KR960025428U - Clamping device for wafer inspection - Google Patents

Clamping device for wafer inspection

Info

Publication number
KR960025428U
KR960025428U KR2019940035965U KR19940035965U KR960025428U KR 960025428 U KR960025428 U KR 960025428U KR 2019940035965 U KR2019940035965 U KR 2019940035965U KR 19940035965 U KR19940035965 U KR 19940035965U KR 960025428 U KR960025428 U KR 960025428U
Authority
KR
South Korea
Prior art keywords
clamping device
wafer inspection
wafer
inspection
clamping
Prior art date
Application number
KR2019940035965U
Other languages
Korean (ko)
Other versions
KR0132639Y1 (en
Inventor
박종준
강용
임동국
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940035965U priority Critical patent/KR0132639Y1/en
Publication of KR960025428U publication Critical patent/KR960025428U/en
Application granted granted Critical
Publication of KR0132639Y1 publication Critical patent/KR0132639Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
KR2019940035965U 1994-12-26 1994-12-26 Wafer check and wafer transfer device KR0132639Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035965U KR0132639Y1 (en) 1994-12-26 1994-12-26 Wafer check and wafer transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035965U KR0132639Y1 (en) 1994-12-26 1994-12-26 Wafer check and wafer transfer device

Publications (2)

Publication Number Publication Date
KR960025428U true KR960025428U (en) 1996-07-22
KR0132639Y1 KR0132639Y1 (en) 1999-02-01

Family

ID=19402900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035965U KR0132639Y1 (en) 1994-12-26 1994-12-26 Wafer check and wafer transfer device

Country Status (1)

Country Link
KR (1) KR0132639Y1 (en)

Also Published As

Publication number Publication date
KR0132639Y1 (en) 1999-02-01

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Legal Events

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E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
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Payment date: 20040820

Year of fee payment: 7

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