KR960035762A - Exposure device - Google Patents

Exposure device Download PDF

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Publication number
KR960035762A
KR960035762A KR1019950004993A KR19950004993A KR960035762A KR 960035762 A KR960035762 A KR 960035762A KR 1019950004993 A KR1019950004993 A KR 1019950004993A KR 19950004993 A KR19950004993 A KR 19950004993A KR 960035762 A KR960035762 A KR 960035762A
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KR
South Korea
Prior art keywords
light
exposure
glass plate
light source
exposure apparatus
Prior art date
Application number
KR1019950004993A
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Korean (ko)
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KR0163091B1 (en
Inventor
김창규
Original Assignee
이대원
삼성항공산업 주식회사
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Application filed by 이대원, 삼성항공산업 주식회사 filed Critical 이대원
Priority to KR1019950004993A priority Critical patent/KR0163091B1/en
Publication of KR960035762A publication Critical patent/KR960035762A/en
Application granted granted Critical
Publication of KR0163091B1 publication Critical patent/KR0163091B1/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2026—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction
    • G03F7/2028—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction of an edge bead on wafers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

글라스탄(11)의 주변부(26a)(26b)(26c)(26d)에 묻은 포토레지스터의 잔류로 인하여 후공정에서 발생할 수 있는 불량의 소지를 없애고, 하나의 광원(1)으로 주변부(26a)(26b)(26c)(26d)노광까지 완료 하므로 제조 원가를 감소시키며, 다양한 크기의 글라스(11)을 용이하게 노광하기 위하여, 광원(1)으로부터 광을 접속하여 셧터(5)을 통하여 회로 패턴이 형성되어 있는 마스크(7)를 통과하고 상기 마스크(7)를 통과한 광이 포토레지스터가 도포되어 있는 글라스판(11)을 노광하는 노광장치에 있어서, 광원(1)으로부터 일부의 광을 인출하여 접속하고, 상기 집속되어진 광을 소정의 위치까지 이동시켜 결상하는 다수의 글라스판(11)의 주변부 노광수단과, 상기 노광수단으로 글라스판(11)을 노광하기 위하여 3축이상으로 이동가능하며, 별도의 구동원으로 구동되는 이송수단으로 구성하여, 별도의 주변 노광용광원이 불필요하므로 이에대한 비용을 감소시킬 수 있으며, 글라스판(11)의 주변부 (26a)(26b)(26c)(26d)의 노광을 완벽하게 수행하므로 포토레지스터가 잔류해 있을 경우 분진으로 변하여 후 공정시 이로 인한 오염의 원인이 될 수 있는 소지를 제거하는 노광장치.Residual photoresist on the periphery 26a, 26b, 26c, and 26d of the glass bullet 11 eliminates the possibility of defects that may occur in a later process, and the periphery 26a as one light source 1 (26b) (26c) To complete the exposure, the manufacturing cost is reduced, and in order to easily expose the glass 11 of various sizes, light is connected from the light source 1 to the circuit pattern through the shutter 5 In the exposure apparatus which passes through the formed mask 7 and passes through the mask 7, the glass plate 11 on which the photoresist is applied is exposed, and a part of light is extracted from the light source 1. And the peripheral portion of the plurality of glass plates 11 for moving the focused light to a predetermined position and forming an image, and the three or more axes can be moved to expose the glass plate 11 by the exposure means. Transport means driven by a separate drive source In this configuration, a separate peripheral exposure light source is unnecessary, so that the cost thereof can be reduced, and the photoresist remains because the exposure of the peripheral portions 26a, 26b, 26c, and 26d of the glass plate 11 is performed perfectly. If there is, exposure device that turns dust and removes material that may cause contamination in later process.

Description

노광장치Exposure device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명에 의한 실시예를 도시한 정면도, 제2도는 본발명에의한 노광장치의 노광 과정을 도시한 사시도로서, (가)는 글라스판의 주변부 2면을 노광하는 상태를 도시한 사시도이고, (나)는 (가)의 작업이 완료된 후 글라스판의 다른 주변부를 노광하기 위하여 이송수단의 방향을 바꾸는 상태를 도시한 사시도이고, (다)는 글라스판의 다른 주변부 2면을 노광하는 상태를 도시한 사시도이다.1 is a front view showing an embodiment according to the present invention, Figure 2 is a perspective view showing the exposure process of the exposure apparatus according to the present invention, (a) shows a state of exposing two peripheral portions of the glass plate. (B) is a perspective view showing a state in which the direction of the transfer means is changed to expose another periphery of the glass plate after the work of (a) is completed, and (c) is a perspective view of two other periphery surfaces of the glass plate. It is a perspective view which shows the state to expose.

Claims (4)

광원으로부터 광을 집속하여 셧터를 통하여 회로 패턴이 형성되어 있는 마스크를 통과하고, 상기 마스크를 통과한 광이 포토레지스터가 도포되어 있는 글라스판을 노광하는 노광장치에 있어서, 광원(1)으로부터 일부의 광을 인출하여 집속하고, 상기 집속되어진 광을 소정의 위치까지 이동시켜 결상하는 다수의 글라스판(11)의 주변부 노광수단과, 상기 노광수단으로 글라스판(11)을 노광하기 위하여 별도의 구동원으로 구동되며 3축이상으로 이동 가능한 이송수단으로 이루어지는 것을 특징으로 하는 노광장치.An exposure apparatus that focuses light from a light source and passes through a mask in which a circuit pattern is formed, and exposes a glass plate on which a photoresist is applied to the light passing through the mask. As a separate drive source for exposing the glass plate 11 with the peripheral portion of the plurality of glass plate 11 for extracting and focusing the light, moving the focused light to a predetermined position and forming an image. Exposure apparatus, characterized in that consisting of a conveying means driven and movable in at least three axes. 제1항에 있어서, 상기 주변부 노광수단은 광원(1)으로부터 광을 집속하여 경로를 바꾸어주는 1개 이상의 집속부재와, 상기 집속부재를 통과한 광을 모아주는 집광렌즈(25)와, 상기 집광렌즈(25)와 일측이 연결되며, 광을 소전의 위치까지 전달하는 광섬유(27)와, 상기 광섬유(27)의 다른 일측에 연결되며, 이를 통과한 광을 방사하는조명계 (29)로 이루어진 것을 특징으로 하는 노광장치.The method of claim 1, wherein the peripheral exposure means includes at least one focusing member for converging light from the light source 1 to change the path, a condensing lens 25 for collecting light passing through the converging member, and the condensing light. One side of the lens 25 is connected, and made of an optical fiber 27 for transmitting the light to the position of the luminaire, and an illumination system 29 connected to the other side of the optical fiber 27, and radiates the light passing therethrough. An exposure apparatus characterized by the above-mentioned. 제1항에 있어서, 이송수단은 받침대에 고정되며 상, 하 및 회전운동을 하는 엑츄에이터(16)와, 이의 일끝에 고정되며 직선운동을 하는 엑츄에이터(18)와, 상기 엑츄에이터(18)의 상단에 고정되며 글라스판(11)을 이동하기 위한 핸드(19)로 이루어지는 것을 특징으로 하는 노광장치.The actuator of claim 1, wherein the transfer means is fixed to a pedestal, and has an actuator 16 for up, down, and rotational movements, an actuator 18 fixed to one end thereof, and a linear movement, and an upper end of the actuator 18. The exposure apparatus is fixed and comprises a hand (19) for moving the glass plate (11). 제2항에 있어서, 접속부재는 광원의 일측에 설치되며 프리즘(23)으로 이루어지는 것을 특징으로 하는 노광장치.3. An exposure apparatus according to claim 2, wherein the connection member is provided on one side of the light source and comprises a prism (23). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950004993A 1995-03-10 1995-03-10 Expose apparatus KR0163091B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950004993A KR0163091B1 (en) 1995-03-10 1995-03-10 Expose apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950004993A KR0163091B1 (en) 1995-03-10 1995-03-10 Expose apparatus

Publications (2)

Publication Number Publication Date
KR960035762A true KR960035762A (en) 1996-10-24
KR0163091B1 KR0163091B1 (en) 1999-02-01

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ID=19409595

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950004993A KR0163091B1 (en) 1995-03-10 1995-03-10 Expose apparatus

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Publication number Publication date
KR0163091B1 (en) 1999-02-01

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