KR960018598A - Reliability Measurement Method of Insulation Layer - Google Patents
Reliability Measurement Method of Insulation Layer Download PDFInfo
- Publication number
- KR960018598A KR960018598A KR1019940031602A KR19940031602A KR960018598A KR 960018598 A KR960018598 A KR 960018598A KR 1019940031602 A KR1019940031602 A KR 1019940031602A KR 19940031602 A KR19940031602 A KR 19940031602A KR 960018598 A KR960018598 A KR 960018598A
- Authority
- KR
- South Korea
- Prior art keywords
- insulating film
- current density
- reliability
- measuring
- current
- Prior art date
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- Testing Relating To Insulation (AREA)
Abstract
본 발명은 절연막의 신뢰도 측정 방법에 있어서, 상기 절연막에 전류를 가하되, 전류밀도를 일정 간격으로 증가시키면서 신뢰도를 측정하는 제1단계; 상기 제1단계에서 전류밀도가 소정값에 도달하면 더이상 전류밀도를 증가시키지 않으면서 신뢰도를 측정하는 제2단계를 포함하는 것을 특징으로 하여, 첫째, 절연막의 진성 특성과, 외인성 특성을 한번에 모두 측정할 수 있고, 둘째, 절연막의 외인성 특성은 그 측정시간이 길지 않으면서도 정확히 판단할 수 있고, 세째, 고집적 소자에서 작은 파라메타에 의한 영향을 더욱 쉽게 크게 분간할 수 있는 등의 효과가 있는 절연막의 신뢰도 측정 방법에 관한 것이다.A method of measuring reliability of an insulating film, the method comprising: applying a current to the insulating film, and measuring reliability while increasing current density at a predetermined interval; And a second step of measuring reliability when the current density reaches a predetermined value in the first step without further increasing the current density. First, the intrinsic and exogenous properties of the insulating film are measured at once. Second, the exogenous characteristics of the insulating film can be accurately determined without a long measurement time, and third, the reliability of the insulating film can effectively distinguish the influence of small parameters in the highly integrated device more easily. It relates to a measuring method.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제3도는 본 발명에 따른 절연막의 신뢰도 측정 방법을 사용하여 절연막의 신뢰도를 측정반 특성 그래프.3 is a graph of measuring panel characteristics of the reliability of the insulating film using the method of measuring the reliability of the insulating film according to the present invention.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940031602A KR960018598A (en) | 1994-11-28 | 1994-11-28 | Reliability Measurement Method of Insulation Layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940031602A KR960018598A (en) | 1994-11-28 | 1994-11-28 | Reliability Measurement Method of Insulation Layer |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960018598A true KR960018598A (en) | 1996-06-17 |
Family
ID=66648260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940031602A KR960018598A (en) | 1994-11-28 | 1994-11-28 | Reliability Measurement Method of Insulation Layer |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960018598A (en) |
-
1994
- 1994-11-28 KR KR1019940031602A patent/KR960018598A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |