KR960027795U - 반도체 소자의 보관 및 이송기구 - Google Patents

반도체 소자의 보관 및 이송기구

Info

Publication number
KR960027795U
KR960027795U KR2019950000388U KR19950000388U KR960027795U KR 960027795 U KR960027795 U KR 960027795U KR 2019950000388 U KR2019950000388 U KR 2019950000388U KR 19950000388 U KR19950000388 U KR 19950000388U KR 960027795 U KR960027795 U KR 960027795U
Authority
KR
South Korea
Prior art keywords
storage
semiconductor devices
transport mechanism
transport
semiconductor
Prior art date
Application number
KR2019950000388U
Other languages
English (en)
Other versions
KR0123634Y1 (ko
Inventor
김수헌
조동환
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950000388U priority Critical patent/KR0123634Y1/ko
Publication of KR960027795U publication Critical patent/KR960027795U/ko
Application granted granted Critical
Publication of KR0123634Y1 publication Critical patent/KR0123634Y1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333Trays for chips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
KR2019950000388U 1995-01-12 1995-01-12 반도체 소자의 보관 및 이송기구 KR0123634Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950000388U KR0123634Y1 (ko) 1995-01-12 1995-01-12 반도체 소자의 보관 및 이송기구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950000388U KR0123634Y1 (ko) 1995-01-12 1995-01-12 반도체 소자의 보관 및 이송기구

Publications (2)

Publication Number Publication Date
KR960027795U true KR960027795U (ko) 1996-08-17
KR0123634Y1 KR0123634Y1 (ko) 1999-02-18

Family

ID=19406606

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950000388U KR0123634Y1 (ko) 1995-01-12 1995-01-12 반도체 소자의 보관 및 이송기구

Country Status (1)

Country Link
KR (1) KR0123634Y1 (ko)

Also Published As

Publication number Publication date
KR0123634Y1 (ko) 1999-02-18

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20050422

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee