KR960027795U - 반도체 소자의 보관 및 이송기구 - Google Patents
반도체 소자의 보관 및 이송기구Info
- Publication number
- KR960027795U KR960027795U KR2019950000388U KR19950000388U KR960027795U KR 960027795 U KR960027795 U KR 960027795U KR 2019950000388 U KR2019950000388 U KR 2019950000388U KR 19950000388 U KR19950000388 U KR 19950000388U KR 960027795 U KR960027795 U KR 960027795U
- Authority
- KR
- South Korea
- Prior art keywords
- storage
- semiconductor devices
- transport mechanism
- transport
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67333—Trays for chips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950000388U KR0123634Y1 (ko) | 1995-01-12 | 1995-01-12 | 반도체 소자의 보관 및 이송기구 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950000388U KR0123634Y1 (ko) | 1995-01-12 | 1995-01-12 | 반도체 소자의 보관 및 이송기구 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960027795U true KR960027795U (ko) | 1996-08-17 |
KR0123634Y1 KR0123634Y1 (ko) | 1999-02-18 |
Family
ID=19406606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950000388U KR0123634Y1 (ko) | 1995-01-12 | 1995-01-12 | 반도체 소자의 보관 및 이송기구 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0123634Y1 (ko) |
-
1995
- 1995-01-12 KR KR2019950000388U patent/KR0123634Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0123634Y1 (ko) | 1999-02-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050422 Year of fee payment: 8 |
|
LAPS | Lapse due to unpaid annual fee |