KR960039507A - Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof - Google Patents

Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof Download PDF

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KR960039507A
KR960039507A KR1019950009416A KR19950009416A KR960039507A KR 960039507 A KR960039507 A KR 960039507A KR 1019950009416 A KR1019950009416 A KR 1019950009416A KR 19950009416 A KR19950009416 A KR 19950009416A KR 960039507 A KR960039507 A KR 960039507A
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laser
reflector
pattern layer
light laser
surface light
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이용희
서정훈
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심상철
한국과학기술원
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Abstract

본 발명은 수직공진 표면광 레이저 및 그의 제조방법에 관한 것이다. 좀더 구체적으로, 본 발명은 반사경의 외측면에 격자패턴을 구성함으로써 레이저의 출력광의 편광을 특정한 방향으로 안정화시킬 수 있는 수직 공진 표면광 레이저 및 그의 제조방법에 관한 것이다. 본 발명의 수직공진 표면광 레이저는 기판(4), 양자우물 또는 화합물 반도체로 구성된 이득매질층(1), 굴절율이 다른 2종류의 반사물질면이 교대로 적층되어 형성된 상부 반사경(3) 및 하부 반사경(2)으로 구성된 반사경, 양성자 주입영역(6) 및 전기 상부 반사경(3)의 상면에 구성되며 빛을 방출하기 위한 레이저 창(12)이 형성된 전극(5)으로 구성되어 레이저 광을 방출하는 수직공진 표면광 레이저에 있어서, 전기한 반사물질면의 최외측면에 구성되며 비등방전인 선의 형태로 형성된 격자패턴층(14)을 포함하는 것을 특징으로 한다. 본 발명의 수직공진 표면광 레이저는 레이저로부터 발생된 빛의 편광 안정성이 우수하고 대구경의 수직공진 표면광 레이저의 편광 안정화를 위해서도 이용가능하며, 본 발명의 제조 방법에 의해 전기한 수직공진 표면광 레이저를 간단한 공정에 의해 경제적으로 제조할 수 있다.The present invention relates to a vertical resonance surface light laser and a method of manufacturing the same. More specifically, the present invention relates to a vertical resonant surface light laser capable of stabilizing the polarization of the output light of the laser in a specific direction by forming a grating pattern on the outer surface of the reflector and a manufacturing method thereof. The vertical resonance surface light laser of the present invention includes a substrate 4, a gain medium layer 1 composed of a quantum well or a compound semiconductor, and an upper reflector 3 and a lower surface formed by alternately stacking two kinds of reflective material surfaces having different refractive indices. A reflector composed of a reflector 2, a proton injection region 6, and an electrode 5 formed on an upper surface of the electric upper reflector 3, and having a laser window 12 for emitting light, for emitting laser light. In the vertical resonant surface light laser, it comprises a lattice pattern layer (14) formed on the outermost surface of the aforementioned reflective material surface and formed in the form of a line which is anisotropically discharged. The vertical resonance surface light laser of the present invention is excellent in the polarization stability of light generated from the laser and can be used for the polarization stabilization of the large diameter vertical resonance surface light laser. Can be economically produced by a simple process.

Description

수직공진 표면광 레이저 및 그의 제조방법Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명의 수직공진 표면광 레이저에 대한 격자패턴층의 구성을 나타낸 개략도이다, 제4도는 본 발명에 의한 수직공진 표면광 레이저의 제조과정 중 금속막의 형성과정을 나타낸 개략도이다.3 is a schematic diagram showing the structure of a grating pattern layer for the vertical resonance surface light laser of the present invention. FIG. 4 is a schematic diagram showing the formation process of a metal film during the manufacturing process of the vertical resonance surface light laser according to the present invention.

Claims (5)

기판(4), 양자우물 또는 화합물 반도체로 구성된 이득매질층(1), 굴절율이 다른 2종류의 반사물질면이 교대로 적층되어 형성된 상부 반사경(3) 및 하부 반사경(2)으로 구성된 반사경, 양성자 주입영역(6) 및 전기 상부 반사경(3)의 상면에 구성되며 빛을 방출하기 위한 레이저 창(12)이 형성된 전극(5)으로 구성되어 레이저광을 방출하는 수직공진 표면광 레이저에 있어서, 전기한 반사물질면의 최외측면에 구성되며 비등방전인 선의 형태로 형성된 격자패턴층(14)을 포함하는 것을 특징으로 하는 수직공진 표면광 레이저.A gain medium layer 1 composed of a substrate 4, a quantum well or a compound semiconductor, a reflector composed of an upper reflector 3 and a lower reflector 2 formed by alternately stacking two kinds of reflective material surfaces having different refractive indices In the vertical resonance surface light laser which consists of the electrode 5 which consists of the injection area 6 and the upper surface of the electrical upper reflector 3, and the laser window 12 for emitting light is formed, and emits a laser beam, the electrical A vertical resonant surface light laser comprising a lattice pattern layer (14) formed on the outermost side of a reflective material surface and formed in the form of a line that is anisotropically discharged. 제1항에 있어서, 격자패턴층(14)의 측면에 금속막(16)을 추가로 포함하는 것을 특징으로 하는 수직공진 표면광 레이저.The vertical resonant surface light laser according to claim 1, further comprising a metal film (16) on the side of the grating pattern layer (14). (ⅰ) 기판(4)의 상단면에 상부 반사경(3)과 하부 반사경(2)으로 구성된 반사경 및 이득매질층(1)을 형성하는 에피층 성장과정; (ⅱ) 전기한 상부 반사경(3)의 최외측면에 격자패턴층(14)을 형성하는 격자패턴층 형성과정; 및, (ⅲ) 전기한 격자패턴층(14)이 형성된 기판(4)의 상면에 금속을 증착하여 레이저 창(12)이 구성된 전극(5)을 형성하고 전류 경로를 제한하기 위한 양성자 주입영역(6)을 형성하는 과정을 포함하는 수직공진 표면광 레이저의 제조방법.(Iii) an epitaxial growth process of forming a reflector and a gain medium layer 1 composed of an upper reflector 3 and a lower reflector 2 on an upper surface of the substrate 4; (Ii) a lattice pattern layer forming process of forming the lattice pattern layer 14 on the outermost side of the upper reflector 3 described above; And (iii) a proton injection region for forming an electrode 5 including the laser window 12 by depositing a metal on the upper surface of the substrate 4 on which the grid pattern layer 14 is formed, and limiting a current path. 6) A method of manufacturing a vertical resonant surface light laser comprising the step of forming. 제3항에 있어서, 격자패턴층(14)의 측면에 금속을 증착하여 금속막(16)을 형성하는 공정을 추가로 포함하는 것을 특징으로 하는 수직공진 표면광 레이저의 제조방법.4. The method of claim 3, further comprising the step of depositing a metal on the side of the grating pattern layer (14) to form a metal film (16). 제3항에 있어서, 격자패턴층(14)의 형성은 상부 반사경(3)의 최외측면을 식각하여 형성하는 것을 특징으로 하는 수직공진 표면광 레이저의 제조방법.The method according to claim 3, wherein the lattice pattern layer (14) is formed by etching the outermost surface of the upper reflector (3). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950009416A 1995-04-21 1995-04-21 Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof Ceased KR960039507A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100413912B1 (en) * 2001-03-07 2004-01-07 한국과학기술원 Wavelength-tunable vertical-cavity surface emitting laser device
US11276987B2 (en) 2018-09-04 2022-03-15 Samsung Electronics Co.. Ltd. Vertical cavity surface-emitting laser including nanostructure reflector and optical apparatus using the vertical cavity surface-emitting laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100413912B1 (en) * 2001-03-07 2004-01-07 한국과학기술원 Wavelength-tunable vertical-cavity surface emitting laser device
US11276987B2 (en) 2018-09-04 2022-03-15 Samsung Electronics Co.. Ltd. Vertical cavity surface-emitting laser including nanostructure reflector and optical apparatus using the vertical cavity surface-emitting laser

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