KR960025295U - 종형 확산로의 배기장치 - Google Patents

종형 확산로의 배기장치

Info

Publication number
KR960025295U
KR960025295U KR2019940035386U KR19940035386U KR960025295U KR 960025295 U KR960025295 U KR 960025295U KR 2019940035386 U KR2019940035386 U KR 2019940035386U KR 19940035386 U KR19940035386 U KR 19940035386U KR 960025295 U KR960025295 U KR 960025295U
Authority
KR
South Korea
Prior art keywords
exhaust system
diffusion furnace
vertical diffusion
vertical
furnace
Prior art date
Application number
KR2019940035386U
Other languages
English (en)
Other versions
KR0119753Y1 (ko
Inventor
채은철
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940035386U priority Critical patent/KR0119753Y1/ko
Publication of KR960025295U publication Critical patent/KR960025295U/ko
Application granted granted Critical
Publication of KR0119753Y1 publication Critical patent/KR0119753Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019940035386U 1994-12-23 1994-12-23 종형 확산로의 배기장치 KR0119753Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035386U KR0119753Y1 (ko) 1994-12-23 1994-12-23 종형 확산로의 배기장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035386U KR0119753Y1 (ko) 1994-12-23 1994-12-23 종형 확산로의 배기장치

Publications (2)

Publication Number Publication Date
KR960025295U true KR960025295U (ko) 1996-07-22
KR0119753Y1 KR0119753Y1 (ko) 1998-08-01

Family

ID=19402485

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035386U KR0119753Y1 (ko) 1994-12-23 1994-12-23 종형 확산로의 배기장치

Country Status (1)

Country Link
KR (1) KR0119753Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100339846B1 (ko) * 1999-05-13 2002-06-07 윤종용 반도체소자 제조용 공정튜브

Also Published As

Publication number Publication date
KR0119753Y1 (ko) 1998-08-01

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Legal Events

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