KR960013460U - 가스 세정기의 입구막힘방지용 자동세척장치 - Google Patents

가스 세정기의 입구막힘방지용 자동세척장치

Info

Publication number
KR960013460U
KR960013460U KR2019940026160U KR19940026160U KR960013460U KR 960013460 U KR960013460 U KR 960013460U KR 2019940026160 U KR2019940026160 U KR 2019940026160U KR 19940026160 U KR19940026160 U KR 19940026160U KR 960013460 U KR960013460 U KR 960013460U
Authority
KR
South Korea
Prior art keywords
cleaning device
automatic cleaning
preventing clogging
gas cleaner
cleaner
Prior art date
Application number
KR2019940026160U
Other languages
English (en)
Other versions
KR0114441Y1 (ko
Inventor
최철열
홍성규
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940026160U priority Critical patent/KR0114441Y1/ko
Publication of KR960013460U publication Critical patent/KR960013460U/ko
Application granted granted Critical
Publication of KR0114441Y1 publication Critical patent/KR0114441Y1/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/346—Controlling the process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
KR2019940026160U 1994-10-07 1994-10-07 가스 세정기의 입구막힘방지용 자동세척장치 KR0114441Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940026160U KR0114441Y1 (ko) 1994-10-07 1994-10-07 가스 세정기의 입구막힘방지용 자동세척장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940026160U KR0114441Y1 (ko) 1994-10-07 1994-10-07 가스 세정기의 입구막힘방지용 자동세척장치

Publications (2)

Publication Number Publication Date
KR960013460U true KR960013460U (ko) 1996-05-17
KR0114441Y1 KR0114441Y1 (ko) 1998-04-15

Family

ID=19395009

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940026160U KR0114441Y1 (ko) 1994-10-07 1994-10-07 가스 세정기의 입구막힘방지용 자동세척장치

Country Status (1)

Country Link
KR (1) KR0114441Y1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100412579B1 (ko) * 2001-10-11 2003-12-31 한국 파이오닉스 주식회사 액상을 이용한 폐 가스 스크러버장치
KR100424870B1 (ko) * 2001-04-13 2004-03-27 엠에이티 주식회사 가스 스크러버

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100424870B1 (ko) * 2001-04-13 2004-03-27 엠에이티 주식회사 가스 스크러버
KR100412579B1 (ko) * 2001-10-11 2003-12-31 한국 파이오닉스 주식회사 액상을 이용한 폐 가스 스크러버장치

Also Published As

Publication number Publication date
KR0114441Y1 (ko) 1998-04-15

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