KR960019101U - 버블러 - Google Patents

버블러

Info

Publication number
KR960019101U
KR960019101U KR2019940029089U KR19940029089U KR960019101U KR 960019101 U KR960019101 U KR 960019101U KR 2019940029089 U KR2019940029089 U KR 2019940029089U KR 19940029089 U KR19940029089 U KR 19940029089U KR 960019101 U KR960019101 U KR 960019101U
Authority
KR
South Korea
Prior art keywords
bubbler
Prior art date
Application number
KR2019940029089U
Other languages
English (en)
Other versions
KR0132642Y1 (ko
Inventor
이중연
이광준
서병주
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940029089U priority Critical patent/KR0132642Y1/ko
Publication of KR960019101U publication Critical patent/KR960019101U/ko
Application granted granted Critical
Publication of KR0132642Y1 publication Critical patent/KR0132642Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
KR2019940029089U 1994-11-02 1994-11-02 버블러 KR0132642Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940029089U KR0132642Y1 (ko) 1994-11-02 1994-11-02 버블러

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940029089U KR0132642Y1 (ko) 1994-11-02 1994-11-02 버블러

Publications (2)

Publication Number Publication Date
KR960019101U true KR960019101U (ko) 1996-06-19
KR0132642Y1 KR0132642Y1 (ko) 1999-02-01

Family

ID=19397268

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940029089U KR0132642Y1 (ko) 1994-11-02 1994-11-02 버블러

Country Status (1)

Country Link
KR (1) KR0132642Y1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101104016B1 (ko) * 2008-11-04 2012-01-06 주식회사 엘지실트론 웨이퍼 처리 장치 및 이에 사용되는 배럴과, 웨이퍼 처리 방법
KR102114088B1 (ko) * 2018-09-10 2020-06-17 (주)신우에이엔티 웨이퍼 세정용 나노 버블 분사 구조

Also Published As

Publication number Publication date
KR0132642Y1 (ko) 1999-02-01

Similar Documents

Publication Publication Date Title
DE69732720D1 (de) Einblasvorrichtung
ATA166795A (de) Bis-resorcinyltriazine
ATA147195A (de) Alkoxyphenyl-substituierte bisbenzoylphosphinoxide
ATA163695A (de) 2-hydroxyphenyltriazine
ATA108995A (de) Differenzdruckakkumulator
BR9506770A (pt) Cicloaminas substituídas com tiofeno
KR960019101U (ko) 버블러
ATA11894A (de) Stauförderbahn
KR950024232U (ko) 개량 권련 케이스
KR960000238U (ko) 휴대용 케이스
KR950032123U (ko) 개량목탁
KR980005357U (ko) 버블러
FI942861A0 (fi) Baerande form
DE9408017U1 (de) Etui
FI940632A0 (fi) Kombinerat braensle- och ellaos
FI1360U1 (fi) Justerbar inpassningsdetalj
KR960022698U (ko) 개량 꾸리대
KR950026546U (ko) 개량 경침
KR950026631U (ko) 개량 때밀이구
ATE197372T1 (de) Vorteig
BR7400053U (pt) T-compacto
BR7402083U (pt) Chuveiro-balde
BR7400030U (pt) Numeralfa
BR7401742U (pt) Sub-capacete
BR7400062U (pt) Prato-bandeja

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090828

Year of fee payment: 12

EXPY Expiration of term