KR960004695U - Cassette fixing device - Google Patents
Cassette fixing deviceInfo
- Publication number
- KR960004695U KR960004695U KR2019940017274U KR19940017274U KR960004695U KR 960004695 U KR960004695 U KR 960004695U KR 2019940017274 U KR2019940017274 U KR 2019940017274U KR 19940017274 U KR19940017274 U KR 19940017274U KR 960004695 U KR960004695 U KR 960004695U
- Authority
- KR
- South Korea
- Prior art keywords
- fixing device
- cassette fixing
- cassette
- fixing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940017274U KR0114985Y1 (en) | 1994-07-12 | 1994-07-12 | Cassette chuck |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940017274U KR0114985Y1 (en) | 1994-07-12 | 1994-07-12 | Cassette chuck |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960004695U true KR960004695U (en) | 1996-02-16 |
KR0114985Y1 KR0114985Y1 (en) | 1998-04-15 |
Family
ID=19388216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940017274U KR0114985Y1 (en) | 1994-07-12 | 1994-07-12 | Cassette chuck |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0114985Y1 (en) |
-
1994
- 1994-07-12 KR KR2019940017274U patent/KR0114985Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0114985Y1 (en) | 1998-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20081125 Year of fee payment: 12 |
|
EXPY | Expiration of term |