KR960025377U - 반도체 식각 장비의 가스 스크러버 입구 막힘 감지장치 - Google Patents

반도체 식각 장비의 가스 스크러버 입구 막힘 감지장치

Info

Publication number
KR960025377U
KR960025377U KR2019940033473U KR19940033473U KR960025377U KR 960025377 U KR960025377 U KR 960025377U KR 2019940033473 U KR2019940033473 U KR 2019940033473U KR 19940033473 U KR19940033473 U KR 19940033473U KR 960025377 U KR960025377 U KR 960025377U
Authority
KR
South Korea
Prior art keywords
detection device
gas scrubber
etching equipment
blockage detection
semiconductor etching
Prior art date
Application number
KR2019940033473U
Other languages
English (en)
Other versions
KR0123422Y1 (ko
Inventor
홍성규
최철열
지수연
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940033473U priority Critical patent/KR0123422Y1/ko
Publication of KR960025377U publication Critical patent/KR960025377U/ko
Application granted granted Critical
Publication of KR0123422Y1 publication Critical patent/KR0123422Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B3/00—Audible signalling systems; Audible personal calling systems
    • G08B3/10—Audible signalling systems; Audible personal calling systems using electric transmission; using electromagnetic transmission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67282—Marking devices

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Drying Of Semiconductors (AREA)
KR2019940033473U 1994-12-09 1994-12-09 반도체 식각 장비의 가스 스크러버 입구 막힘 감지장치 KR0123422Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940033473U KR0123422Y1 (ko) 1994-12-09 1994-12-09 반도체 식각 장비의 가스 스크러버 입구 막힘 감지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940033473U KR0123422Y1 (ko) 1994-12-09 1994-12-09 반도체 식각 장비의 가스 스크러버 입구 막힘 감지장치

Publications (2)

Publication Number Publication Date
KR960025377U true KR960025377U (ko) 1996-07-22
KR0123422Y1 KR0123422Y1 (ko) 1999-02-18

Family

ID=19400856

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940033473U KR0123422Y1 (ko) 1994-12-09 1994-12-09 반도체 식각 장비의 가스 스크러버 입구 막힘 감지장치

Country Status (1)

Country Link
KR (1) KR0123422Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100268418B1 (ko) * 1996-12-21 2000-10-16 윤종용 이온주입기의 배기 시스템 및 배기방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102560832B1 (ko) * 2023-01-13 2023-07-31 주식회사 부쉬코리아 배출배관모니터링시스템

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100268418B1 (ko) * 1996-12-21 2000-10-16 윤종용 이온주입기의 배기 시스템 및 배기방법

Also Published As

Publication number Publication date
KR0123422Y1 (ko) 1999-02-18

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