KR960025384U - 고온 유체 순환장비용 저량의 유체 공급 검출 장치 - Google Patents

고온 유체 순환장비용 저량의 유체 공급 검출 장치

Info

Publication number
KR960025384U
KR960025384U KR2019940034158U KR19940034158U KR960025384U KR 960025384 U KR960025384 U KR 960025384U KR 2019940034158 U KR2019940034158 U KR 2019940034158U KR 19940034158 U KR19940034158 U KR 19940034158U KR 960025384 U KR960025384 U KR 960025384U
Authority
KR
South Korea
Prior art keywords
high temperature
detection device
supply detection
circulation equipment
fluid supply
Prior art date
Application number
KR2019940034158U
Other languages
English (en)
Other versions
KR0130138Y1 (ko
Inventor
성원호
김정래
김경태
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940034158U priority Critical patent/KR0130138Y1/ko
Publication of KR960025384U publication Critical patent/KR960025384U/ko
Application granted granted Critical
Publication of KR0130138Y1 publication Critical patent/KR0130138Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/0007—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm for discrete indicating and measuring
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B5/00—Visible signalling systems, e.g. personal calling systems, remote indication of seats occupied
    • G08B5/22—Visible signalling systems, e.g. personal calling systems, remote indication of seats occupied using electric transmission; using electromagnetic transmission
    • G08B5/36—Visible signalling systems, e.g. personal calling systems, remote indication of seats occupied using electric transmission; using electromagnetic transmission using visible light sources

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Fluid Mechanics (AREA)
  • Weting (AREA)
KR2019940034158U 1994-12-15 1994-12-15 고온 유체 순환장비용 저량의 유체 공급 검출 장치 KR0130138Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940034158U KR0130138Y1 (ko) 1994-12-15 1994-12-15 고온 유체 순환장비용 저량의 유체 공급 검출 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940034158U KR0130138Y1 (ko) 1994-12-15 1994-12-15 고온 유체 순환장비용 저량의 유체 공급 검출 장치

Publications (2)

Publication Number Publication Date
KR960025384U true KR960025384U (ko) 1996-07-22
KR0130138Y1 KR0130138Y1 (ko) 1999-02-01

Family

ID=19401447

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940034158U KR0130138Y1 (ko) 1994-12-15 1994-12-15 고온 유체 순환장비용 저량의 유체 공급 검출 장치

Country Status (1)

Country Link
KR (1) KR0130138Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7278838B2 (ja) * 2019-04-04 2023-05-22 株式会社荏原製作所 基板支持装置及び基板洗浄装置

Also Published As

Publication number Publication date
KR0130138Y1 (ko) 1999-02-01

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20050721

Year of fee payment: 8

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