KR960018598A - Reliability Measurement Method of Insulation Layer - Google Patents

Reliability Measurement Method of Insulation Layer Download PDF

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Publication number
KR960018598A
KR960018598A KR1019940031602A KR19940031602A KR960018598A KR 960018598 A KR960018598 A KR 960018598A KR 1019940031602 A KR1019940031602 A KR 1019940031602A KR 19940031602 A KR19940031602 A KR 19940031602A KR 960018598 A KR960018598 A KR 960018598A
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KR
South Korea
Prior art keywords
insulating film
current density
reliability
measuring
current
Prior art date
Application number
KR1019940031602A
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Korean (ko)
Inventor
엄금용
Original Assignee
김주용
현대전자산업 주식회사
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Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019940031602A priority Critical patent/KR960018598A/en
Publication of KR960018598A publication Critical patent/KR960018598A/en

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Abstract

본 발명은 절연막의 신뢰도 측정 방법에 있어서, 상기 절연막에 전류를 가하되, 전류밀도를 일정 간격으로 증가시키면서 신뢰도를 측정하는 제1단계; 상기 제1단계에서 전류밀도가 소정값에 도달하면 더이상 전류밀도를 증가시키지 않으면서 신뢰도를 측정하는 제2단계를 포함하는 것을 특징으로 하여, 첫째, 절연막의 진성 특성과, 외인성 특성을 한번에 모두 측정할 수 있고, 둘째, 절연막의 외인성 특성은 그 측정시간이 길지 않으면서도 정확히 판단할 수 있고, 세째, 고집적 소자에서 작은 파라메타에 의한 영향을 더욱 쉽게 크게 분간할 수 있는 등의 효과가 있는 절연막의 신뢰도 측정 방법에 관한 것이다.A method of measuring reliability of an insulating film, the method comprising: applying a current to the insulating film, and measuring reliability while increasing current density at a predetermined interval; And a second step of measuring reliability when the current density reaches a predetermined value in the first step without further increasing the current density. First, the intrinsic and exogenous properties of the insulating film are measured at once. Second, the exogenous characteristics of the insulating film can be accurately determined without a long measurement time, and third, the reliability of the insulating film can effectively distinguish the influence of small parameters in the highly integrated device more easily. It relates to a measuring method.

Description

절연막의 신뢰도 측정 방법Reliability Measurement Method of Insulation Layer

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명에 따른 절연막의 신뢰도 측정 방법을 사용하여 절연막의 신뢰도를 측정반 특성 그래프.3 is a graph of measuring panel characteristics of the reliability of the insulating film using the method of measuring the reliability of the insulating film according to the present invention.

Claims (5)

절연막의 신뢰도 측정 방법에 있어서, 상기 절연막에 전류를 가하되, 전류밀도를 일정 간격으로 증가시키면서 신뢰도를 측정하는 제1단계; 상기 제1단계에서 전류밀도가 소정값에 도달하면 더이상 전류밀도를 증가시키지 않으면서 신뢰도를 측정하는 제2단계를 포함하는 것을 특징으로 하는 절연막의 신뢰도 측정 방법.A method for measuring reliability of an insulating film, the method comprising: applying a current to the insulating film, and measuring reliability while increasing current density at a predetermined interval; And measuring the reliability without increasing the current density any more when the current density reaches a predetermined value in the first step. 제1항에 있어서, 상기 제1단계에서, 상기 절연막에 가하는 전류의 전류밀도 초기치를 -10 내지 -100nA/㎠ 중 어느 한 값에 설정하는 것을 특징으로 하는 절연막의 신뢰도 측정 방법.The method for measuring reliability of an insulating film according to claim 1, wherein in the first step, an initial value of a current density of a current applied to the insulating film is set to one of -10 to -100 nA / cm 2. 제1항에 있어서, 상기 제1단계에서, 상기 전류밀도는 한 오더(order)를 3등분 해서 점차 증가시키는 것을 특징으로 하는 절연막의 신뢰도 측정 방법.The method of claim 1, wherein in the first step, the current density is gradually increased by dividing an order by three. 제1항에 있어서, 상기 제2단계는, 상기 제1단계에서 전류밀도가 -10 내지 100mA/㎠ 중 어느 한 값에도달하면 더 이상 전류밀도를 증가시키지 않으면서 신뢰도를 측정하는 것을 특징으로 하는 절연막의 신뢰도 측정 방법.The method of claim 1, wherein in the second step, when the current density reaches a value of -10 to 100 mA / cm 2 in the first step, the reliability is measured without further increasing the current density. Method of measuring reliability of insulating film. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940031602A 1994-11-28 1994-11-28 Reliability Measurement Method of Insulation Layer KR960018598A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940031602A KR960018598A (en) 1994-11-28 1994-11-28 Reliability Measurement Method of Insulation Layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940031602A KR960018598A (en) 1994-11-28 1994-11-28 Reliability Measurement Method of Insulation Layer

Publications (1)

Publication Number Publication Date
KR960018598A true KR960018598A (en) 1996-06-17

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KR1019940031602A KR960018598A (en) 1994-11-28 1994-11-28 Reliability Measurement Method of Insulation Layer

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KR (1) KR960018598A (en)

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