KR960038359A - 변위검출장치 - Google Patents

변위검출장치 Download PDF

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Publication number
KR960038359A
KR960038359A KR1019960011921A KR19960011921A KR960038359A KR 960038359 A KR960038359 A KR 960038359A KR 1019960011921 A KR1019960011921 A KR 1019960011921A KR 19960011921 A KR19960011921 A KR 19960011921A KR 960038359 A KR960038359 A KR 960038359A
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South Korea
Prior art keywords
displacement
amount
circuit
magnetic
magnetic core
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KR1019960011921A
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KR100212176B1 (ko
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요시히로 시즈야
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감사야시 아끼라
테쿠노엑세루 가부시키가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/14—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of pressure
    • G01F23/18—Indicating, recording or alarm devices actuated electrically
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/20—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of weight, e.g. to determine the level of stored liquefied gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/007—Transmitting or indicating the displacement of flexible diaphragms using variations in inductance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/10—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in inductance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/4802—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage by using electronic circuits in general

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

변위체의 변위량이 적은 경우에도, 분해능을 저하시키지 않고 변위량을 검출할 수 있는 변위검출장치를 제공한다. 가변코일(68)은, 자기코일(58), 외력에 의해서 변위하는 변위체에 의해서 변위되고 자기코일(58)에 대하여 접근하거나 멀어지는 이동하는 자성코어(60)로부터 구성된다. LC공진회로(10)는 가변코일(68)을 구비한다. 발진기(14)는 LC공진회로(10)에 소정 주파수의 연속파를 공급한다. 검출회로(22)는 LC공진회로(10)를 통해서 출력되는 연속파의 진폭에 의하여 변위체의 변위량을 검출한다. 이 구성에 의하면, 자성코어(60)의 변위량이 적고, 가변코일(68)의 인덕턴스의 변화량도 적은 경우에도, 인덕턴스의 변화량에 대한 연속파의 진폭의 변화량의 비율을 크게 할 수 있고, 분해능을 저하시키지 않고 변위량을 검출할 수 있다.

Description

변위검출장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관계되는 변위검출장치의 제1실시형태의 요부구성을 나타내는 블록도, 제2도는 제1도의 발지기로부터의 주파수와 정류회로로부터 출력되는 전압과의 관계를 나타내는 그래프, 제4도는 제1도의 기체압력, 인덕턴스, 공진주파수, 전압(Vo)과의 상관관계를 나타내는 도표, 제5도는 본 발명에 관계되는 변위검출장치의 제2실시형태의 요부구성(공진회로)을 나타내는 회로도, 제10도는 본 발명에 관계되는 변위검출장치를 진동감지기에 응용하였을때의 변위검출부분의 구성을 나타내는 설명도.

Claims (7)

  1. 외력의 변화에 따라서 변위하는 변위체(56, 36, 40)와 자기코일(58) 및 상기 변위체(56, 36, 40)의 변위에 따라서 상기 자기코일(58)에 대하여 접근하거나 멀어지는 이동하는 자성코어(60)를 포함하는 LC공진회로(10)와, 그 LC공진회로(10)에 소정 주파수의 연속신호를 공급하는 발진기(14)와, 상기 LC공진회로(10)를 통해서 출력되는 연속신호의 진폭에 의하여 상기 변위체(56, 36, 40)의 변위량을 검출하는 검출회로(22)를 구비하는 것을 특징으로 하는 변위검출장치.
  2. 제1항에 있어서, 상기 LC공진회로(10)를 통해서 출력되는 연속신호를 정류하고 평활하는 정류회로(16)를 설치하고, 상기 검출회로(22)는 상기 정류회로(16)로부터 출력되는 직류전압에 의하여 상기 변위량을 검출하는 것을 특징으로 하는 변위검출장치.
  3. 제1항 또는 제2항에 있어서, 상기 LC공진회로(10)의 공진주파수는, 상기 자성코어(60)의 접근하거나 멀어지는 이동에 따라서 상기 소정 주파수 이상의 주파수 범위내에서 변화하도록 설정되어 있는 것을 특징으로 하는 변위검출장치.
  4. 제1항, 제2항 또는 제3항에 있어서, 상기 외력은 유체압력이고, 상기 검출회로(22)는, 검출한 상기 변위량으로부터 상기 유체압력을 검출하는 것을 특징으로 하는 변위검출장치.
  5. 제4항에 있어서, 상기 변위체(56)는 유체압력의 변위에 따라서 변위하는 다이어프램이고, 상기 검출회로(22)는, 검출한 상기 변위량으로부터 상치 유체압력을 검출하는 것을 특징으로 하는 변위검출장치.
  6. 제1항 또는 제2항에 있어서, 상기 외력은 중량이고, 상기 검출회로(22)는, 검출한 상기 변위량으로부터 상기 중량을 검출하는 것을 특징으로 하는 변위검출장치.
  7. 자기코일(58) 및 외력의 변화에 따라서 상기 자기코일(58)에 대하여 접근하거나 멀어지는 이동하는 자성코어(60)을 포함하는 LC공진회로(10)와, 그 LC공진회로(10)에 소정 주파수의 연속신호를 공급하는 발진기(14)와, 상기 LC공진회로(10)를 통해서 출력되는 연속신호의 진폭에 의하여 상기 자성코어(60)의 변위량을 검출하는 검출회러(22)를 구비하는 것을 특징으로 하는 변위검출장치.
KR1019960011921A 1995-04-20 1996-04-19 변위검출장치 Expired - Fee Related KR100212176B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9527095 1995-04-20
JP95-95270 1995-04-20

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KR960038359A true KR960038359A (ko) 1996-11-21
KR100212176B1 KR100212176B1 (ko) 1999-08-02

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KR (1) KR100212176B1 (ko)
CN (1) CN1150646A (ko)

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US5760577A (en) 1998-06-02
KR100212176B1 (ko) 1999-08-02
CN1150646A (zh) 1997-05-28

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