KR960039453A - Light path controller - Google Patents

Light path controller Download PDF

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Publication number
KR960039453A
KR960039453A KR1019950009398A KR19950009398A KR960039453A KR 960039453 A KR960039453 A KR 960039453A KR 1019950009398 A KR1019950009398 A KR 1019950009398A KR 19950009398 A KR19950009398 A KR 19950009398A KR 960039453 A KR960039453 A KR 960039453A
Authority
KR
South Korea
Prior art keywords
surface tension
optical path
contact
membrane
control device
Prior art date
Application number
KR1019950009398A
Other languages
Korean (ko)
Other versions
KR0177250B1 (en
Inventor
민용기
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to KR1019950009398A priority Critical patent/KR0177250B1/en
Priority to TW085101898A priority patent/TW305943B/zh
Priority to US08/602,928 priority patent/US5757539A/en
Priority to DE69621516T priority patent/DE69621516T2/en
Priority to EP96102744A priority patent/EP0741310B1/en
Priority to AR33557696A priority patent/AR001107A1/en
Priority to RU97119085/28A priority patent/RU2166784C2/en
Priority to CA002218655A priority patent/CA2218655A1/en
Priority to AU49570/96A priority patent/AU698094B2/en
Priority to HU9801824A priority patent/HUP9801824A3/en
Priority to JP53163696A priority patent/JP3734271B2/en
Priority to PCT/KR1996/000033 priority patent/WO1996033576A1/en
Priority to CN96193409A priority patent/CN1082770C/en
Priority to PL96322906A priority patent/PL179925B1/en
Priority to BR9608226A priority patent/BR9608226A/en
Priority to CZ973280A priority patent/CZ328097A3/en
Priority to UY24183A priority patent/UY24183A1/en
Publication of KR960039453A publication Critical patent/KR960039453A/en
Priority to MXPA/A/1997/007869A priority patent/MXPA97007869A/en
Application granted granted Critical
Publication of KR0177250B1 publication Critical patent/KR0177250B1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

본 발명은 광로 조절 장치의 제조방법에 관한 것으로서, 멤브레인, 하부전극, 변형부, 상부전극 및 보호막을 순차적으로 형성한 후 각각의 식각 마스크를 사용하여 액츄에이터를 분리하는 공정과, 동시에 각각의 식각 마스크에 소정의 형태(예를 들면, '〕’)를 형성하여 희생막을 제거한 후 세척공정에서 발생되는 표면장력을 최소화 하여 표면장력으로 인한 액츄에이터가 기울어져 구동기판과, 접촉되는 스티킹(sticking)을 방지한다. 따라서, 본 발명은 희생막의 제거후 세척공정시 표면장력으로 인한 액츄에이터가 기울어져 구동기판과, 접촉되는 스티킹(sticking)을 방지하여 픽셀(pixel)의 불량율을 감소시켜 대량생산을 할 수 있다The present invention relates to a method for manufacturing an optical path control device, comprising sequentially forming a membrane, a lower electrode, a deformable portion, an upper electrode, and a protective film, and then separating the actuators using the respective etching masks, and simultaneously etching masks. After removing the sacrificial film by forming a predetermined shape (for example, ']') on the substrate, the surface tension generated during the cleaning process is minimized, and the actuator due to the surface tension is inclined to stick the sticking contact with the driving substrate. prevent. Accordingly, the present invention can be mass-produced by reducing the defective rate of pixels by preventing the sticking of the actuator due to the surface tension during the cleaning process after removal of the sacrificial film is in contact with the driving substrate.

Description

광로조절장치Light Path Control

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명에 따른 광로 조절 장치의 정면도. 제 4도는 제3도를 b∼b선으로 자른 본 발명의 실시예에 따른 광로 조절 장치의 단면도.3 is a front view of the optical path adjusting device according to the present invention. 4 is a cross-sectional view of an optical path adjusting apparatus according to an embodiment of the present invention, taken along line 3 to b.

Claims (2)

트랜지스가 매트릭스형태로 내장되고 표면에 각각의 트랜지스터에 전기적으로 연결된 패드(53)를 갖는 구동기판(51)과; 상기 구동기판(51)의 상부에 접촉되며 요자의 형태를 이루는 2개의 레그의 반대쪽에 공간에 노출되게 위치하며 철자의 형태를 이루는 돌출부를 갖는 멤브레인(57)과, 상기 멤브레인(57)의 레그상부의 소정부분에 형성된 플러그(59)와, 상기 하부전극(61)의 상부에 형성된 변형부(63)와, 상기 변형부(63)의 상부에 부분에 형성되며 바이어스전극으로 사용되는 상부전극(65)으로 이루어진 액츄에이터(80)를 포함하는 광로 조절 장치에 있어서, 상기 액츄에이터(80) 끝단에 소정 형태로 형성되어 있는 팁(69)을 더 포함함을 특징으로 하는 광로 조절 장치.A driving substrate 51 having a transistor 53 in which a transistor is embedded in a matrix and electrically connected to each transistor on a surface thereof; Is in contact with the upper portion of the drive substrate 51 Iron on the opposite side of the two legs that form the ruler A membrane 57 having a protrusion forming a ruler, a plug 59 formed on a predetermined portion of a leg upper portion of the membrane 57, a deformable portion 63 formed on the lower electrode 61, and the In the optical path control device including an actuator (80) formed in the upper portion of the deformation portion 63 and used as a bias electrode, which is formed in a predetermined shape at the end of the actuator (80). And a tip (69). 제1항에 있어서, 상기팁(69)이 '〕'형태로 형성되는 광로 조절 장치The optical path control device according to claim 1, wherein the tip (69) is formed in a ']' shape. ※ 참고사항: 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the original application.
KR1019950009398A 1995-04-21 1995-04-21 An optical projection system KR0177250B1 (en)

Priority Applications (18)

Application Number Priority Date Filing Date Title
KR1019950009398A KR0177250B1 (en) 1995-04-21 1995-04-21 An optical projection system
TW085101898A TW305943B (en) 1995-04-21 1996-02-15
US08/602,928 US5757539A (en) 1995-04-21 1996-02-16 Thin film actuated mirror array for use in an optical projection system
DE69621516T DE69621516T2 (en) 1995-04-21 1996-02-23 Arrangement of controlled thin-film mirrors for an optical projection system
EP96102744A EP0741310B1 (en) 1995-04-21 1996-02-23 Thin film actuated mirror array for use in an optical projection system
AR33557696A AR001107A1 (en) 1995-04-21 1996-02-28 A set of M x N thin film powered mirrors and method of making it
PL96322906A PL179925B1 (en) 1995-04-21 1996-03-07 Arrangement stimulated thin-film mirrors for use in an optical projection system
AU49570/96A AU698094B2 (en) 1995-04-21 1996-03-07 Thin film actuated mirror array for use in an optical projection system
RU97119085/28A RU2166784C2 (en) 1995-04-21 1996-03-07 Matrix of thin-film controlled mirrors for usage in optical projection system
JP53163696A JP3734271B2 (en) 1995-04-21 1996-03-07 Thin film actuated mirror array and method of manufacturing the same
PCT/KR1996/000033 WO1996033576A1 (en) 1995-04-21 1996-03-07 Thin film actuated mirror array for use in an optical projection system
CN96193409A CN1082770C (en) 1995-04-21 1996-03-07 Thin film actuated mirror array for use in optical projection system
CA002218655A CA2218655A1 (en) 1995-04-21 1996-03-07 Thin film actuated mirror array for use in an optical projection system
BR9608226A BR9608226A (en) 1995-04-21 1996-03-07 Mirror film actuator set for use in an optical projection system
CZ973280A CZ328097A3 (en) 1995-04-21 1996-03-07 Grouping of light film controlled mirrors used in optical projection systems
HU9801824A HUP9801824A3 (en) 1995-04-21 1996-03-07 Thin film actuated mirror array for use in an optical projection system and procedure for manufacturing thereof
UY24183A UY24183A1 (en) 1995-04-21 1996-03-18 SET OF THIN FILM DRIVEN MIRRORS TO BE USED IN AN OPTICAL PROJECTION SYSTEM
MXPA/A/1997/007869A MXPA97007869A (en) 1995-04-21 1997-10-13 Lighted movie set of delgadapara mirror for use in an opt projection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950009398A KR0177250B1 (en) 1995-04-21 1995-04-21 An optical projection system

Publications (2)

Publication Number Publication Date
KR960039453A true KR960039453A (en) 1996-11-25
KR0177250B1 KR0177250B1 (en) 1999-05-01

Family

ID=19412634

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950009398A KR0177250B1 (en) 1995-04-21 1995-04-21 An optical projection system

Country Status (1)

Country Link
KR (1) KR0177250B1 (en)

Also Published As

Publication number Publication date
MX9707869A (en) 1997-11-29
KR0177250B1 (en) 1999-05-01

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