522,532,542 projection on spray nozzle device 51 length directions is spaced in regular turn.This first, second, third containing cavity 513,515,517 is equipped with the photoresistance liquid of different colours respectively, and promptly the photoresistance liquid of different colours is spouting by first, second, third injection orifice 522,532,542 of Unit first, second, third spraying face 521,531,541 respectively.It is corresponding that the width of the photoresistance liquid that is penetrated by this first, second, third injection orifice 522,532,542 and desire are made the width of coloring units of colored filter, and the coloring units of three kinds of different colours of red, green, blue of these first, second, third injection orifice, 522,532,542 respectively corresponding desires manufacturing colored filters.
In the manufacturing of colored filter, the process that forms coloring units can adopt form above-mentioned one step of apparatus for coating.
The apparatus for coating manufacturing manufacturing method of color filters of employing present embodiment and the manufacturing method of color filters of first embodiment are basic identical.
But, it is described that apparatus for coating of the present invention is not limited to above-mentioned embodiment, this spray nozzle device also can be made of two nozzles, this two nozzle is parallel to each other and adjacent this carrying board top that is arranged on, one of them nozzle has a containing cavity and a spraying face, and this spraying face is provided with a row tool one determining deviation and equally distributed a plurality of injection orifice.Another nozzle comprises mutually different two containing cavities and Unit two spraying face corresponding with this two containing cavity, and each unit spraying face is provided with a row tool one determining deviation and equally distributed a plurality of injection orifice.The above-mentioned three a plurality of injection orifices of row projections in the longitudinal direction are spaced in regular turn.This apparatus for coating also can be applicable to be coated with the object of the many colors of other disposable formation, also can abide by above-mentioned rule according to demand a plurality of row injection orifices are set.
Claims (10)
1. apparatus for coating, it comprises a carrying board and a spray nozzle device, this carrying board is used to carry substrate to be coated, this spray nozzle device is corresponding to this carrying board setting, it is characterized in that: this spray nozzle device comprises and three relative row injection orifices of carrying board, to make the coloring units of different colours of colored filter corresponding with desire respectively for this three row injection orifice, and this three row injection orifice projection on this spray nozzle device length direction is spaced in regular turn.
2. apparatus for coating as claimed in claim 1 is characterized in that: this spray nozzle device further comprises three spraying faces and three containing cavities corresponding with this spraying face, and this each row injection orifice is arranged on this each spraying face.
3. apparatus for coating as claimed in claim 2 is characterized in that: the injection orifice of each spraying face equidistantly is distributed on this spraying face.
4. apparatus for coating as claimed in claim 2 is characterized in that: this spray nozzle device has a storage tank, and this storage tank is divided into described three containing cavities by two dividing plates.
5. apparatus for coating as claimed in claim 4 is characterized in that: this three spraying face is one-body molded.
6. apparatus for coating as claimed in claim 2 is characterized in that: this three containing cavity corresponding with this three spraying face is separated from each other.
7. apparatus for coating as claimed in claim 1 is characterized in that: the width of this injection orifice is corresponding with the width of the coloring units of the colored filter of desire manufacturing.
8. as the method for manufacturing colored filtering substrate of apparatus for coating as described in the claim 1 to 7 any, it comprises the steps:
One substrate is provided;
Form a black matrix in this substrate;
This substrate that is formed with black matrix is placed on the carrying board, this carrying board top is to distinguishing the photoresistance liquid of three kinds of different colours of splendid attire in should a spray nozzle device of substrate, and respectively described three kinds of color of light blocking solutions are sprayed by three row injection orifices of spray nozzle device and to be coated in this substrate that is formed with black matrix, to form dyed layer by three kinds of different colours.
9. method for manufacturing colored filtering substrate as claimed in claim 8 is characterized in that: this dyed layer of formation is the vertical bar shape.
10. method for manufacturing colored filtering substrate as claimed in claim 9 is characterized in that: further comprise an exposure imaging step, to form the dyed layer of island-like shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100616080A CN101105632A (en) | 2006-07-12 | 2006-07-12 | Coating device and color filter production method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100616080A CN101105632A (en) | 2006-07-12 | 2006-07-12 | Coating device and color filter production method |
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| CN101105632A true CN101105632A (en) | 2008-01-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA2006100616080A Pending CN101105632A (en) | 2006-07-12 | 2006-07-12 | Coating device and color filter production method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103019048A (en) * | 2012-12-20 | 2013-04-03 | 清华大学深圳研究生院 | Developing spray nozzle |
| CN103984052A (en) * | 2014-05-04 | 2014-08-13 | 深圳市华星光电技术有限公司 | Color filer and manufacturing method thereof |
| CN107398397A (en) * | 2017-08-24 | 2017-11-28 | 武汉华星光电技术有限公司 | The apparatus for coating and coating method of photoresist |
| CN107398396A (en) * | 2017-08-24 | 2017-11-28 | 武汉华星光电技术有限公司 | The apparatus for coating and coating method of photoresist |
-
2006
- 2006-07-12 CN CNA2006100616080A patent/CN101105632A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103019048A (en) * | 2012-12-20 | 2013-04-03 | 清华大学深圳研究生院 | Developing spray nozzle |
| CN103019048B (en) * | 2012-12-20 | 2014-06-04 | 清华大学深圳研究生院 | Developing spray nozzle |
| CN103984052A (en) * | 2014-05-04 | 2014-08-13 | 深圳市华星光电技术有限公司 | Color filer and manufacturing method thereof |
| CN107398397A (en) * | 2017-08-24 | 2017-11-28 | 武汉华星光电技术有限公司 | The apparatus for coating and coating method of photoresist |
| CN107398396A (en) * | 2017-08-24 | 2017-11-28 | 武汉华星光电技术有限公司 | The apparatus for coating and coating method of photoresist |
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Open date: 20080116 |