KR960039507A - Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof - Google Patents

Abstract

The present invention relates to a vertical resonance surface light laser and a method of manufacturing the same. More specifically, the present invention relates to a vertical resonant surface light laser capable of stabilizing the polarization of the output light of the laser in a specific direction by forming a grating pattern on the outer surface of the reflector and a manufacturing method thereof. The vertical resonance surface light laser of the present invention includes a substrate 4, a gain medium layer 1 composed of a quantum well or a compound semiconductor, and an upper reflector 3 and a lower surface formed by alternately stacking two kinds of reflective material surfaces having different refractive indices. A reflector composed of a reflector 2, a proton injection region 6, and an electrode 5 formed on an upper surface of the electric upper reflector 3, and having a laser window 12 for emitting light, for emitting laser light. In the vertical resonant surface light laser, it comprises a lattice pattern layer (14) formed on the outermost surface of the aforementioned reflective material surface and formed in the form of a line which is anisotropically discharged. The vertical resonance surface light laser of the present invention is excellent in the polarization stability of light generated from the laser and can be used for the polarization stabilization of the large diameter vertical resonance surface light laser. Can be economically produced by a simple process.

Description

Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof

As this is a public information case, the full text was not included.

3 is a schematic diagram showing the structure of a grating pattern layer for the vertical resonance surface light laser of the present invention. FIG. 4 is a schematic diagram showing the formation process of a metal film during the manufacturing process of the vertical resonance surface light laser according to the present invention.

Claims (5)

A gain medium layer 1 composed of a substrate 4, a quantum well or a compound semiconductor, a reflector composed of an upper reflector 3 and a lower reflector 2 formed by alternately stacking two kinds of reflective material surfaces having different refractive indices In the vertical resonance surface light laser which consists of the electrode 5 which consists of the injection area 6 and the upper surface of the electrical upper reflector 3, and the laser window 12 for emitting light is formed, and emits a laser beam, the electrical A vertical resonant surface light laser comprising a lattice pattern layer (14) formed on the outermost side of a reflective material surface and formed in the form of a line that is anisotropically discharged. The vertical resonant surface light laser according to claim 1, further comprising a metal film (16) on the side of the grating pattern layer (14). (Iii) an epitaxial growth process of forming a reflector and a gain medium layer 1 composed of an upper reflector 3 and a lower reflector 2 on an upper surface of the substrate 4; (Ii) a lattice pattern layer forming process of forming the lattice pattern layer 14 on the outermost side of the upper reflector 3 described above; And (iii) a proton injection region for forming an electrode 5 including the laser window 12 by depositing a metal on the upper surface of the substrate 4 on which the grid pattern layer 14 is formed, and limiting a current path. 6) A method of manufacturing a vertical resonant surface light laser comprising the step of forming. 4. The method of claim 3, further comprising the step of depositing a metal on the side of the grating pattern layer (14) to form a metal film (16). The method according to claim 3, wherein the lattice pattern layer (14) is formed by etching the outermost surface of the upper reflector (3). ※ Note: The disclosure is based on the initial application.