KR950021378U - 확산로의 배기장치 - Google Patents

확산로의 배기장치

Info

Publication number
KR950021378U
KR950021378U KR2019930030456U KR930030456U KR950021378U KR 950021378 U KR950021378 U KR 950021378U KR 2019930030456 U KR2019930030456 U KR 2019930030456U KR 930030456 U KR930030456 U KR 930030456U KR 950021378 U KR950021378 U KR 950021378U
Authority
KR
South Korea
Prior art keywords
exhaust system
diffusion furnace
furnace exhaust
diffusion
furnace
Prior art date
Application number
KR2019930030456U
Other languages
English (en)
Other versions
KR970004974Y1 (ko
Inventor
최상범
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019930030456U priority Critical patent/KR970004974Y1/ko
Publication of KR950021378U publication Critical patent/KR950021378U/ko
Application granted granted Critical
Publication of KR970004974Y1 publication Critical patent/KR970004974Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)
KR2019930030456U 1993-12-29 1993-12-29 확산로의 배기장치 KR970004974Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930030456U KR970004974Y1 (ko) 1993-12-29 1993-12-29 확산로의 배기장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930030456U KR970004974Y1 (ko) 1993-12-29 1993-12-29 확산로의 배기장치

Publications (2)

Publication Number Publication Date
KR950021378U true KR950021378U (ko) 1995-07-28
KR970004974Y1 KR970004974Y1 (ko) 1997-05-22

Family

ID=19373464

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930030456U KR970004974Y1 (ko) 1993-12-29 1993-12-29 확산로의 배기장치

Country Status (1)

Country Link
KR (1) KR970004974Y1 (ko)

Also Published As

Publication number Publication date
KR970004974Y1 (ko) 1997-05-22

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Legal Events

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