KR960025425U - Cassette plate guide device - Google Patents

Cassette plate guide device

Info

Publication number
KR960025425U
KR960025425U KR2019940035956U KR19940035956U KR960025425U KR 960025425 U KR960025425 U KR 960025425U KR 2019940035956 U KR2019940035956 U KR 2019940035956U KR 19940035956 U KR19940035956 U KR 19940035956U KR 960025425 U KR960025425 U KR 960025425U
Authority
KR
South Korea
Prior art keywords
guide device
plate guide
cassette plate
cassette
plate
Prior art date
Application number
KR2019940035956U
Other languages
Korean (ko)
Other versions
KR0119298Y1 (en
Inventor
이선구
임동국
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940035956U priority Critical patent/KR0119298Y1/en
Publication of KR960025425U publication Critical patent/KR960025425U/en
Application granted granted Critical
Publication of KR0119298Y1 publication Critical patent/KR0119298Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940035956U 1994-12-26 1994-12-26 Wafer cassette plate guide apparatus KR0119298Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035956U KR0119298Y1 (en) 1994-12-26 1994-12-26 Wafer cassette plate guide apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035956U KR0119298Y1 (en) 1994-12-26 1994-12-26 Wafer cassette plate guide apparatus

Publications (2)

Publication Number Publication Date
KR960025425U true KR960025425U (en) 1996-07-22
KR0119298Y1 KR0119298Y1 (en) 1998-08-01

Family

ID=19402888

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035956U KR0119298Y1 (en) 1994-12-26 1994-12-26 Wafer cassette plate guide apparatus

Country Status (1)

Country Link
KR (1) KR0119298Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101136902B1 (en) * 2010-01-14 2012-04-20 주식회사 에스에프에이 Cassette centering apparatus

Also Published As

Publication number Publication date
KR0119298Y1 (en) 1998-08-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090223

Year of fee payment: 12

EXPY Expiration of term