KR960039507A - Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof - Google Patents
Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof Download PDFInfo
- Publication number
- KR960039507A KR960039507A KR1019950009416A KR19950009416A KR960039507A KR 960039507 A KR960039507 A KR 960039507A KR 1019950009416 A KR1019950009416 A KR 1019950009416A KR 19950009416 A KR19950009416 A KR 19950009416A KR 960039507 A KR960039507 A KR 960039507A
- Authority
- KR
- South Korea
- Prior art keywords
- laser
- reflector
- pattern layer
- light laser
- surface light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 5
- 238000000034 method Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims abstract 4
- 239000000758 substrate Substances 0.000 claims abstract 4
- 238000002347 injection Methods 0.000 claims abstract 3
- 239000007924 injection Substances 0.000 claims abstract 3
- 150000001875 compounds Chemical class 0.000 claims abstract 2
- 239000004065 semiconductor Substances 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 abstract 3
- 230000006641 stabilisation Effects 0.000 abstract 1
- 238000011105 stabilization Methods 0.000 abstract 1
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
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- Semiconductor Lasers (AREA)
Abstract
본 발명은 수직공진 표면광 레이저 및 그의 제조방법에 관한 것이다. 좀더 구체적으로, 본 발명은 반사경의 외측면에 격자패턴을 구성함으로써 레이저의 출력광의 편광을 특정한 방향으로 안정화시킬 수 있는 수직 공진 표면광 레이저 및 그의 제조방법에 관한 것이다. 본 발명의 수직공진 표면광 레이저는 기판(4), 양자우물 또는 화합물 반도체로 구성된 이득매질층(1), 굴절율이 다른 2종류의 반사물질면이 교대로 적층되어 형성된 상부 반사경(3) 및 하부 반사경(2)으로 구성된 반사경, 양성자 주입영역(6) 및 전기 상부 반사경(3)의 상면에 구성되며 빛을 방출하기 위한 레이저 창(12)이 형성된 전극(5)으로 구성되어 레이저 광을 방출하는 수직공진 표면광 레이저에 있어서, 전기한 반사물질면의 최외측면에 구성되며 비등방전인 선의 형태로 형성된 격자패턴층(14)을 포함하는 것을 특징으로 한다. 본 발명의 수직공진 표면광 레이저는 레이저로부터 발생된 빛의 편광 안정성이 우수하고 대구경의 수직공진 표면광 레이저의 편광 안정화를 위해서도 이용가능하며, 본 발명의 제조 방법에 의해 전기한 수직공진 표면광 레이저를 간단한 공정에 의해 경제적으로 제조할 수 있다.The present invention relates to a vertical resonance surface light laser and a method of manufacturing the same. More specifically, the present invention relates to a vertical resonant surface light laser capable of stabilizing the polarization of the output light of the laser in a specific direction by forming a grating pattern on the outer surface of the reflector and a manufacturing method thereof. The vertical resonance surface light laser of the present invention includes a substrate 4, a gain medium layer 1 composed of a quantum well or a compound semiconductor, and an upper reflector 3 and a lower surface formed by alternately stacking two kinds of reflective material surfaces having different refractive indices. A reflector composed of a reflector 2, a proton injection region 6, and an electrode 5 formed on an upper surface of the electric upper reflector 3, and having a laser window 12 for emitting light, for emitting laser light. In the vertical resonant surface light laser, it comprises a lattice pattern layer (14) formed on the outermost surface of the aforementioned reflective material surface and formed in the form of a line which is anisotropically discharged. The vertical resonance surface light laser of the present invention is excellent in the polarization stability of light generated from the laser and can be used for the polarization stabilization of the large diameter vertical resonance surface light laser. Can be economically produced by a simple process.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제3도는 본 발명의 수직공진 표면광 레이저에 대한 격자패턴층의 구성을 나타낸 개략도이다, 제4도는 본 발명에 의한 수직공진 표면광 레이저의 제조과정 중 금속막의 형성과정을 나타낸 개략도이다.3 is a schematic diagram showing the structure of a grating pattern layer for the vertical resonance surface light laser of the present invention. FIG. 4 is a schematic diagram showing the formation process of a metal film during the manufacturing process of the vertical resonance surface light laser according to the present invention.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950009416A KR960039507A (en) | 1995-04-21 | 1995-04-21 | Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950009416A KR960039507A (en) | 1995-04-21 | 1995-04-21 | Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960039507A true KR960039507A (en) | 1996-11-25 |
Family
ID=66522978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950009416A Ceased KR960039507A (en) | 1995-04-21 | 1995-04-21 | Vertical Resonant Surface-Light Laser and Manufacturing Method Thereof |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960039507A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100413912B1 (en) * | 2001-03-07 | 2004-01-07 | 한국과학기술원 | Wavelength-tunable vertical-cavity surface emitting laser device |
US11276987B2 (en) | 2018-09-04 | 2022-03-15 | Samsung Electronics Co.. Ltd. | Vertical cavity surface-emitting laser including nanostructure reflector and optical apparatus using the vertical cavity surface-emitting laser |
-
1995
- 1995-04-21 KR KR1019950009416A patent/KR960039507A/en not_active Ceased
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100413912B1 (en) * | 2001-03-07 | 2004-01-07 | 한국과학기술원 | Wavelength-tunable vertical-cavity surface emitting laser device |
US11276987B2 (en) | 2018-09-04 | 2022-03-15 | Samsung Electronics Co.. Ltd. | Vertical cavity surface-emitting laser including nanostructure reflector and optical apparatus using the vertical cavity surface-emitting laser |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19950421 |
|
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19950421 Comment text: Request for Examination of Application |
|
PG1501 | Laying open of application | ||
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19980327 Patent event code: PE09021S01D |
|
E601 | Decision to refuse application | ||
PE0601 | Decision on rejection of patent |
Patent event date: 19980715 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 19980327 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |